Abstract

The waveguide sensitivity of silicon slot microring sensors and single- and double-slot microrings is analyzed using a combination of the effective index and the Airy-functions-based mode matching methods. The sensing properties of these two cases are investigated under a variety of geometries. The trends of the waveguide sensitivity on each geometrical parameter are obtained. In addition, the influence of asymmetry on the waveguide sensitivity is also investigated. Calculation also illustrates that double-slot microrings offer wider fabrication tolerance than single-slot ones. These results provide a guideline and insights for designing microring geometry to satisfy the desired sensing requirements and performance.

© 2011 Optical Society of America

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    [CrossRef]
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2010 (1)

C. F. Carlborg, K. B. Gylfason, A. Kaźmierczak, F. Dortu, M. J. Bañuls Polo, A. Maquieira Catala, G. M. Kresbach, H. Sohlström, T. Moh, L. Vivien, J. Popplewell, G. Ronan, C. A. Barrios, G. Stemme, and W. van der Wijngaart, “A packaged optical slot-waveguide ring resonator sensor array for multiplex label-free assays in labs-on-chips,” Lab Chip 10, 281–290 (2010).
[CrossRef] [PubMed]

2009 (3)

T. Claes, J. G. Molera, K. D. Vos, E. Schacht, R. Baets, and P. Bienstman, “Label-free biosensing with a slot waveguide based ring resonator in silicon-on-insulator,” IEEE Photon. J. 1, 197–204 (2009).
[CrossRef]

H. Sun, A. Chen, and L. R. Dalton, “Enhanced evanescent confinement in multiple-slot waveguides and its application in biochemical sensing,” IEEE Photon. J. 1, 48–57 (2009).
[CrossRef]

K. R. Hiremath, “Analytical modal analysis of bent slot waveguides,” J. Opt. Soc. Am. A 26, 2321–2326 (2009).
[CrossRef]

2008 (6)

2007 (6)

2006 (5)

T. Fujisawa and M. Koshiba, “Theoretical investigation of ultrasmall polarization-insensitive 1×2 multimode interference waveguides based on sandwiched structures,” IEEE Photon. Technol. Lett. 18, 1246–1248 (2006).
[CrossRef]

C. Y. Chao and L. J. Guo, “Design and optimization of microring resonators in biochemical sensing application,” J. Lightwave Technol. 24, 1395–1402 (2006).
[CrossRef]

P. A. Andrew, B. S. Schmidt, and M. Lipson, “High confinement in silicon slot waveguides with sharp bends,” Opt. Express 14, 9197–9202 (2006).
[CrossRef]

P. Mullner and R. Hainberger, “Structural optimization of silicon-on-insulator slot waveguides,” IEEE Photon. Technol. Lett. 18, 2557–2559 (2006).
[CrossRef]

N.-N. Feng, J. Michel, and L. C. Kimerling, “Optical field concentration in low-index waveguides,” IEEE J. Quantum Electron. 42, 885–890 (2006).
[CrossRef]

2005 (3)

T. Baehr-Jones, M. Hochberg, C. Walker, and A. Scherer, “High-Q optical resonators in silicon-on-insulator-based slot waveguides,” Appl. Phys. Lett. 86, 081101 (2005).
[CrossRef]

J. Lu, S. He, and V. G. Romanov, “A simple and effective method for calculating the bending loss and phase enhancement of a bent planar waveguide,” Fiber Integr. Opt. 24, 25–36(2005).
[CrossRef]

C. A. Barrios and M. Lipson, “Electrically driven silicon resonant light emitting device based on slot waveguide,” Opt. Express 13, 10092–10101 (2005).
[CrossRef] [PubMed]

2004 (3)

C. Y. Chao and L. J. Guo, “Reduction of surface scattering loss in polymer microrings using thermal-reflow technique,” IEEE Photon. Technol. Lett. 16, 1498–1500 (2004).
[CrossRef]

V. R. Almeida, Q. Xu, C. A. Barrios, and M. Lipson, “Guiding and confining light in void nanostructure,” Opt. Lett. 29, 1209–1211(2004).
[CrossRef] [PubMed]

C. Barrios, “High-performance all-optical silicon microswitch,” Electron. Lett. 40, 862–863 (2004).
[CrossRef]

Almeida, V. R.

