Abstract

We report the measurement of a polarization-independent guided-mode resonant filter with a Q factor of ∼2200 functioning near normal incidence in the near infrared (850 nm). Besides this remarkable performance, we provide a detailed optical and structural characterization of the component, which points out the origins of the limitation of the experimental performance. We conclude that the defaults in question can be corrected by improving the lithography process, and we are confident that even greater performance will be obtained in future realizations.

© 2010 Optical Society of America

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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
  13. N. Destouches, J. C. Pommier, O. Parriaux, T. Clausnitzer, N. Lyndin, and S. Tonchev, “Narrow band resonant grating of 100% reflection under normal incidence,” Opt. Express 14, 12613–12622 (2006).
    [CrossRef]
  14. Z. S. Liu, S. Tibuleac, D. Shin, P. P. Young, and R. Magnusson, “High-efficiency guided-mode resonance filter,” Opt. Lett. 23, 1556–1558 (1998).
    [CrossRef]
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    [CrossRef]
  16. D. Rosenblatt, A. Sharon, and A. A. Friesem, “Resonant grating waveguide structures,” IEEE J. Quantum Electron. 33, 2038–2059 (1997).
    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
  20. A. Talneau, F. Lemarchand, A.-L. Fehrembach, and A. Sentenac, “Impact of electron-beam lithography irregularities across millimeter-scale resonant grating filter performances,” Appl. Opt. 49, 658–662 (2010).
    [CrossRef]
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    [CrossRef]

2010 (1)

2008 (2)

E. Grinvald, T. Katchalski, S. Soria, S. Levit, and A. A. Friesem, “Role of photonic bandgaps in polarization-independent grating waveguide structures,” J. Opt. Soc. Am. A 25, 1435–1443 (2008).
[CrossRef]

S. Hernandez, O. Gauthier-Lafaye, A.-L. Fehrembach, S. Bonnefont, P. Arguel, F. Lozes-Dupuy, and A. Sentenac, “High performance 2D resonant grating filter at 850 nm under high oblique incidence of ∼60°,” Appl. Phys. Lett. 92, 131112 (2008).
[CrossRef]

2007 (3)

2006 (1)

2005 (1)

A. L. Fehrembach and A. Sentenac, “Unpolarized narrow-band filtering with resonant gratings,” Appl. Phys. Lett. 86, 121105 (2005).
[CrossRef]

2004 (1)

2003 (3)

2002 (1)

2001 (1)

1998 (1)

1997 (4)

D. Rosenblatt, A. Sharon, and A. A. Friesem, “Resonant grating waveguide structures,” IEEE J. Quantum Electron. 33, 2038–2059 (1997).
[CrossRef]

V. Berger, O. Gauthier-Lafaye, and E. Costard, “Photonic band gaps and holography,” J. Appl. Phys. 82, 60–64 (1997).
[CrossRef]

L. Li, “New formulation of the Fourier modal method for crossed surface-relief gratings,” J. Opt. Soc. Am. A 14, 2758–2767 (1997).
[CrossRef]

A. Sharon, D. Rosenblatt, and A. A. Friesem, “Resonant grating-waveguide structures for visible and near-infrared radiation,” J. Opt. Soc. Am. A 14, 2985–2993 (1997).
[CrossRef]

1996 (2)

A. Sharon, D. Rosenblatt, and A. A. Friesem, “Narrow spectral bandwidths with grating waveguide structures,” Appl. Phys. Lett. 69, 4154–4156 (1996).
[CrossRef]

P. Song and G. M. Morris, “Experimental demonstration of resonant anomalies in diffraction from two-dimensional gratings,” Opt. Lett. 21, 549–551 (1996)
[CrossRef]

Arguel, P.

S. Hernandez, O. Gauthier-Lafaye, A.-L. Fehrembach, S. Bonnefont, P. Arguel, F. Lozes-Dupuy, and A. Sentenac, “High performance 2D resonant grating filter at 850 nm under high oblique incidence of ∼60°,” Appl. Phys. Lett. 92, 131112 (2008).
[CrossRef]

S. Hernandez, O. Bouchard, E. Scheid, E. Daran, L. Jalabert, P. Arguel, S. Bonnefont, O. Gauthier-Lafaye, and F. Lozes-Dupuy, “850 nm wavelength range nanoscale resonant optical filter fabrication using standard microelectronics techniques,” Microelectron. Eng. 84, 673–677 (2007).
[CrossRef]

Berger, V.

