Abstract

Elastic properties of TaN films on (001)Si are investigated by surface Brillouin scattering (SBS). The velocity dispersion is obtained from Brillouin frequency shifts and surface acoustic wave phase velocities derived from measured SBS spectra. The observed Rayleigh surface acoustic and Sezawa waves indicate a soft on hard configuration. The elastic stiffnesses from the best fit of the calculated and measured spectra were ${C_{11}} = 288$ and ${C_{44}} = 80\;{\rm{GPa}}$. Using these elastic constants in the surface elastodynamic Green’s function yielded theoretical Brillouin spectra in agreement with measured spectra. Employing a least squares fitting procedure to the elastic constants gives uncertainties in ${C_{11}}$ and ${C_{44}}$ as ${\pm}{3.7}$ and ${\pm}{2.5}\;{\rm{GPa}}$, respectively.

© 2020 Optical Society of America

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Supplementary Material (1)

NameDescription
» Supplement 1       X-ray reflectivity patterns used to extract the film thickness of TaN thin films that have been grown on (001). The deposition times are embedded in the figures and the simulation has been carried out using Leptos software supplied by Bruker.

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