Alvarez, J.

Andrew, P. A.

Baehr-Jones, T.

M. Hochberg, T. Baehr-Jones, G. Wang, J. Huang, P. Sullivan, L. Dalton, and A. Scherer, “Towards a millivolt optical modulator with nano-slot waveguides,” Opt. Express 15, 8401–8410 (2007).
[CrossRef] [PubMed]

T. Baehr-Jones, M. Hochberg, C. Walker, and A. Scherer, “High-Q optical resonators in silicon-on-insulator-based slot waveguides,” Appl. Phys. Lett. 86, 081101 (2005).
[CrossRef]

Baets, R.

T. Claes, J. G. Molera, K. D. Vos, E. Schacht, R. Baets, and P. Bienstman, “Label-free biosensing with a slot waveguide based ring resonator in silicon-on-insulator,” IEEE Photon. J. 1, 197–204 (2009).
[CrossRef]

Banuls, K. M. J.

Bañuls Polo, M. J.

C. F. Carlborg, K. B. Gylfason, A. Kaźmierczak, F. Dortu, M. J. Bañuls Polo, A. Maquieira Catala, G. M. Kresbach, H. Sohlström, T. Moh, L. Vivien, J. Popplewell, G. Ronan, C. A. Barrios, G. Stemme, and W. van der Wijngaart, “A packaged optical slot-waveguide ring resonator sensor array for multiplex label-free assays in labs-on-chips,” Lab Chip 10, 281–290 (2010).
[CrossRef] [PubMed]

Barrios, C.

C. Barrios, “High-performance all-optical silicon microswitch,” Electron. Lett. 40, 862–863 (2004).
[CrossRef]

Barrios, C. A.

Bienstman, P.

T. Claes, J. G. Molera, K. D. Vos, E. Schacht, R. Baets, and P. Bienstman, “Label-free biosensing with a slot waveguide based ring resonator in silicon-on-insulator,” IEEE Photon. J. 1, 197–204 (2009).
[CrossRef]

Bouville, D.

Carlborg, C. F.

C. F. Carlborg, K. B. Gylfason, A. Kaźmierczak, F. Dortu, M. J. Bañuls Polo, A. Maquieira Catala, G. M. Kresbach, H. Sohlström, T. Moh, L. Vivien, J. Popplewell, G. Ronan, C. A. Barrios, G. Stemme, and W. van der Wijngaart, “A packaged optical slot-waveguide ring resonator sensor array for multiplex label-free assays in labs-on-chips,” Lab Chip 10, 281–290 (2010).
[CrossRef] [PubMed]

Casquel, R.

Cassan, E.

Catala, A. Maquieira

C. F. Carlborg, K. B. Gylfason, A. Kaźmierczak, F. Dortu, M. J. Bañuls Polo, A. Maquieira Catala, G. M. Kresbach, H. Sohlström, T. Moh, L. Vivien, J. Popplewell, G. Ronan, C. A. Barrios, G. Stemme, and W. van der Wijngaart, “A packaged optical slot-waveguide ring resonator sensor array for multiplex label-free assays in labs-on-chips,” Lab Chip 10, 281–290 (2010).
[CrossRef] [PubMed]

Chao, C. Y.

C. Y. Chao and L. J. Guo, “Design and optimization of microring resonators in biochemical sensing application,” J. Lightwave Technol. 24, 1395–1402 (2006).
[CrossRef]

C. Y. Chao and L. J. Guo, “Reduction of surface scattering loss in polymer microrings using thermal-reflow technique,” IEEE Photon. Technol. Lett. 16, 1498–1500 (2004).
[CrossRef]

Chao, C.-Y.

Chen, A.