V. Berger, O. Gauthier-Lafaye, and E. Costard, “Photonic band gaps and holography,” J. Appl. Phys. 82, 60–64 (1997).
[CrossRef]

Bonnefont, S.

S. Hernandez, O. Gauthier-Lafaye, A.-L. Fehrembach, S. Bonnefont, P. Arguel, F. Lozes-Dupuy, and A. Sentenac, “High performance 2D resonant grating filter at 850 nm under high oblique incidence of ∼60°,” Appl. Phys. Lett. 92, 131112 (2008).
[CrossRef]

S. Hernandez, O. Bouchard, E. Scheid, E. Daran, L. Jalabert, P. Arguel, S. Bonnefont, O. Gauthier-Lafaye, and F. Lozes-Dupuy, “850 nm wavelength range nanoscale resonant optical filter fabrication using standard microelectronics techniques,” Microelectron. Eng. 84, 673–677 (2007).
[CrossRef]

Boonruang, S.

Bouchard, O.

S. Hernandez, O. Bouchard, E. Scheid, E. Daran, L. Jalabert, P. Arguel, S. Bonnefont, O. Gauthier-Lafaye, and F. Lozes-Dupuy, “850 nm wavelength range nanoscale resonant optical filter fabrication using standard microelectronics techniques,” Microelectron. Eng. 84, 673–677 (2007).
[CrossRef]

Boyko, O.

Bozhkov, B.

Clausnitzer, T.

Costard, E.

V. Berger, O. Gauthier-Lafaye, and E. Costard, “Photonic band gaps and holography,” J. Appl. Phys. 82, 60–64 (1997).
[CrossRef]

Daran, E.

S. Hernandez, O. Bouchard, E. Scheid, E. Daran, L. Jalabert, P. Arguel, S. Bonnefont, O. Gauthier-Lafaye, and F. Lozes-Dupuy, “850 nm wavelength range nanoscale resonant optical filter fabrication using standard microelectronics techniques,” Microelectron. Eng. 84, 673–677 (2007).
[CrossRef]

Destouches, N.

Fehrembach, A.

Fehrembach, A. L.

Fehrembach, A.-L.

A. Talneau, F. Lemarchand, A.-L. Fehrembach, and A. Sentenac, “Impact of electron-beam lithography irregularities across millimeter-scale resonant grating filter performances,” Appl. Opt. 49, 658–662 (2010).
[CrossRef]

S. Hernandez, O. Gauthier-Lafaye, A.-L. Fehrembach, S. Bonnefont, P. Arguel, F. Lozes-Dupuy, and A. Sentenac, “High performance 2D resonant grating filter at 850 nm under high oblique incidence of ∼60°,” Appl. Phys. Lett. 92, 131112 (2008).
[CrossRef]

Friesem, A. A.

E. Grinvald, T. Katchalski, S. Soria, S. Levit, and A. A. Friesem, “Role of photonic bandgaps in polarization-independent grating waveguide structures,” J. Opt. Soc. Am. A 25, 1435–1443 (2008).
[CrossRef]

D. Rosenblatt, A. Sharon, and A. A. Friesem, “Resonant grating waveguide structures,” IEEE J. Quantum Electron. 33, 2038–2059 (1997).
[CrossRef]

A. Sharon, D. Rosenblatt, and A. A. Friesem, “Resonant grating-waveguide structures for visible and near-infrared radiation,” J. Opt. Soc. Am. A 14, 2985–2993 (1997).
[CrossRef]

A. Sharon, D. Rosenblatt, and A. A. Friesem, “Narrow spectral bandwidths with grating waveguide structures,” Appl. Phys. Lett. 69, 4154–4156 (1996).
[CrossRef]

Gauthier-Lafaye, O.

