Abstract

The actuator influence functions of a thin meniscus mirror can be expanded in Zernike polynomials. And the correctness of influence functions has a great effect on solving the correction forces. The Zernike coefficients are applied as parameters in the all-floating support system. We analyze the main interferential factors when different deformation modes are corrected. The influence caused by fitting errors is studied in this paper. A preferable result can be obtained after eliminating the interferential factors. The method can obtain useful correction forces. Comparing the peak-to-valley and root mean square values among the results calculated by different accuracy influence functions, we find that there is a limited convergence property when the accuracy increases.

© 2013 Optical Society of America

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