Abstract

A Fourier-matching pseudospectral modal method [PSMM(f)] is developed for analyzing lamellar diffraction gratings or grating stacks. A Chebyshev pseudospectral method is first used to accurately calculate the eigenmodes of the grating layers, and then the Fourier coefficients are matched at the interfaces between the layers. Compared with an existing pseudospectral modal method based on point matching, the PSMM(f) is more robust and accurate. The method performs better than the standard Fourier modal method for gratings involving metals.

© 2011 Optical Society of America

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