K. Sirenko, M. Liu, and H. Bagci, “Incorporation of exact boundary conditions into a discontinuous Galerkin finite element method for accurately solving 2D time-dependent Maxwell equations,” IEEE Trans. Antennas Propag. 61, 472–477 (2013).

[CrossRef]

K. Sirenko, V. Pazynin, Y. K. Sirenko, and H. Bagci, “An FFT-accelerated FDTD scheme with exact absorbing conditions for characterizing axially symmetric resonant structures,” Prog. Electromagn. Res. 111, 331–364 (2011).

[CrossRef]

K. Y. Sirenko, Y. K. Sirenko, and N. P. Yashina, “Modeling and analysis of transients in periodic gratings. I. Fully absorbing boundaries for 2-D open problems,” J. Opt. Soc. Am. A 27, 532–543 (2010).

[CrossRef]

S. Wei and L. Li, “In situ monitoring for development of rectangular photoresist gratings on transparent substrates,” Appl. Opt. 49, 430–436 (2010).

[CrossRef]

A. Kato and F. Scholze, “Effect of line roughness on the diffraction intensities in angular resolved scatterometry,” Appl. Opt. 49, 6102–6110 (2010).

[CrossRef]

K. Y. Sirenko, Y. K. Sirenko, and N. P. Yashina, “Modeling and analysis of transients in periodic gratings. II. Resonant wave scattering,” J. Opt. Soc. Am. A 27, 544–552 (2010).

[CrossRef]

I. Gereige, S. Robert, S. Thiria, F. Badran, G. Granet, and J. J. Rousseau, “Recognition of diffraction-grating profile using a neural network classifier in optical scatterometry,” J. Opt. Soc. Am. A 25, 1661–1667 (2008).

[CrossRef]

S. Wei and L. Li, “Measurement of photoresist grating profiles based on multiwavelength scatterometry and artificial neural network,” Appl. Opt. 47, 2524–2532 (2008).

[CrossRef]

I. Gereige, S. Robert, G. Granet, D. Jamon, and J. J. Rousseau, “Rapid control of submicrometer periodic structures by a neural inversion from ellipsometric measurement,” Opt. Commun. 278, 270–273 (2007).

[CrossRef]

P. Melezhik, A. Poyedinchuk, N. Yashina, and G. Granet, “Periodic boundary of metamaterial: eigen regimes and resonant radiation,” Pure Appl. Opt. 9, S403–S409 (2007).

[CrossRef]

Y. Sirenko, L. Velychko, and O. Shafalyuk, “Time-domain analysis of open resonators. Analytical grounds,” Prog. Electromagn. Res. 61, 1–26 (2006).

[CrossRef]

Y.-S. Ku, S.-C. Wang, D.-M. Shyu, and N. Smith, “Scatterometry-based metrology with feature region signatures matching,” Opt. Express 14, 8482–8491 (2006).

[CrossRef]

G. Bao, “Finite element approximation of time harmonic waves in periodic structures,” SIAM J. Numer. Anal. 32, 1155–1169 (1995).

[CrossRef]

T. Miyamoto, “Numerical analysis of a rib optical waveguide with trapezoidal cross section,” Opt. Commun. 34, 35–38(1980).

[CrossRef]

J. Chandezon, D. Maystre, and G. Raoult, “A new theoretical method for diffraction gratings and its numerical application,” J. Opt. 11, 235–241 (1980).

[CrossRef]

K. Sirenko, M. Liu, and H. Bagci, “Incorporation of exact boundary conditions into a discontinuous Galerkin finite element method for accurately solving 2D time-dependent Maxwell equations,” IEEE Trans. Antennas Propag. 61, 472–477 (2013).

[CrossRef]

K. Sirenko, V. Pazynin, Y. K. Sirenko, and H. Bagci, “An FFT-accelerated FDTD scheme with exact absorbing conditions for characterizing axially symmetric resonant structures,” Prog. Electromagn. Res. 111, 331–364 (2011).

[CrossRef]

G. Bao, “Finite element approximation of time harmonic waves in periodic structures,” SIAM J. Numer. Anal. 32, 1155–1169 (1995).

