P. Bouchon, F. Pardo, R. Haïdar, and
J.-L. Pelouard, “Fast modal method for subwavelength gratings
based on B-spline formulation,” J. Opt. Soc. Am. A 27,
696–702 (2010).

[CrossRef]

G. Granet, L. B. Andriamanampisoa, K.
Raniriharinosy, A. M. Armeanu, and K. Edee, “Modal analysis of
lamellar gratings using the moment method with subsectional basis and
adaptive spatial resolution,” J. Opt. Soc. Am. A 27,
1303–1310(2010).

[CrossRef]

K. M. Gundu and A. Mafi, “Reliable
computation of scattering from metallic binary gratings using Fourier-based
modal methods,” J. Opt. Soc. Am. A 27, 1694–1700
(2010).

[CrossRef]

K. M. Gundu and A. Mafi, “Constrained
least squares Fourier modal method for computing scattering from metallic
binary gratings,” J. Opt. Soc. Am. A 27, 2375–2380
(2010).

[CrossRef]

A. Rathsfeld, G. Schmidt, and B. H. Kleemann,
“On a fast integral equation method for diffraction
gratings,” Commun. Comput. Phys. 1, 984–1009
(2006).

K. Edee, P. Schiavone, and G. Granet,
“Analysis of defect in extreme UV lithography mask using a modal
method based on nodal B-spline expansion,” Jpn. J. Appl. Phys.
44, 6458–6462 (2005).

[CrossRef]

L. Li, “Mathematical reflections on
the Fourier modal method in grating theory,” in Mathematical
Modeling in Optical Science, G.Bao, L.Cowsar, and W.Masters, eds., SIAM
Frontiers in Applied Mathematics (SIAM, 2001),
pp. 111–139.

[CrossRef]

P. Lalanne and M. P. Jurek,
“Computation of the near-field pattern with the coupled-wave
method for transverse magnetic polarization,” J. Mod. Opt. 45,
1357–1374 (1998).

[CrossRef]

P. Lalanne and G. M. Morris, “Highly
improved convergence of the coupled-wave method for TM
polarization,” J. Opt. Soc. Am. A 13, 779–784
(1996).

[CrossRef]

G. Granet and B. Guizal, “Efficient
implementation of the coupled-wave method for metallic lamellar gratings in
TM polarization,” J. Opt. Soc. Am. A 13, 1019–1023
(1996).

[CrossRef]

L. Li, “Use of Fourier series in the
analysis of discontinuous periodic structures,” J. Opt. Soc. Am.
A 13, 1870–1876(1996).

[CrossRef]

L. Li and J. Chandezon, “Improvement
of the coordinate transformation method for surface-relief gratings with
sharp edges,” J. Opt. Soc. Am. A 13, 2247–2255
(1996).

[CrossRef]

M. Bressan and P. Gamba, “Analytical
expressions of field singularities at the edge of four right
wedges,” IEEE Microw. Guided Wave Lett. 4, 3–5
(1994).

[CrossRef]

J. van Bladel, Singular Electromagnetic Fields
and Sources (Clarendon, 1991),
pp. 116–162.

G. I. Makarov and A. V. Osipov,
“Structure of Meixner’s series,” Radiophys.
Quantum Electron. 29, 544–549 (1986).

[CrossRef]

L. C. Botten, M. S. Craig, R. C. Mcphedran, J. L.
Adams, and J. R. Andrewartha, “The dielectric lamellar
diffraction grating,” Opt. Acta 28, 413–428
(1981).

[CrossRef]

L. C. Botten, M. S. Craig, R. C. Mcphedran, J. L.
Adams, and J. R. Andrewartha, “The finitely conducting lamellar
diffraction grating,” Opt. Acta 28, 1087–1102
(1981).

[CrossRef]

J. Chandezon, D. Maystre, and G. Raoult,
“A new theoretical method for diffraction gratings and its
numerical application,” J. Opt. 11, 235–241
(1980).

[CrossRef]

J. B. Andersen and V. V. Solodukhov,
“Field behavior near a dielectric wedge,” IEEE Trans.
Antennas Propag. 26, 598–602 (1978).

[CrossRef]

D. Maystre, “Sur la diffraction et
l’absorption par les réseaux utilisés dans
l’infrarouge, le visible et l’ultraviolet,”
Ph.D. dissertation (Université d'Aix-Marseille III,
1974).

M. S. Bobrovnikov and V. P. Zamaraeva,
“On the singularity of the field near a dielectric
wedge,” Sov. Phys. J. 16,
1230–1232(1973).

[CrossRef]

J. Meixner, “The behavior of
electromagnetic fields at edges,” IEEE Trans. Antennas Propag.
20, 442–446 (1972).

[CrossRef]

L. C. Botten, M. S. Craig, R. C. Mcphedran, J. L.
Adams, and J. R. Andrewartha, “The dielectric lamellar
diffraction grating,” Opt. Acta 28, 413–428
(1981).