H. Sun, A. Chen, and L. R. Dalton, “Enhanced evanescent confinement in multiple-slot waveguides and its application in biochemical sensing,” IEEE Photon. J. 1, 48–57 (2009).
[CrossRef]

Chen, L.

Chen, S.

X. Tu, X. Xu, S. Chen, J. Yu, and Q. Wang, “Simulation demonstration and experimental fabrication of a multiple-slot waveguide,” IEEE Photon. Technol. Lett. 20, 333–335 (2008).
[CrossRef]

Claes, T.

T. Claes, J. G. Molera, K. D. Vos, E. Schacht, R. Baets, and P. Bienstman, “Label-free biosensing with a slot waveguide based ring resonator in silicon-on-insulator,” IEEE Photon. J. 1, 197–204 (2009).
[CrossRef]

Dalton, L.

Dalton, L. R.

H. Sun, A. Chen, and L. R. Dalton, “Enhanced evanescent confinement in multiple-slot waveguides and its application in biochemical sensing,” IEEE Photon. J. 1, 48–57 (2009).
[CrossRef]

Dell’Olio, F.

Dong, P.

Dortu, F.

C. F. Carlborg, K. B. Gylfason, A. Kaźmierczak, F. Dortu, M. J. Bañuls Polo, A. Maquieira Catala, G. M. Kresbach, H. Sohlström, T. Moh, L. Vivien, J. Popplewell, G. Ronan, C. A. Barrios, G. Stemme, and W. van der Wijngaart, “A packaged optical slot-waveguide ring resonator sensor array for multiplex label-free assays in labs-on-chips,” Lab Chip 10, 281–290 (2010).
[CrossRef] [PubMed]

Fauchet, P. M.

Feng, N.-N.

Fu, Y.

Fujisawa, T.

T. Fujisawa and M. Koshiba, “Theoretical investigation of ultrasmall polarization-insensitive 1×2 multimode interference waveguides based on sandwiched structures,” IEEE Photon. Technol. Lett. 18, 1246–1248 (2006).
[CrossRef]

Gonzalez-Pedro, V.

Griol, A.

Guo, L. J.

C. Y. Chao and L. J. Guo, “Design and optimization of microring resonators in biochemical sensing application,” J. Lightwave Technol. 24, 1395–1402 (2006).
[CrossRef]

C. Y. Chao and L. J. Guo, “Reduction of surface scattering loss in polymer microrings using thermal-reflow technique,” IEEE Photon. Technol. Lett. 16, 1498–1500 (2004).
[CrossRef]

Gylfason, B.

Gylfason, K. B.

C. F. Carlborg, K. B. Gylfason, A. Kaźmierczak, F. Dortu, M. J. Bañuls Polo, A. Maquieira Catala, G. M. Kresbach, H. Sohlström, T. Moh, L. Vivien, J. Popplewell, G. Ronan, C. A. Barrios, G. Stemme, and W. van der Wijngaart, “A packaged optical slot-waveguide ring resonator sensor array for multiplex label-free assays in labs-on-chips,” Lab Chip 10, 281–290 (2010).
[CrossRef] [PubMed]

L. Vivien, D. Marris-Morini, A. Griol, K. B. Gylfason, D. Hill, J. Alvarez, H. Sohlstrom, J. Hurtado, D. Bouville, and E. Cassan, “Vertical multiple-slot waveguide ring resonators in silicon nitride,” Opt. Express 16, 17237–17242 (2008).
[CrossRef] [PubMed]

C. A. Barrios, K. B. Gylfason, B. Sanchez, A. Griol, H. Sohlström, M. Holgado, and R. Casquel, “Slot-waveguide biochemical sensor,” Opt. Lett. 32, 3080–3082 (2007).
[CrossRef] [PubMed]

Hainberger, R.

P. Mullner and R. Hainberger, “Structural optimization of silicon-on-insulator slot waveguides,” IEEE Photon. Technol. Lett. 18, 2557–2559 (2006).
[CrossRef]

He, S.