[CrossRef]

J. Chandezon, D. Maystre, and G. Raoult, “A new theoretical method for diffraction gratings and its numerical application,” J. Opt. 11, 235–241 (1980).

[CrossRef]

I. Gereige, S. Robert, S. Thiria, F. Badran, G. Granet, and J. J. Rousseau, “Recognition of diffraction-grating profile using a neural network classifier in optical scatterometry,” J. Opt. Soc. Am. A 25, 1661–1667 (2008).

[CrossRef]

I. Gereige, S. Robert, G. Granet, D. Jamon, and J. J. Rousseau, “Rapid control of submicrometer periodic structures by a neural inversion from ellipsometric measurement,” Opt. Commun. 278, 270–273 (2007).

[CrossRef]

I. Gereige, S. Robert, S. Thiria, F. Badran, G. Granet, and J. J. Rousseau, “Recognition of diffraction-grating profile using a neural network classifier in optical scatterometry,” J. Opt. Soc. Am. A 25, 1661–1667 (2008).

[CrossRef]

I. Gereige, S. Robert, G. Granet, D. Jamon, and J. J. Rousseau, “Rapid control of submicrometer periodic structures by a neural inversion from ellipsometric measurement,” Opt. Commun. 278, 270–273 (2007).

[CrossRef]

P. Melezhik, A. Poyedinchuk, N. Yashina, and G. Granet, “Periodic boundary of metamaterial: eigen regimes and resonant radiation,” Pure Appl. Opt. 9, S403–S409 (2007).

[CrossRef]

I. Gereige, S. Robert, G. Granet, D. Jamon, and J. J. Rousseau, “Rapid control of submicrometer periodic structures by a neural inversion from ellipsometric measurement,” Opt. Commun. 278, 270–273 (2007).

[CrossRef]

V. P. Shestopalov, A. A. Kirilenko, S. A. Masalov, and Y. K. Sirenko, Resonance Wave Scattering, Vol. 1. Diffraction Gratings (Naukova Dumka, 1986) (in Russian).

A. G. Kyurkchan, A. I. Sukov, and A. I. Kleev, “Singularities of wave fields and numerical methods of solving the boundary-value problems for Helmholtz equation,” in Generalized Multipole Techniques for Electromagnetic and Light Scattering, T. Wriedt, ed. (Elsevier, 1999), pp. 81–109.

A. G. Kyurkchan, A. I. Sukov, and A. I. Kleev, “Singularities of wave fields and numerical methods of solving the boundary-value problems for Helmholtz equation,” in Generalized Multipole Techniques for Electromagnetic and Light Scattering, T. Wriedt, ed. (Elsevier, 1999), pp. 81–109.

V. P. Shestopalov, L. N. Litvinenko, S. A. Masalov, and V. G. Sologub, Wave Diffraction by Gratings (Kharkiv University, 1973) (in Russian).

K. Sirenko, M. Liu, and H. Bagci, “Incorporation of exact boundary conditions into a discontinuous Galerkin finite element method for accurately solving 2D time-dependent Maxwell equations,” IEEE Trans. Antennas Propag. 61, 472–477 (2013).

[CrossRef]

V. P. Shestopalov, L. N. Litvinenko, S. A. Masalov, and V. G. Sologub, Wave Diffraction by Gratings (Kharkiv University, 1973) (in Russian).

V. P. Shestopalov, A. A. Kirilenko, S. A. Masalov, and Y. K. Sirenko, Resonance Wave Scattering, Vol. 1. Diffraction Gratings (Naukova Dumka, 1986) (in Russian).

J. Chandezon, D. Maystre, and G. Raoult, “A new theoretical method for diffraction gratings and its numerical application,” J. Opt. 11, 235–241 (1980).

[CrossRef]

P. Melezhik, A. Poyedinchuk, N. Yashina, and G. Granet, “Periodic boundary of metamaterial: eigen regimes and resonant radiation,” Pure Appl. Opt. 9, S403–S409 (2007).

[CrossRef]

T. Miyamoto, “Numerical analysis of a rib optical waveguide with trapezoidal cross section,” Opt. Commun. 34, 35–38(1980).