[CrossRef]

L. C. Botten, M. S. Craig, R. C. Mcphedran, J. L.
Adams, and J. R. Andrewartha, “The finitely conducting lamellar
diffraction grating,” Opt. Acta 28, 1087–1102
(1981).

[CrossRef]

J. B. Andersen and V. V. Solodukhov,
“Field behavior near a dielectric wedge,” IEEE Trans.
Antennas Propag. 26, 598–602 (1978).

[CrossRef]

L. C. Botten, M. S. Craig, R. C. Mcphedran, J. L.
Adams, and J. R. Andrewartha, “The finitely conducting lamellar
diffraction grating,” Opt. Acta 28, 1087–1102
(1981).

[CrossRef]

L. C. Botten, M. S. Craig, R. C. Mcphedran, J. L.
Adams, and J. R. Andrewartha, “The dielectric lamellar
diffraction grating,” Opt. Acta 28, 413–428
(1981).

[CrossRef]

M. S. Bobrovnikov and V. P. Zamaraeva,
“On the singularity of the field near a dielectric
wedge,” Sov. Phys. J. 16,
1230–1232(1973).

[CrossRef]

L. C. Botten, M. S. Craig, R. C. Mcphedran, J. L.
Adams, and J. R. Andrewartha, “The finitely conducting lamellar
diffraction grating,” Opt. Acta 28, 1087–1102
(1981).

[CrossRef]

L. C. Botten, M. S. Craig, R. C. Mcphedran, J. L.
Adams, and J. R. Andrewartha, “The dielectric lamellar
diffraction grating,” Opt. Acta 28, 413–428
(1981).

[CrossRef]

M. Bressan and P. Gamba, “Analytical
expressions of field singularities at the edge of four right
wedges,” IEEE Microw. Guided Wave Lett. 4, 3–5
(1994).

[CrossRef]

L. C. Botten, M. S. Craig, R. C. Mcphedran, J. L.
Adams, and J. R. Andrewartha, “The dielectric lamellar
diffraction grating,” Opt. Acta 28, 413–428
(1981).

[CrossRef]

L. C. Botten, M. S. Craig, R. C. Mcphedran, J. L.
Adams, and J. R. Andrewartha, “The finitely conducting lamellar
diffraction grating,” Opt. Acta 28, 1087–1102
(1981).

[CrossRef]

G. Granet, L. B. Andriamanampisoa, K.
Raniriharinosy, A. M. Armeanu, and K. Edee, “Modal analysis of
lamellar gratings using the moment method with subsectional basis and
adaptive spatial resolution,” J. Opt. Soc. Am. A 27,
1303–1310(2010).

[CrossRef]

K. Edee, P. Schiavone, and G. Granet,
“Analysis of defect in extreme UV lithography mask using a modal
method based on nodal B-spline expansion,” Jpn. J. Appl. Phys.
44, 6458–6462 (2005).

[CrossRef]

M. Bressan and P. Gamba, “Analytical
expressions of field singularities at the edge of four right
wedges,” IEEE Microw. Guided Wave Lett. 4, 3–5
(1994).

[CrossRef]

G. Granet, L. B. Andriamanampisoa, K.
Raniriharinosy, A. M. Armeanu, and K. Edee, “Modal analysis of
lamellar gratings using the moment method with subsectional basis and
adaptive spatial resolution,” J. Opt. Soc. Am. A 27,
1303–1310(2010).

[CrossRef]

K. Edee, P. Schiavone, and G. Granet,
“Analysis of defect in extreme UV lithography mask using a modal
method based on nodal B-spline expansion,” Jpn. J. Appl. Phys.
44, 6458–6462 (2005).

[CrossRef]

G. Granet and B. Guizal, “Efficient
implementation of the coupled-wave method for metallic lamellar gratings in
TM polarization,” J. Opt. Soc. Am. A 13, 1019–1023
(1996).

[CrossRef]

P. Lalanne and M. P. Jurek,
“Computation of the near-field pattern with the coupled-wave
method for transverse magnetic polarization,” J. Mod. Opt. 45,
1357–1374 (1998).

[CrossRef]

P. Y. Ufimtsev, B. Khayatian, and Y.
Rahmat-Samii, “Singular edge behavior: to impose or not
impose—that is the question,” Microw. Opt. Technol.
Lett. 24, 218–223 (2000).

[CrossRef]

A. Rathsfeld, G. Schmidt, and B. H. Kleemann,
“On a fast integral equation method for diffraction
gratings,” Commun. Comput. Phys. 1, 984–1009
(2006).

