Abstract

We have formulated an asymptotic model for implementation in the finite-element method to calculate diffraction from a planar multilayered structure having a shallow surface-relief grating. The thin grating layer containing the shallow grating is replaced by a planar interface with transmission conditions that differ from the standard continuity conditions, thereby eliminating the necessity of representing the grating layer by a fine mesh. The parameters defining the shallow surface-relief grating are thereby removed from the geometry to the transmission conditions. Adoption of the asymptotic model will considerably reduce the computational cost of optimizing the grating shape because there is no need to re-mesh at every optimization step.

© 2016 Optical Society of America

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