Abstract

Simulation techniques are developed for high-numerical-aperture (NA) polarized microscopy with Babinet’s principle, including partial coherence and vector diffraction for non-periodic geometries. The model includes vector illumination and diffraction in high-NA (up to NA=3.5) object space that is imaged into low-NA image space and recorded on an image sensor. A mathematical model for the Babinet approach is developed and interpreted that includes partial coherence using expanded mutual intensity, where object reflective characteristics modify the coherence functions. Simulation results of the Babinet’s principle approach are compared with those of rigorous coupled wave theory (RCWT) for periodic structures to investigate the accuracy of this approach and its limitations.

© 2010 Optical Society of America

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