J. Lu, S. He, and V. G. Romanov, “A simple and effective method for calculating the bending loss and phase enhancement of a bent planar waveguide,” Fiber Integr. Opt. 24, 25–36(2005).
[CrossRef]

Hill, D.

Hiremath, K. R.

Hochberg, M.

M. Hochberg, T. Baehr-Jones, G. Wang, J. Huang, P. Sullivan, L. Dalton, and A. Scherer, “Towards a millivolt optical modulator with nano-slot waveguides,” Opt. Express 15, 8401–8410 (2007).
[CrossRef] [PubMed]

T. Baehr-Jones, M. Hochberg, C. Walker, and A. Scherer, “High-Q optical resonators in silicon-on-insulator-based slot waveguides,” Appl. Phys. Lett. 86, 081101 (2005).
[CrossRef]

Holgado, M.

Hong, C.-Y.

Huang, J.

Hurtado, J.

Kazmierczak, A.

C. F. Carlborg, K. B. Gylfason, A. Kaźmierczak, F. Dortu, M. J. Bañuls Polo, A. Maquieira Catala, G. M. Kresbach, H. Sohlström, T. Moh, L. Vivien, J. Popplewell, G. Ronan, C. A. Barrios, G. Stemme, and W. van der Wijngaart, “A packaged optical slot-waveguide ring resonator sensor array for multiplex label-free assays in labs-on-chips,” Lab Chip 10, 281–290 (2010).
[CrossRef] [PubMed]

Kimerling, L.

Kimerling, L. C.

N.-N. Feng, J. Michel, and L. C. Kimerling, “Optical field concentration in low-index waveguides,” IEEE J. Quantum Electron. 42, 885–890 (2006).
[CrossRef]

Koshiba, M.

T. Fujisawa and M. Koshiba, “Theoretical investigation of ultrasmall polarization-insensitive 1×2 multimode interference waveguides based on sandwiched structures,” IEEE Photon. Technol. Lett. 18, 1246–1248 (2006).
[CrossRef]

Kresbach, G. M.

C. F. Carlborg, K. B. Gylfason, A. Kaźmierczak, F. Dortu, M. J. Bañuls Polo, A. Maquieira Catala, G. M. Kresbach, H. Sohlström, T. Moh, L. Vivien, J. Popplewell, G. Ronan, C. A. Barrios, G. Stemme, and W. van der Wijngaart, “A packaged optical slot-waveguide ring resonator sensor array for multiplex label-free assays in labs-on-chips,” Lab Chip 10, 281–290 (2010).
[CrossRef] [PubMed]

Lipson, M.

Liu, X.

Lu, J.

J. Lu, S. He, and V. G. Romanov, “A simple and effective method for calculating the bending loss and phase enhancement of a bent planar waveguide,” Fiber Integr. Opt. 24, 25–36(2005).
[CrossRef]

Maquieira, A.

Marris-Morini, D.

Michel, J.

Moh, T.

C. F. Carlborg, K. B. Gylfason, A. Kaźmierczak, F. Dortu, M. J. Bañuls Polo, A. Maquieira Catala, G. M. Kresbach, H. Sohlström, T. Moh, L. Vivien, J. Popplewell, G. Ronan, C. A. Barrios, G. Stemme, and W. van der Wijngaart, “A packaged optical slot-waveguide ring resonator sensor array for multiplex label-free assays in labs-on-chips,” Lab Chip 10, 281–290 (2010).
[CrossRef] [PubMed]

Molera, J. G.

T. Claes, J. G. Molera, K. D. Vos, E. Schacht, R. Baets, and P. Bienstman, “Label-free biosensing with a slot waveguide based ring resonator in silicon-on-insulator,” IEEE Photon. J. 1, 197–204 (2009).
[CrossRef]

Mullner, P.

P. Mullner and R. Hainberger, “Structural optimization of silicon-on-insulator slot waveguides,” IEEE Photon. Technol. Lett. 18, 2557–2559 (2006).
[CrossRef]

Passaro, V. M. N.

Popplewell, J.