S. Hernandez, O. Gauthier-Lafaye, A.-L. Fehrembach, S. Bonnefont, P. Arguel, F. Lozes-Dupuy, and A. Sentenac, “High performance 2D resonant grating filter at 850 nm under high oblique incidence of ∼60°,” Appl. Phys. Lett. 92, 131112 (2008).
[CrossRef]

S. Hernandez, O. Bouchard, E. Scheid, E. Daran, L. Jalabert, P. Arguel, S. Bonnefont, O. Gauthier-Lafaye, and F. Lozes-Dupuy, “850 nm wavelength range nanoscale resonant optical filter fabrication using standard microelectronics techniques,” Microelectron. Eng. 84, 673–677 (2007).
[CrossRef]

V. Berger, O. Gauthier-Lafaye, and E. Costard, “Photonic band gaps and holography,” J. Appl. Phys. 82, 60–64 (1997).
[CrossRef]

Granet, G.

Greenwell, A. B.

Grinvald, E.

Hernandez, S.

S. Hernandez, O. Gauthier-Lafaye, A.-L. Fehrembach, S. Bonnefont, P. Arguel, F. Lozes-Dupuy, and A. Sentenac, “High performance 2D resonant grating filter at 850 nm under high oblique incidence of ∼60°,” Appl. Phys. Lett. 92, 131112 (2008).
[CrossRef]

S. Hernandez, O. Bouchard, E. Scheid, E. Daran, L. Jalabert, P. Arguel, S. Bonnefont, O. Gauthier-Lafaye, and F. Lozes-Dupuy, “850 nm wavelength range nanoscale resonant optical filter fabrication using standard microelectronics techniques,” Microelectron. Eng. 84, 673–677 (2007).
[CrossRef]

Herzig, H. P.

Jalabert, L.

S. Hernandez, O. Bouchard, E. Scheid, E. Daran, L. Jalabert, P. Arguel, S. Bonnefont, O. Gauthier-Lafaye, and F. Lozes-Dupuy, “850 nm wavelength range nanoscale resonant optical filter fabrication using standard microelectronics techniques,” Microelectron. Eng. 84, 673–677 (2007).
[CrossRef]

Katchalski, T.

Lacour, D.

Lemarchand, F.

Levit, S.

Li, L.

Liu, Z. S.

Lozes-Dupuy, F.

S. Hernandez, O. Gauthier-Lafaye, A.-L. Fehrembach, S. Bonnefont, P. Arguel, F. Lozes-Dupuy, and A. Sentenac, “High performance 2D resonant grating filter at 850 nm under high oblique incidence of ∼60°,” Appl. Phys. Lett. 92, 131112 (2008).
[CrossRef]

S. Hernandez, O. Bouchard, E. Scheid, E. Daran, L. Jalabert, P. Arguel, S. Bonnefont, O. Gauthier-Lafaye, and F. Lozes-Dupuy, “850 nm wavelength range nanoscale resonant optical filter fabrication using standard microelectronics techniques,” Microelectron. Eng. 84, 673–677 (2007).
[CrossRef]

Lyndin, N.

Magnusson, R.

P. S. Priambodo, T. A. Maldonado, and R. Magnusson, “Fabrication and characterization of high-quality waveguide-mode resonant optical filters,” Appl. Phys. Lett. 83, 3248–3250 (2003).
[CrossRef]

Z. S. Liu, S. Tibuleac, D. Shin, P. P. Young, and R. Magnusson, “High-efficiency guided-mode resonance filter,” Opt. Lett. 23, 1556–1558 (1998).
[CrossRef]

Maldonado, T. A.

P. S. Priambodo, T. A. Maldonado, and R. Magnusson, “Fabrication and characterization of high-quality waveguide-mode resonant optical filters,” Appl. Phys. Lett. 83, 3248–3250 (2003).
[CrossRef]

Maystre, D.

Moharam, M. G.

Morris, G. M.

Mure Ravaud, A.

Niederer, G.

Parriaux, O.

Plumey, J. P.

Pommier, J. C.

Popov, E.

Priambodo, P. S.

P. S. Priambodo, T. A. Maldonado, and R. Magnusson, “Fabrication and characterization of high-quality waveguide-mode resonant optical filters,” Appl. Phys. Lett. 83, 3248–3250 (2003).
[CrossRef]

Rosenblatt, D.