L. Li, “Mathematical reflections on
the Fourier modal method in grating theory,” in Mathematical
Modeling in Optical Science, G.Bao, L.Cowsar, and W.Masters, eds., SIAM
Frontiers in Applied Mathematics (SIAM, 2001),
pp. 111–139.

[CrossRef]

L. Li, “Use of Fourier series in the
analysis of discontinuous periodic structures,” J. Opt. Soc. Am.
A 13, 1870–1876(1996).

[CrossRef]

L. Li and J. Chandezon, “Improvement
of the coordinate transformation method for surface-relief gratings with
sharp edges,” J. Opt. Soc. Am. A 13, 2247–2255
(1996).

[CrossRef]

G. I. Makarov and A. V. Osipov,
“Structure of Meixner’s series,” Radiophys.
Quantum Electron. 29, 544–549 (1986).

[CrossRef]

J. Chandezon, D. Maystre, and G. Raoult,
“A new theoretical method for diffraction gratings and its
numerical application,” J. Opt. 11, 235–241
(1980).

[CrossRef]

D. Maystre, “Sur la diffraction et
l’absorption par les réseaux utilisés dans
l’infrarouge, le visible et l’ultraviolet,”
Ph.D. dissertation (Université d'Aix-Marseille III,
1974).

L. C. Botten, M. S. Craig, R. C. Mcphedran, J. L.
Adams, and J. R. Andrewartha, “The dielectric lamellar
diffraction grating,” Opt. Acta 28, 413–428
(1981).

[CrossRef]

L. C. Botten, M. S. Craig, R. C. Mcphedran, J. L.
Adams, and J. R. Andrewartha, “The finitely conducting lamellar
diffraction grating,” Opt. Acta 28, 1087–1102
(1981).

[CrossRef]

J. Meixner, “The behavior of
electromagnetic fields at edges,” IEEE Trans. Antennas Propag.
20, 442–446 (1972).

[CrossRef]

G. I. Makarov and A. V. Osipov,
“Structure of Meixner’s series,” Radiophys.
Quantum Electron. 29, 544–549 (1986).

[CrossRef]

P. Y. Ufimtsev, B. Khayatian, and Y.
Rahmat-Samii, “Singular edge behavior: to impose or not
impose—that is the question,” Microw. Opt. Technol.
Lett. 24, 218–223 (2000).

[CrossRef]

J. Chandezon, D. Maystre, and G. Raoult,
“A new theoretical method for diffraction gratings and its
numerical application,” J. Opt. 11, 235–241
(1980).

[CrossRef]

A. Rathsfeld, G. Schmidt, and B. H. Kleemann,
“On a fast integral equation method for diffraction
gratings,” Commun. Comput. Phys. 1, 984–1009
(2006).

K. Edee, P. Schiavone, and G. Granet,
“Analysis of defect in extreme UV lithography mask using a modal
method based on nodal B-spline expansion,” Jpn. J. Appl. Phys.
44, 6458–6462 (2005).

[CrossRef]

A. Rathsfeld, G. Schmidt, and B. H. Kleemann,
“On a fast integral equation method for diffraction
gratings,” Commun. Comput. Phys. 1, 984–1009
(2006).

J. B. Andersen and V. V. Solodukhov,
“Field behavior near a dielectric wedge,” IEEE Trans.
Antennas Propag. 26, 598–602 (1978).

[CrossRef]

P. Y. Ufimtsev, B. Khayatian, and Y.
Rahmat-Samii, “Singular edge behavior: to impose or not
impose—that is the question,” Microw. Opt. Technol.
Lett. 24, 218–223 (2000).

[CrossRef]

J. van Bladel, Singular Electromagnetic Fields
and Sources (Clarendon, 1991),
pp. 116–162.

M. S. Bobrovnikov and V. P. Zamaraeva,
“On the singularity of the field near a dielectric
wedge,” Sov. Phys. J. 16,
1230–1232(1973).

[CrossRef]

A. Rathsfeld, G. Schmidt, and B. H. Kleemann,
“On a fast integral equation method for diffraction
gratings,” Commun. Comput. Phys. 1, 984–1009
(2006).

M. Bressan and P. Gamba, “Analytical
expressions of field singularities at the edge of four right
wedges,” IEEE Microw. Guided Wave Lett. 4, 3–5
(1994).

[CrossRef]

J. Meixner, “The behavior of
electromagnetic fields at edges,” IEEE Trans. Antennas Propag.
20, 442–446 (1972).

[CrossRef]

J. B. Andersen and V. V. Solodukhov,
“Field behavior near a dielectric wedge,” IEEE Trans.
Antennas Propag. 26, 598–602 (1978).

[CrossRef]

P. Lalanne and M. P. Jurek,
“Computation of the near-field pattern with the coupled-wave
method for transverse magnetic polarization,” J. Mod. Opt. 45,
1357–1374 (1998).