[CrossRef]

M. Neviere and E. Popov, Light Propagation in Periodic Media: Differential Theory and Design (Dekker, 2003).

K. Sirenko, V. Pazynin, Y. K. Sirenko, and H. Bagci, “An FFT-accelerated FDTD scheme with exact absorbing conditions for characterizing axially symmetric resonant structures,” Prog. Electromagn. Res. 111, 331–364 (2011).

[CrossRef]

M. Neviere and E. Popov, Light Propagation in Periodic Media: Differential Theory and Design (Dekker, 2003).

P. Melezhik, A. Poyedinchuk, N. Yashina, and G. Granet, “Periodic boundary of metamaterial: eigen regimes and resonant radiation,” Pure Appl. Opt. 9, S403–S409 (2007).

[CrossRef]

J. Chandezon, D. Maystre, and G. Raoult, “A new theoretical method for diffraction gratings and its numerical application,” J. Opt. 11, 235–241 (1980).

[CrossRef]

I. Gereige, S. Robert, S. Thiria, F. Badran, G. Granet, and J. J. Rousseau, “Recognition of diffraction-grating profile using a neural network classifier in optical scatterometry,” J. Opt. Soc. Am. A 25, 1661–1667 (2008).

[CrossRef]

I. Gereige, S. Robert, G. Granet, D. Jamon, and J. J. Rousseau, “Rapid control of submicrometer periodic structures by a neural inversion from ellipsometric measurement,” Opt. Commun. 278, 270–273 (2007).

[CrossRef]

I. Gereige, S. Robert, S. Thiria, F. Badran, G. Granet, and J. J. Rousseau, “Recognition of diffraction-grating profile using a neural network classifier in optical scatterometry,” J. Opt. Soc. Am. A 25, 1661–1667 (2008).

[CrossRef]

I. Gereige, S. Robert, G. Granet, D. Jamon, and J. J. Rousseau, “Rapid control of submicrometer periodic structures by a neural inversion from ellipsometric measurement,” Opt. Commun. 278, 270–273 (2007).

[CrossRef]

Y. Sirenko, L. Velychko, and O. Shafalyuk, “Time-domain analysis of open resonators. Analytical grounds,” Prog. Electromagn. Res. 61, 1–26 (2006).

[CrossRef]

V. P. Shestopalov, L. N. Litvinenko, S. A. Masalov, and V. G. Sologub, Wave Diffraction by Gratings (Kharkiv University, 1973) (in Russian).

V. P. Shestopalov, A. A. Kirilenko, S. A. Masalov, and Y. K. Sirenko, Resonance Wave Scattering, Vol. 1. Diffraction Gratings (Naukova Dumka, 1986) (in Russian).

V. P. Shestopalov and Y. K. Sirenko, Dynamic Theory of Gratings (Naukova Dumka, 1989) (in Russian).

K. Sirenko, M. Liu, and H. Bagci, “Incorporation of exact boundary conditions into a discontinuous Galerkin finite element method for accurately solving 2D time-dependent Maxwell equations,” IEEE Trans. Antennas Propag. 61, 472–477 (2013).

[CrossRef]

K. Sirenko, V. Pazynin, Y. K. Sirenko, and H. Bagci, “An FFT-accelerated FDTD scheme with exact absorbing conditions for characterizing axially symmetric resonant structures,” Prog. Electromagn. Res. 111, 331–364 (2011).

[CrossRef]

K. Y. Sirenko, Y. K. Sirenko, and N. P. Yashina, “Modeling and analysis of transients in periodic gratings. I. Fully absorbing boundaries for 2-D open problems,” J. Opt. Soc. Am. A 27, 532–543 (2010).

[CrossRef]

K. Y. Sirenko, Y. K. Sirenko, and N. P. Yashina, “Modeling and analysis of transients in periodic gratings. II. Resonant wave scattering,” J. Opt. Soc. Am. A 27, 544–552 (2010).

[CrossRef]

Y. Sirenko, L. Velychko, and O. Shafalyuk, “Time-domain analysis of open resonators. Analytical grounds,” Prog. Electromagn. Res. 61, 1–26 (2006).

[CrossRef]

K. Sirenko, V. Pazynin, Y. K. Sirenko, and H. Bagci, “An FFT-accelerated FDTD scheme with exact absorbing conditions for characterizing axially symmetric resonant structures,” Prog. Electromagn. Res. 111, 331–364 (2011).