C. F. Carlborg, K. B. Gylfason, A. Kaźmierczak, F. Dortu, M. J. Bañuls Polo, A. Maquieira Catala, G. M. Kresbach, H. Sohlström, T. Moh, L. Vivien, J. Popplewell, G. Ronan, C. A. Barrios, G. Stemme, and W. van der Wijngaart, “A packaged optical slot-waveguide ring resonator sensor array for multiplex label-free assays in labs-on-chips,” Lab Chip 10, 281–290 (2010).
[CrossRef] [PubMed]

Riley, D.

Robinson, J. T.

Romanov, V. G.

J. Lu, S. He, and V. G. Romanov, “A simple and effective method for calculating the bending loss and phase enhancement of a bent planar waveguide,” Fiber Integr. Opt. 24, 25–36(2005).
[CrossRef]

Ronan, G.

C. F. Carlborg, K. B. Gylfason, A. Kaźmierczak, F. Dortu, M. J. Bañuls Polo, A. Maquieira Catala, G. M. Kresbach, H. Sohlström, T. Moh, L. Vivien, J. Popplewell, G. Ronan, C. A. Barrios, G. Stemme, and W. van der Wijngaart, “A packaged optical slot-waveguide ring resonator sensor array for multiplex label-free assays in labs-on-chips,” Lab Chip 10, 281–290 (2010).
[CrossRef] [PubMed]

Sanchez, B.

Schacht, E.

T. Claes, J. G. Molera, K. D. Vos, E. Schacht, R. Baets, and P. Bienstman, “Label-free biosensing with a slot waveguide based ring resonator in silicon-on-insulator,” IEEE Photon. J. 1, 197–204 (2009).
[CrossRef]

Scherer, A.

M. Hochberg, T. Baehr-Jones, G. Wang, J. Huang, P. Sullivan, L. Dalton, and A. Scherer, “Towards a millivolt optical modulator with nano-slot waveguides,” Opt. Express 15, 8401–8410 (2007).
[CrossRef] [PubMed]

T. Baehr-Jones, M. Hochberg, C. Walker, and A. Scherer, “High-Q optical resonators in silicon-on-insulator-based slot waveguides,” Appl. Phys. Lett. 86, 081101 (2005).
[CrossRef]

Schmidt, B. S.

Shin, J. H.

Sohlstrom, H.

Sohlström, H.

C. F. Carlborg, K. B. Gylfason, A. Kaźmierczak, F. Dortu, M. J. Bañuls Polo, A. Maquieira Catala, G. M. Kresbach, H. Sohlström, T. Moh, L. Vivien, J. Popplewell, G. Ronan, C. A. Barrios, G. Stemme, and W. van der Wijngaart, “A packaged optical slot-waveguide ring resonator sensor array for multiplex label-free assays in labs-on-chips,” Lab Chip 10, 281–290 (2010).
[CrossRef] [PubMed]

C. A. Barrios, K. M. J. Banuls, V. Gonzalez-Pedro, B. Gylfason, B. Sanchez, A. Griol, A. Maquieira, H. Sohlström, M. Holgado, and R. Casquel, “Label-free optical biosensing with slot-waveguides,” Opt. Lett. 33, 708–710 (2008).
[CrossRef] [PubMed]

C. A. Barrios, K. B. Gylfason, B. Sanchez, A. Griol, H. Sohlström, M. Holgado, and R. Casquel, “Slot-waveguide biochemical sensor,” Opt. Lett. 32, 3080–3082 (2007).
[CrossRef] [PubMed]

Stemme, G.

C. F. Carlborg, K. B. Gylfason, A. Kaźmierczak, F. Dortu, M. J. Bañuls Polo, A. Maquieira Catala, G. M. Kresbach, H. Sohlström, T. Moh, L. Vivien, J. Popplewell, G. Ronan, C. A. Barrios, G. Stemme, and W. van der Wijngaart, “A packaged optical slot-waveguide ring resonator sensor array for multiplex label-free assays in labs-on-chips,” Lab Chip 10, 281–290 (2010).
[CrossRef] [PubMed]

Sullivan, P.

