Abstract

Recovery of an unwrapped wavefront in phase-shifting interferometry is considered when the wavefront phase increments are determined between previous and subsequent fringe patterns as well as between adjacent pixels of the current fringe pattern. A parametric model of a three-dimensional interferometric signal and the recurrence processing algorithm in state space are utilized, providing an evaluation of an unwrapped wavefront phase at each phase shift step in dynamic mode. Estimates of the achievable accuracy and experimental results of the wavefront recovery are presented. Comparison with the conventional seven-frame phase-shifting algorithm, which is one of the most accurate, confirmed the high accuracy and noise immunity of the proposed method.

© 2016 Optical Society of America

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