[CrossRef]

K. Y. Sirenko, Y. K. Sirenko, and N. P. Yashina, “Modeling and analysis of transients in periodic gratings. I. Fully absorbing boundaries for 2-D open problems,” J. Opt. Soc. Am. A 27, 532–543 (2010).

[CrossRef]

K. Y. Sirenko, Y. K. Sirenko, and N. P. Yashina, “Modeling and analysis of transients in periodic gratings. II. Resonant wave scattering,” J. Opt. Soc. Am. A 27, 544–552 (2010).

[CrossRef]

L. G. Velychko and Y. K. Sirenko, “Controlled changes in spectra of open quasi-optical resonators,” Prog. Electromagn. Res. B 16, 85–105 (2009).

[CrossRef]

Y. K. Sirenko, S. Strom, and N. Yashina, Modeling and Analysis of Transient Processes in Open Resonant Structures. New Methods and Techniques (Springer, 2007).

V. P. Shestopalov and Y. K. Sirenko, Dynamic Theory of Gratings (Naukova Dumka, 1989) (in Russian).

V. P. Shestopalov, A. A. Kirilenko, S. A. Masalov, and Y. K. Sirenko, Resonance Wave Scattering, Vol. 1. Diffraction Gratings (Naukova Dumka, 1986) (in Russian).

V. P. Shestopalov, L. N. Litvinenko, S. A. Masalov, and V. G. Sologub, Wave Diffraction by Gratings (Kharkiv University, 1973) (in Russian).

Y. K. Sirenko, S. Strom, and N. Yashina, Modeling and Analysis of Transient Processes in Open Resonant Structures. New Methods and Techniques (Springer, 2007).

A. G. Kyurkchan, A. I. Sukov, and A. I. Kleev, “Singularities of wave fields and numerical methods of solving the boundary-value problems for Helmholtz equation,” in Generalized Multipole Techniques for Electromagnetic and Light Scattering, T. Wriedt, ed. (Elsevier, 1999), pp. 81–109.

Y. Sirenko, L. Velychko, and O. Shafalyuk, “Time-domain analysis of open resonators. Analytical grounds,” Prog. Electromagn. Res. 61, 1–26 (2006).

[CrossRef]

L. G. Velychko and Y. K. Sirenko, “Controlled changes in spectra of open quasi-optical resonators,” Prog. Electromagn. Res. B 16, 85–105 (2009).

[CrossRef]

P. Melezhik, A. Poyedinchuk, N. Yashina, and G. Granet, “Periodic boundary of metamaterial: eigen regimes and resonant radiation,” Pure Appl. Opt. 9, S403–S409 (2007).

[CrossRef]

Y. K. Sirenko, S. Strom, and N. Yashina, Modeling and Analysis of Transient Processes in Open Resonant Structures. New Methods and Techniques (Springer, 2007).

K. Y. Sirenko, Y. K. Sirenko, and N. P. Yashina, “Modeling and analysis of transients in periodic gratings. II. Resonant wave scattering,” J. Opt. Soc. Am. A 27, 544–552 (2010).

[CrossRef]

K. Y. Sirenko, Y. K. Sirenko, and N. P. Yashina, “Modeling and analysis of transients in periodic gratings. I. Fully absorbing boundaries for 2-D open problems,” J. Opt. Soc. Am. A 27, 532–543 (2010).

[CrossRef]

I. Kallioniemi, J. Saarinen, and E. Oja, “Optical scatterometry of subwavelength diffraction gratings: neural-network approach,” Appl. Opt. 37, 5830–5835 (1998).

[CrossRef]

A. Kato and F. Scholze, “Effect of line roughness on the diffraction intensities in angular resolved scatterometry,” Appl. Opt. 49, 6102–6110 (2010).

[CrossRef]

S. Wei and L. Li, “Measurement of photoresist grating profiles based on multiwavelength scatterometry and artificial neural network,” Appl. Opt. 47, 2524–2532 (2008).

[CrossRef]

S. Wei and L. Li, “In situ monitoring for development of rectangular photoresist gratings on transparent substrates,” Appl. Opt. 49, 430–436 (2010).

