Abstract

We provide both an extensive experimental characterization and a model for metal oxide, slanted columnar thin films fabricated using glancing angle deposition. The model is applicable to slanted posts of any type, deposited at a constant deposition angle, with variable azimuthal substrate rotation. The model is capable of predicting the column tilt, principal refractive indices, and in-plane birefringence under a single unified framework, given knowledge of common material parameters. This paper also establishes a number of additional important results, including the occurrence of negative in-plane birefringence and the occurrence of uniaxial films with nonzero columnar tilt.

© 2011 Optical Society of America

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