Sun, H.

H. Sun, A. Chen, and L. R. Dalton, “Enhanced evanescent confinement in multiple-slot waveguides and its application in biochemical sensing,” IEEE Photon. J. 1, 48–57 (2009).
[CrossRef]

Sun, R.

Sun, X.

Tu, X.

X. Tu, X. Xu, S. Chen, J. Yu, and Q. Wang, “Simulation demonstration and experimental fabrication of a multiple-slot waveguide,” IEEE Photon. Technol. Lett. 20, 333–335 (2008).
[CrossRef]

van der Wijngaart, W.

C. F. Carlborg, K. B. Gylfason, A. Kaźmierczak, F. Dortu, M. J. Bañuls Polo, A. Maquieira Catala, G. M. Kresbach, H. Sohlström, T. Moh, L. Vivien, J. Popplewell, G. Ronan, C. A. Barrios, G. Stemme, and W. van der Wijngaart, “A packaged optical slot-waveguide ring resonator sensor array for multiplex label-free assays in labs-on-chips,” Lab Chip 10, 281–290 (2010).
[CrossRef] [PubMed]

Vivien, L.

C. F. Carlborg, K. B. Gylfason, A. Kaźmierczak, F. Dortu, M. J. Bañuls Polo, A. Maquieira Catala, G. M. Kresbach, H. Sohlström, T. Moh, L. Vivien, J. Popplewell, G. Ronan, C. A. Barrios, G. Stemme, and W. van der Wijngaart, “A packaged optical slot-waveguide ring resonator sensor array for multiplex label-free assays in labs-on-chips,” Lab Chip 10, 281–290 (2010).
[CrossRef] [PubMed]

L. Vivien, D. Marris-Morini, A. Griol, K. B. Gylfason, D. Hill, J. Alvarez, H. Sohlstrom, J. Hurtado, D. Bouville, and E. Cassan, “Vertical multiple-slot waveguide ring resonators in silicon nitride,” Opt. Express 16, 17237–17242 (2008).
[CrossRef] [PubMed]

Vos, K. D.

T. Claes, J. G. Molera, K. D. Vos, E. Schacht, R. Baets, and P. Bienstman, “Label-free biosensing with a slot waveguide based ring resonator in silicon-on-insulator,” IEEE Photon. J. 1, 197–204 (2009).
[CrossRef]

Walker, C.

T. Baehr-Jones, M. Hochberg, C. Walker, and A. Scherer, “High-Q optical resonators in silicon-on-insulator-based slot waveguides,” Appl. Phys. Lett. 86, 081101 (2005).
[CrossRef]

Wang, G.

Wang, Q.

X. Tu, X. Xu, S. Chen, J. Yu, and Q. Wang, “Simulation demonstration and experimental fabrication of a multiple-slot waveguide,” IEEE Photon. Technol. Lett. 20, 333–335 (2008).
[CrossRef]

Xiao, J.

Xu, Q.

Xu, X.

X. Tu, X. Xu, S. Chen, J. Yu, and Q. Wang, “Simulation demonstration and experimental fabrication of a multiple-slot waveguide,” IEEE Photon. Technol. Lett. 20, 333–335 (2008).
[CrossRef]

Yoo, H. G.

Yu, J.

X. Tu, X. Xu, S. Chen, J. Yu, and Q. Wang, “Simulation demonstration and experimental fabrication of a multiple-slot waveguide,” IEEE Photon. Technol. Lett. 20, 333–335 (2008).
[CrossRef]

Appl. Opt. (1)

Appl. Phys. Lett. (1)

T. Baehr-Jones, M. Hochberg, C. Walker, and A. Scherer, “High-Q optical resonators in silicon-on-insulator-based slot waveguides,” Appl. Phys. Lett. 86, 081101 (2005).
[CrossRef]

Electron. Lett. (1)

