Abstract

Scattering effects from microtopographic surface roughness are merely nonparaxial diffraction phenomena resulting from random phase variations in the reflected or transmitted wavefront. Rayleigh–Rice, Beckmann–Kirchhoff. or Harvey–Shack surface scatter theories are commonly used to predict surface scatter effects. Smooth-surface and/or paraxial approximations have severely limited the range of applicability of each of the above theoretical treatments. A recent linear systems formulation of nonparaxial scalar diffraction theory applied to surface scatter phenomena resulted first in an empirically modified Beckmann–Kirchhoff surface scatter model, then a generalized Harvey–Shack theory that produces accurate results for rougher surfaces than the Rayleigh–Rice theory and for larger incident and scattered angles than the classical Beckmann–Kirchhoff and the original Harvey–Shack theories. These new developments simplify the analysis and understanding of nonintuitive scattering behavior from rough surfaces illuminated at arbitrary incident angles.

© 2011 Optical Society of America

Modeling of light scattering in different regimes of surface roughness

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Implementation of empirical modified generalized Harvey–Shack scatter model on smooth surface

Zhanpeng Ma, Hu Wang, Qinfang Chen, Yaoke Xue, Yue Pan, Yang Shen, and Haoyu Yan
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Harvey–Shack theory for a converging–diverging Gaussian beam

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Integrating optical fabrication and metrology into the optical design process

James E. Harvey
Appl. Opt. 54(9) 2224-2233 (2015)

Preparing the generalized Harvey–Shack rough surface scattering method for use with the discrete ordinates method

Villads Egede Johansen
J. Opt. Soc. Am. A 32(2) 186-194 (2015)