Abstract

The in-plane scattering patterns from a complex dielectric grating were both numerically and experimentally studied in contrast to those from well-known metallic gratings. The incidence was the transverse electric or transverse magnetic wave of wavelength λ=660nm. The grating profile was complex with a period Λ=7.0μm, while the material was lightly doped crystalline silicon. Patterns of the electric field, magnetic field, and spatial intensity distribution were demonstrated at the normal (θi=0°) and oblique (θi=+30°) incidence. Electric and magnetic fields were presented in the near field as well as the far field. The measured power ratio within 90°θr+90° was plotted. Their major peaks and the numerically obtained diffraction efficiency of 21 orders (10m+10 or 15m+5) of diffracted waves occurred at the same θr. Other peaks and stair-like shoulders of major peaks also exhibited in spectra.

© 2014 Optical Society of America

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