D. Rosenblatt, A. Sharon, and A. A. Friesem, “Resonant grating waveguide structures,” IEEE J. Quantum Electron. 33, 2038–2059 (1997).
[CrossRef]

A. Sharon, D. Rosenblatt, and A. A. Friesem, “Resonant grating-waveguide structures for visible and near-infrared radiation,” J. Opt. Soc. Am. A 14, 2985–2993 (1997).
[CrossRef]

A. Sharon, D. Rosenblatt, and A. A. Friesem, “Narrow spectral bandwidths with grating waveguide structures,” Appl. Phys. Lett. 69, 4154–4156 (1996).
[CrossRef]

Scheid, E.

S. Hernandez, O. Bouchard, E. Scheid, E. Daran, L. Jalabert, P. Arguel, S. Bonnefont, O. Gauthier-Lafaye, and F. Lozes-Dupuy, “850 nm wavelength range nanoscale resonant optical filter fabrication using standard microelectronics techniques,” Microelectron. Eng. 84, 673–677 (2007).
[CrossRef]

Schnieper, M.

Sentenac, A.

Sentenac, and A.

Shamir, J.

Sharon, A.

D. Rosenblatt, A. Sharon, and A. A. Friesem, “Resonant grating waveguide structures,” IEEE J. Quantum Electron. 33, 2038–2059 (1997).
[CrossRef]

A. Sharon, D. Rosenblatt, and A. A. Friesem, “Resonant grating-waveguide structures for visible and near-infrared radiation,” J. Opt. Soc. Am. A 14, 2985–2993 (1997).
[CrossRef]

A. Sharon, D. Rosenblatt, and A. A. Friesem, “Narrow spectral bandwidths with grating waveguide structures,” Appl. Phys. Lett. 69, 4154–4156 (1996).
[CrossRef]

Shin, D.

Song, P.

Soria, S.

Talneau, A.

Thiele, H.

Tibuleac, S.

Tonchev, S.

Young, P. P.

Zschokke, C.

Appl. Opt. (2)

Appl. Phys. Lett. (4)

A. Sharon, D. Rosenblatt, and A. A. Friesem, “Narrow spectral bandwidths with grating waveguide structures,” Appl. Phys. Lett. 69, 4154–4156 (1996).
[CrossRef]

A. L. Fehrembach and A. Sentenac, “Unpolarized narrow-band filtering with resonant gratings,” Appl. Phys. Lett. 86, 121105 (2005).
[CrossRef]

S. Hernandez, O. Gauthier-Lafaye, A.-L. Fehrembach, S. Bonnefont, P. Arguel, F. Lozes-Dupuy, and A. Sentenac, “High performance 2D resonant grating filter at 850 nm under high oblique incidence of ∼60°,” Appl. Phys. Lett. 92, 131112 (2008).
[CrossRef]

P. S. Priambodo, T. A. Maldonado, and R. Magnusson, “Fabrication and characterization of high-quality waveguide-mode resonant optical filters,” Appl. Phys. Lett. 83, 3248–3250 (2003).
[CrossRef]

IEEE J. Quantum Electron. (1)

D. Rosenblatt, A. Sharon, and A. A. Friesem, “Resonant grating waveguide structures,” IEEE J. Quantum Electron. 33, 2038–2059 (1997).
[CrossRef]

J. Appl. Phys. (1)

V. Berger, O. Gauthier-Lafaye, and E. Costard, “Photonic band gaps and holography,” J. Appl. Phys. 82, 60–64 (1997).
[CrossRef]

J. Opt. Soc. Am. A (7)

Microelectron. Eng. (1)

S. Hernandez, O. Bouchard, E. Scheid, E. Daran, L. Jalabert, P. Arguel, S. Bonnefont, O. Gauthier-Lafaye, and F. Lozes-Dupuy, “850 nm wavelength range nanoscale resonant optical filter fabrication using standard microelectronics techniques,” Microelectron. Eng. 84, 673–677 (2007).
[CrossRef]

Opt. Express (2)

Opt. Lett. (3)

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