K. Edee, I. Fenniche, G. Granet, and B. Guizal, “Modal method based on subsectional Gegenbauer polynomilal expansion for lamellar gratings: weighting function, convergence and stability,” Prog. Electromagn. Res. 133, 17–35 (2013).

M. Waltz, T. Zebrowski, J. Küchenmeister, and K. Bush, “B-spline modal method: a polynomial approach compared to the Fourier modal method,” Opt. Express 21, 14683–14697 (2013).

[CrossRef]

A.-M. Armeanu, K. Edee, G. Granet, and P. Schiavone, “Modal method based on spline expansion for the electromagnetic analysis of the lamellar grating,” Prog. Electromagn. Res. 106, 243–261 (2010).

[CrossRef]

P. Bouchon, F. Pardo, R. Hadar, and J. Pelouard, “Fast modal method for subwavelength gratings based on B-splines formulation,” J. Opt. Soc. Am. 27, 696702 (2010).

K. Edee, P. Schiavone, and G. Granet, “Analysis of defect in extreme UV lithography mask using a modal method based on nodal B-spline expansion,” Jpn. J. Appl. Phys. 44, 6458–6462 (2005).

[CrossRef]

C. H. Sauvan, P. Lalanne, and J. P. Hugonin, “Truncation rules for modelling discontinuities with Galerkin method in electromagnetic theory,” Opt. Quantum Electron. 36, 271–284 (2004).

[CrossRef]

L. Li, “Use of Fourier series in the analysis of discontinuous periodic functions,” J. Opt. Soc. Am. 13, 1870–1876 (1996).

[CrossRef]

R. H. Morf, “Exponentially convergent and numerically efficient solution of Maxwell’s equations for lamellar gratings,” J. Opt. Soc. Am. 12, 1043–1056 (1995).

M. G. Moharam and T. K. Gaylord, “Diffraction analysis of dielectric surface-relief gratings,” J. Opt. Soc. Am. A 72, 1385–1392 (1982).

[CrossRef]

L. C. Botten, M. S. Craig, R. C. McPhedran, J. L. Adams, and J. R. Andrewwartha, “The dielectric lamellar grating,” Opt. Acta 28, 413–428 (1981)

[CrossRef]

L. C. Botten, M. S. Craig, R. C. McPhedran, J. L. Adams, and J. R. Andrewwartha, “The finitely conducting lamellar grating,” Optica Acta 28, 1087–1102 (1981).

M. G. Cox, “The numerical evaluation of B-splines,” IMA J. Appl. Math. 10, 134–149 (1972).

[CrossRef]

C. De Boor, “On calculating with B-splines,” J. Approx. Theory 6, 50–62 (1972).

[CrossRef]

R. Harrington, “Matrix methods for field problem,” Proc. IEEE 55, 136–149 (1967).

[CrossRef]

L. C. Botten, M. S. Craig, R. C. McPhedran, J. L. Adams, and J. R. Andrewwartha, “The dielectric lamellar grating,” Opt. Acta 28, 413–428 (1981)

[CrossRef]

L. C. Botten, M. S. Craig, R. C. McPhedran, J. L. Adams, and J. R. Andrewwartha, “The finitely conducting lamellar grating,” Optica Acta 28, 1087–1102 (1981).

L. C. Botten, M. S. Craig, R. C. McPhedran, J. L. Adams, and J. R. Andrewwartha, “The finitely conducting lamellar grating,” Optica Acta 28, 1087–1102 (1981).

L. C. Botten, M. S. Craig, R. C. McPhedran, J. L. Adams, and J. R. Andrewwartha, “The dielectric lamellar grating,” Opt. Acta 28, 413–428 (1981)

[CrossRef]

A.-M. Armeanu, K. Edee, G. Granet, and P. Schiavone, “Modal method based on spline expansion for the electromagnetic analysis of the lamellar grating,” Prog. Electromagn. Res. 106, 243–261 (2010).

[CrossRef]

L. C. Botten, M. S. Craig, R. C. McPhedran, J. L. Adams, and J. R. Andrewwartha, “The finitely conducting lamellar grating,” Optica Acta 28, 1087–1102 (1981).

L. C. Botten, M. S. Craig, R. C. McPhedran, J. L. Adams, and J. R. Andrewwartha, “The dielectric lamellar grating,” Opt. Acta 28, 413–428 (1981)

[CrossRef]

P. Bouchon, F. Pardo, R. Hadar, and J. Pelouard, “Fast modal method for subwavelength gratings based on B-splines formulation,” J. Opt. Soc. Am. 27, 696702 (2010).