[CrossRef]

K. Sirenko, M. Liu, and H. Bagci, “Incorporation of exact boundary conditions into a discontinuous Galerkin finite element method for accurately solving 2D time-dependent Maxwell equations,” IEEE Trans. Antennas Propag. 61, 472–477 (2013).

[CrossRef]

J. Chandezon, D. Maystre, and G. Raoult, “A new theoretical method for diffraction gratings and its numerical application,” J. Opt. 11, 235–241 (1980).

[CrossRef]

I. Gereige, S. Robert, S. Thiria, F. Badran, G. Granet, and J. J. Rousseau, “Recognition of diffraction-grating profile using a neural network classifier in optical scatterometry,” J. Opt. Soc. Am. A 25, 1661–1667 (2008).

[CrossRef]

K. Y. Sirenko, Y. K. Sirenko, and N. P. Yashina, “Modeling and analysis of transients in periodic gratings. I. Fully absorbing boundaries for 2-D open problems,” J. Opt. Soc. Am. A 27, 532–543 (2010).

[CrossRef]

K. Y. Sirenko, Y. K. Sirenko, and N. P. Yashina, “Modeling and analysis of transients in periodic gratings. II. Resonant wave scattering,” J. Opt. Soc. Am. A 27, 544–552 (2010).

[CrossRef]

I. Gereige, S. Robert, G. Granet, D. Jamon, and J. J. Rousseau, “Rapid control of submicrometer periodic structures by a neural inversion from ellipsometric measurement,” Opt. Commun. 278, 270–273 (2007).

[CrossRef]

T. Miyamoto, “Numerical analysis of a rib optical waveguide with trapezoidal cross section,” Opt. Commun. 34, 35–38(1980).

[CrossRef]

K. Sirenko, V. Pazynin, Y. K. Sirenko, and H. Bagci, “An FFT-accelerated FDTD scheme with exact absorbing conditions for characterizing axially symmetric resonant structures,” Prog. Electromagn. Res. 111, 331–364 (2011).

[CrossRef]

Y. Sirenko, L. Velychko, and O. Shafalyuk, “Time-domain analysis of open resonators. Analytical grounds,” Prog. Electromagn. Res. 61, 1–26 (2006).

[CrossRef]

L. G. Velychko and Y. K. Sirenko, “Controlled changes in spectra of open quasi-optical resonators,” Prog. Electromagn. Res. B 16, 85–105 (2009).

[CrossRef]

P. Melezhik, A. Poyedinchuk, N. Yashina, and G. Granet, “Periodic boundary of metamaterial: eigen regimes and resonant radiation,” Pure Appl. Opt. 9, S403–S409 (2007).

[CrossRef]

G. Bao, “Finite element approximation of time harmonic waves in periodic structures,” SIAM J. Numer. Anal. 32, 1155–1169 (1995).

[CrossRef]

A. G. Kyurkchan, A. I. Sukov, and A. I. Kleev, “Singularities of wave fields and numerical methods of solving the boundary-value problems for Helmholtz equation,” in Generalized Multipole Techniques for Electromagnetic and Light Scattering, T. Wriedt, ed. (Elsevier, 1999), pp. 81–109.

Y. K. Sirenko and S. Strom, eds., Modern Theory of Gratings. Resonant Scattering: Analysis Techniques and Phenomena (Springer, 2010).

Y. K. Sirenko, S. Strom, and N. Yashina, Modeling and Analysis of Transient Processes in Open Resonant Structures. New Methods and Techniques (Springer, 2007).

M. Neviere and E. Popov, Light Propagation in Periodic Media: Differential Theory and Design (Dekker, 2003).

R. Petit, ed., Electromagnetic Theory of Gratings (Springer, 1980).

V. P. Shestopalov, L. N. Litvinenko, S. A. Masalov, and V. G. Sologub, Wave Diffraction by Gratings (Kharkiv University, 1973) (in Russian).

V. P. Shestopalov, A. A. Kirilenko, S. A. Masalov, and Y. K. Sirenko, Resonance Wave Scattering, Vol. 1. Diffraction Gratings (Naukova Dumka, 1986) (in Russian).

V. P. Shestopalov and Y. K. Sirenko, Dynamic Theory of Gratings (Naukova Dumka, 1989) (in Russian).