C. Barrios, “High-performance all-optical silicon microswitch,” Electron. Lett. 40, 862–863 (2004).
[CrossRef]

Fiber Integr. Opt. (1)

J. Lu, S. He, and V. G. Romanov, “A simple and effective method for calculating the bending loss and phase enhancement of a bent planar waveguide,” Fiber Integr. Opt. 24, 25–36(2005).
[CrossRef]

IEEE J. Quantum Electron. (1)

N.-N. Feng, J. Michel, and L. C. Kimerling, “Optical field concentration in low-index waveguides,” IEEE J. Quantum Electron. 42, 885–890 (2006).
[CrossRef]

IEEE Photon. J. (2)

T. Claes, J. G. Molera, K. D. Vos, E. Schacht, R. Baets, and P. Bienstman, “Label-free biosensing with a slot waveguide based ring resonator in silicon-on-insulator,” IEEE Photon. J. 1, 197–204 (2009).
[CrossRef]

H. Sun, A. Chen, and L. R. Dalton, “Enhanced evanescent confinement in multiple-slot waveguides and its application in biochemical sensing,” IEEE Photon. J. 1, 48–57 (2009).
[CrossRef]

IEEE Photon. Technol. Lett. (4)

P. Mullner and R. Hainberger, “Structural optimization of silicon-on-insulator slot waveguides,” IEEE Photon. Technol. Lett. 18, 2557–2559 (2006).
[CrossRef]

X. Tu, X. Xu, S. Chen, J. Yu, and Q. Wang, “Simulation demonstration and experimental fabrication of a multiple-slot waveguide,” IEEE Photon. Technol. Lett. 20, 333–335 (2008).
[CrossRef]

T. Fujisawa and M. Koshiba, “Theoretical investigation of ultrasmall polarization-insensitive 1×2 multimode interference waveguides based on sandwiched structures,” IEEE Photon. Technol. Lett. 18, 1246–1248 (2006).
[CrossRef]

C. Y. Chao and L. J. Guo, “Reduction of surface scattering loss in polymer microrings using thermal-reflow technique,” IEEE Photon. Technol. Lett. 16, 1498–1500 (2004).
[CrossRef]

J. Lightwave Technol. (1)

J. Opt. Soc. Am. A (1)

J. Opt. Soc. Am. B (1)

Lab Chip (1)

C. F. Carlborg, K. B. Gylfason, A. Kaźmierczak, F. Dortu, M. J. Bañuls Polo, A. Maquieira Catala, G. M. Kresbach, H. Sohlström, T. Moh, L. Vivien, J. Popplewell, G. Ronan, C. A. Barrios, G. Stemme, and W. van der Wijngaart, “A packaged optical slot-waveguide ring resonator sensor array for multiplex label-free assays in labs-on-chips,” Lab Chip 10, 281–290 (2010).
[CrossRef] [PubMed]

Opt. Express (9)

P. A. Andrew, B. S. Schmidt, and M. Lipson, “High confinement in silicon slot waveguides with sharp bends,” Opt. Express 14, 9197–9202 (2006).
[CrossRef]

Q. Xu and M. Lipson, “All-optical logic based on silicon micro-ring resonators,” Opt. Express 15, 924–929 (2007).
[CrossRef] [PubMed]

F. Dell’Olio and V. M. N. Passaro, “Optical sensing by optimized silicon slot waveguides,” Opt. Express 15, 4977–4993 (2007).
[CrossRef] [PubMed]

M. Hochberg, T. Baehr-Jones, G. Wang, J. Huang, P. Sullivan, L. Dalton, and A. Scherer, “Towards a millivolt optical modulator with nano-slot waveguides,” Opt. Express 15, 8401–8410 (2007).
[CrossRef] [PubMed]

C. A. Barrios and M. Lipson, “Electrically driven silicon resonant light emitting device based on slot waveguide,” Opt. Express 13, 10092–10101 (2005).
[CrossRef] [PubMed]