[CrossRef]

J. Chandezon, D. Maystre, and G. Raoult,
“A new theoretical method for diffraction gratings and its
numerical application,” J. Opt. 11, 235–241
(1980).

[CrossRef]

L. Li and J. Chandezon, “Improvement
of the coordinate transformation method for surface-relief gratings with
sharp edges,” J. Opt. Soc. Am. A 13, 2247–2255
(1996).

[CrossRef]

E. Popov, B. Chernov, M. Nevière, and N.
Bonod, “Differential theory: application to highly conducting
gratings,” J. Opt. Soc. Am. A 21, 199–206
(2004).

[CrossRef]

P. Lalanne and J.-P. Hugonin,
“Numerical performance of finite-difference modal method for the
electromagnetic analysis of one-dimensional lamellar gratings,”
J. Opt. Soc. Am. A 17, 1033–1042 (2000).

[CrossRef]

P. Bouchon, F. Pardo, R. Haïdar, and
J.-L. Pelouard, “Fast modal method for subwavelength gratings
based on B-spline formulation,” J. Opt. Soc. Am. A 27,
696–702 (2010).

[CrossRef]

G. Granet, L. B. Andriamanampisoa, K.
Raniriharinosy, A. M. Armeanu, and K. Edee, “Modal analysis of
lamellar gratings using the moment method with subsectional basis and
adaptive spatial resolution,” J. Opt. Soc. Am. A 27,
1303–1310(2010).

[CrossRef]

P. Lalanne and G. M. Morris, “Highly
improved convergence of the coupled-wave method for TM
polarization,” J. Opt. Soc. Am. A 13, 779–784
(1996).

[CrossRef]

G. Granet and B. Guizal, “Efficient
implementation of the coupled-wave method for metallic lamellar gratings in
TM polarization,” J. Opt. Soc. Am. A 13, 1019–1023
(1996).

[CrossRef]

L. Li, “Use of Fourier series in the
analysis of discontinuous periodic structures,” J. Opt. Soc. Am.
A 13, 1870–1876(1996).

[CrossRef]

N. M. Lyndin, O. Parriaux, and A. V. Tishchenko,
“Modal analysis and suppression of the Fourier modal method
instabilities in highly conductive gratings,” J. Opt. Soc. Am. A
24, 3781–3788(2007).

[CrossRef]

K. M. Gundu and A. Mafi, “Reliable
computation of scattering from metallic binary gratings using Fourier-based
modal methods,” J. Opt. Soc. Am. A 27, 1694–1700
(2010).

[CrossRef]

K. M. Gundu and A. Mafi, “Constrained
least squares Fourier modal method for computing scattering from metallic
binary gratings,” J. Opt. Soc. Am. A 27, 2375–2380
(2010).

[CrossRef]

K. Edee, P. Schiavone, and G. Granet,
“Analysis of defect in extreme UV lithography mask using a modal
method based on nodal B-spline expansion,” Jpn. J. Appl. Phys.
44, 6458–6462 (2005).

[CrossRef]

P. Y. Ufimtsev, B. Khayatian, and Y.
Rahmat-Samii, “Singular edge behavior: to impose or not
impose—that is the question,” Microw. Opt. Technol.
Lett. 24, 218–223 (2000).

[CrossRef]

L. C. Botten, M. S. Craig, R. C. Mcphedran, J. L.
Adams, and J. R. Andrewartha, “The dielectric lamellar
diffraction grating,” Opt. Acta 28, 413–428
(1981).

[CrossRef]

L. C. Botten, M. S. Craig, R. C. Mcphedran, J. L.
Adams, and J. R. Andrewartha, “The finitely conducting lamellar
diffraction grating,” Opt. Acta 28, 1087–1102
(1981).

[CrossRef]

G. I. Makarov and A. V. Osipov,
“Structure of Meixner’s series,” Radiophys.
Quantum Electron. 29, 544–549 (1986).

[CrossRef]

M. S. Bobrovnikov and V. P. Zamaraeva,
“On the singularity of the field near a dielectric
wedge,” Sov. Phys. J. 16,
1230–1232(1973).

[CrossRef]

L. Li, “Mathematical reflections on
the Fourier modal method in grating theory,” in Mathematical
Modeling in Optical Science, G.Bao, L.Cowsar, and W.Masters, eds., SIAM
Frontiers in Applied Mathematics (SIAM, 2001),
pp. 111–139.

[CrossRef]

J. van Bladel, Singular Electromagnetic Fields
and Sources (Clarendon, 1991),
pp. 116–162.

D. Maystre, “Sur la diffraction et
l’absorption par les réseaux utilisés dans
l’infrarouge, le visible et l’ultraviolet,”
Ph.D. dissertation (Université d'Aix-Marseille III,
1974).