M. G. Cox, “The numerical evaluation of B-splines,” IMA J. Appl. Math. 10, 134–149 (1972).

[CrossRef]

L. C. Botten, M. S. Craig, R. C. McPhedran, J. L. Adams, and J. R. Andrewwartha, “The dielectric lamellar grating,” Opt. Acta 28, 413–428 (1981)

[CrossRef]

L. C. Botten, M. S. Craig, R. C. McPhedran, J. L. Adams, and J. R. Andrewwartha, “The finitely conducting lamellar grating,” Optica Acta 28, 1087–1102 (1981).

C. De Boor, “On calculating with B-splines,” J. Approx. Theory 6, 50–62 (1972).

[CrossRef]

K. Edee, I. Fenniche, G. Granet, and B. Guizal, “Modal method based on subsectional Gegenbauer polynomilal expansion for lamellar gratings: weighting function, convergence and stability,” Prog. Electromagn. Res. 133, 17–35 (2013).

K. Edee, “Modal method based on subsectional Gegenbauer polynomilal expansion for lamellar grating,” J. Opt. Soc. Am. A 28, 2006–2013 (2011).

[CrossRef]

A.-M. Armeanu, K. Edee, G. Granet, and P. Schiavone, “Modal method based on spline expansion for the electromagnetic analysis of the lamellar grating,” Prog. Electromagn. Res. 106, 243–261 (2010).

[CrossRef]

K. Edee, P. Schiavone, and G. Granet, “Analysis of defect in extreme UV lithography mask using a modal method based on nodal B-spline expansion,” Jpn. J. Appl. Phys. 44, 6458–6462 (2005).

[CrossRef]

K. Edee, I. Fenniche, G. Granet, and B. Guizal, “Modal method based on subsectional Gegenbauer polynomilal expansion for lamellar gratings: weighting function, convergence and stability,” Prog. Electromagn. Res. 133, 17–35 (2013).

M. G. Moharam and T. K. Gaylord, “Diffraction analysis of dielectric surface-relief gratings,” J. Opt. Soc. Am. A 72, 1385–1392 (1982).

[CrossRef]

K. Edee, I. Fenniche, G. Granet, and B. Guizal, “Modal method based on subsectional Gegenbauer polynomilal expansion for lamellar gratings: weighting function, convergence and stability,” Prog. Electromagn. Res. 133, 17–35 (2013).

G. Granet, “Fourier-matching pseudospectral modal method for diffraction gratings: comment,” J. Opt. Soc. Am. A 29, 1843–1845 (2012).

[CrossRef]

A.-M. Armeanu, K. Edee, G. Granet, and P. Schiavone, “Modal method based on spline expansion for the electromagnetic analysis of the lamellar grating,” Prog. Electromagn. Res. 106, 243–261 (2010).

[CrossRef]

K. Edee, P. Schiavone, and G. Granet, “Analysis of defect in extreme UV lithography mask using a modal method based on nodal B-spline expansion,” Jpn. J. Appl. Phys. 44, 6458–6462 (2005).

[CrossRef]

K. Edee, I. Fenniche, G. Granet, and B. Guizal, “Modal method based on subsectional Gegenbauer polynomilal expansion for lamellar gratings: weighting function, convergence and stability,” Prog. Electromagn. Res. 133, 17–35 (2013).

P. Bouchon, F. Pardo, R. Hadar, and J. Pelouard, “Fast modal method for subwavelength gratings based on B-splines formulation,” J. Opt. Soc. Am. 27, 696702 (2010).

R. Harrington, “Matrix methods for field problem,” Proc. IEEE 55, 136–149 (1967).

[CrossRef]

C. H. Sauvan, P. Lalanne, and J. P. Hugonin, “Truncation rules for modelling discontinuities with Galerkin method in electromagnetic theory,” Opt. Quantum Electron. 36, 271–284 (2004).

[CrossRef]

C. H. Sauvan, P. Lalanne, and J. P. Hugonin, “Truncation rules for modelling discontinuities with Galerkin method in electromagnetic theory,” Opt. Quantum Electron. 36, 271–284 (2004).

[CrossRef]

L. Li, “Use of Fourier series in the analysis of discontinuous periodic functions,” J. Opt. Soc. Am. 13, 1870–1876 (1996).

[CrossRef]

L. C. Botten, M. S. Craig, R. C. McPhedran, J. L. Adams, and J. R. Andrewwartha, “The finitely conducting lamellar grating,” Optica Acta 28, 1087–1102 (1981).

L. C. Botten, M. S. Craig, R. C. McPhedran, J. L. Adams, and J. R. Andrewwartha, “The dielectric lamellar grating,” Opt. Acta 28, 413–428 (1981)

[CrossRef]

M. G. Moharam and T. K. Gaylord, “Diffraction analysis of dielectric surface-relief gratings,” J. Opt. Soc. Am. A 72, 1385–1392 (1982).