H. G. Yoo, Y. Fu, D. Riley, J. H. Shin, and P. M. Fauchet, “Birefringence and optical power confinement in horizontal multi-slot waveguides made of Si and SiO2,” Opt. Express 16, 8623–8628(2008).
[CrossRef] [PubMed]

L. Vivien, D. Marris-Morini, A. Griol, K. B. Gylfason, D. Hill, J. Alvarez, H. Sohlstrom, J. Hurtado, D. Bouville, and E. Cassan, “Vertical multiple-slot waveguide ring resonators in silicon nitride,” Opt. Express 16, 17237–17242 (2008).
[CrossRef] [PubMed]

R. Sun, P. Dong, N.-N. Feng, C.-Y. Hong, J. Michel, M. Lipson, and L. Kimerling, “Horizontal single and multiple slot waveguides: optical transmission at λ=1550 nm,” Opt. Express 15, 17967–17972 (2007).
[CrossRef] [PubMed]

J. T. Robinson, L. Chen, and M. Lipson, “On-chip gas detection in silicon optical microcavities,” Opt. Express 16, 4296–4301(2008).
[CrossRef] [PubMed]

Opt. Lett. (3)

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Figures (11)

Fig. 1
Fig. 1

Schematics of (a) 3D single-slot microring and (b) its 2D slab equivalence.

Fig. 2
Fig. 2

Waveguide sensitivity of a silicon single-slot microring ( h = 250 nm , R = 5 μm ) as a function of (a) η and w at g = 50 nm and (b) slot width g and η at w = 220 nm .

Fig. 3
Fig. 3

Optimal η of a silicon single-slot microring ( h = 250 nm , w = 220 nm ) as a function of g for R = 5 , 7.5, 10 μm , respectively.

Fig. 4
Fig. 4

Waveguide sensitivity of a silicon single-slot microring ( h = 250 nm , R = 5 μm , g = 50 nm , and η = 0.5 ) and a conventional microring ( h = 250 nm , R = 5 μm ) as a function of w.

Fig. 5
Fig. 5

Schematics of (a) 3D double-slot microring and (b) its 2D slab equivalence.

Fig. 6
Fig. 6

Waveguide sensitivity of a silicon bent double-slot waveguide as a function of the slot width ( g 1 = g 2 ) and the asymmetry coefficients ( η 1 = η 2 ) with w = 400 nm , h = 250 nm , and R = 5 μm .

Fig. 7
Fig. 7

Normalized radial E field distribution, | E r | , of a silicon double-slot microring with g 1 = g 2 = 50 nm , w = 400 nm , h = 250 nm , R = 5 μm , and different asymmetry coefficients: (a)  η 1 = η 2 = 0.2 and (b)  η 1 = η 2 = 0.4 . Δ r is the radial coordinate relative to the waveguide center.

Fig. 8
Fig. 8

Waveguide sensitivity of silicon bent double-slot waveguide as a function of the asymmetry coefficients of inner strip η 1 and outer strip η 2 with g 1 = g 2 = 100 nm , h = 250 nm , w = 400 nm , and R = 5 μm .

Fig. 9
Fig. 9

Waveguide sensitivity of a silicon double-slot microring ( h = 250 nm , w = 400 nm , and R = 5 μm ) as a function of (a) the slot width ( g 1 = g 2 ) for different asymmetry coefficients of inner strip η 1 and outer strip η 2 and (b) x for different slot widths ( g 1 = g 2 ) at η 1 = 0.4 + x and η 2 = 0.4 x .

Fig. 10
Fig. 10

Waveguide sensitivity as a function of g / w for a single-slot microring ( g = 50 nm , η = 0.5 ) and double-slot microrings ( g = g 1 = g 2 = 50 nm ) with different η 1 and η 2 . All cases have R = 5 μm and h = 250 nm .

Fig. 11
Fig. 11

Bending loss as a function of w for a conventional microring, a single-slot microring ( g = 50 nm , η = 0.5 ), and a double-slot microring ( g = g 1 = g 2 = 50 nm , η 1 = η 2 = 0.4 ) with R = 5 μm and h = 250 nm .

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