[CrossRef]

R. H. Morf, “Exponentially convergent and numerically efficient solution of Maxwell’s equations for lamellar gratings,” J. Opt. Soc. Am. 12, 1043–1056 (1995).

P. Bouchon, F. Pardo, R. Hadar, and J. Pelouard, “Fast modal method for subwavelength gratings based on B-splines formulation,” J. Opt. Soc. Am. 27, 696702 (2010).

P. Bouchon, F. Pardo, R. Hadar, and J. Pelouard, “Fast modal method for subwavelength gratings based on B-splines formulation,” J. Opt. Soc. Am. 27, 696702 (2010).

C. H. Sauvan, P. Lalanne, and J. P. Hugonin, “Truncation rules for modelling discontinuities with Galerkin method in electromagnetic theory,” Opt. Quantum Electron. 36, 271–284 (2004).

[CrossRef]

A.-M. Armeanu, K. Edee, G. Granet, and P. Schiavone, “Modal method based on spline expansion for the electromagnetic analysis of the lamellar grating,” Prog. Electromagn. Res. 106, 243–261 (2010).

[CrossRef]

K. Edee, P. Schiavone, and G. Granet, “Analysis of defect in extreme UV lithography mask using a modal method based on nodal B-spline expansion,” Jpn. J. Appl. Phys. 44, 6458–6462 (2005).

[CrossRef]

M. G. Cox, “The numerical evaluation of B-splines,” IMA J. Appl. Math. 10, 134–149 (1972).

[CrossRef]

C. De Boor, “On calculating with B-splines,” J. Approx. Theory 6, 50–62 (1972).

[CrossRef]

P. Bouchon, F. Pardo, R. Hadar, and J. Pelouard, “Fast modal method for subwavelength gratings based on B-splines formulation,” J. Opt. Soc. Am. 27, 696702 (2010).

R. H. Morf, “Exponentially convergent and numerically efficient solution of Maxwell’s equations for lamellar gratings,” J. Opt. Soc. Am. 12, 1043–1056 (1995).

L. Li, “Use of Fourier series in the analysis of discontinuous periodic functions,” J. Opt. Soc. Am. 13, 1870–1876 (1996).

[CrossRef]

K. Edee, “Modal method based on subsectional Gegenbauer polynomilal expansion for lamellar grating,” J. Opt. Soc. Am. A 28, 2006–2013 (2011).

[CrossRef]

M. G. Moharam and T. K. Gaylord, “Diffraction analysis of dielectric surface-relief gratings,” J. Opt. Soc. Am. A 72, 1385–1392 (1982).

[CrossRef]

D. Song, L. Yuan, and Y. Y. Lu, “Fourier-matching pseudo-spectral modal method for diffraction gratings,” J. Opt. Soc. Am. A 28, 613–620 (2011).

[CrossRef]

G. Granet, “Fourier-matching pseudospectral modal method for diffraction gratings: comment,” J. Opt. Soc. Am. A 29, 1843–1845 (2012).

[CrossRef]

K. Edee, P. Schiavone, and G. Granet, “Analysis of defect in extreme UV lithography mask using a modal method based on nodal B-spline expansion,” Jpn. J. Appl. Phys. 44, 6458–6462 (2005).

[CrossRef]

L. C. Botten, M. S. Craig, R. C. McPhedran, J. L. Adams, and J. R. Andrewwartha, “The dielectric lamellar grating,” Opt. Acta 28, 413–428 (1981)

[CrossRef]

C. H. Sauvan, P. Lalanne, and J. P. Hugonin, “Truncation rules for modelling discontinuities with Galerkin method in electromagnetic theory,” Opt. Quantum Electron. 36, 271–284 (2004).

[CrossRef]

L. C. Botten, M. S. Craig, R. C. McPhedran, J. L. Adams, and J. R. Andrewwartha, “The finitely conducting lamellar grating,” Optica Acta 28, 1087–1102 (1981).

R. Harrington, “Matrix methods for field problem,” Proc. IEEE 55, 136–149 (1967).

[CrossRef]

K. Edee, I. Fenniche, G. Granet, and B. Guizal, “Modal method based on subsectional Gegenbauer polynomilal expansion for lamellar gratings: weighting function, convergence and stability,” Prog. Electromagn. Res. 133, 17–35 (2013).

A.-M. Armeanu, K. Edee, G. Granet, and P. Schiavone, “Modal method based on spline expansion for the electromagnetic analysis of the lamellar grating,” Prog. Electromagn. Res. 106, 243–261 (2010).

[CrossRef]

R. Petit, ed., Electromagnetic Theory of Gratings (Springer, 1980).

E. Popov, ed., Gratings: Theory and Numeric Applications (Institut Fresnel, 2013), www.fresnel.fr .

Y. K. Sirenko and G. Strom, eds., Modern Theory of Gratings (Springer, 2009).