Abstract

Diffractions by the one-dimensional high-density grating in the near field with TM and TE polarization illuminations are studied, and the diffraction intensity distributions are calculated with the finite-difference time-domain technique. The calculation results show that the diffractions of the high-density grating with different polarization illuminations are different. The quasi-Talbot image of the grating depends on the polarization of the incident wave, and the existence condition of the quasi-Talbot image of the grating in the near field also changes with the polarization of the incident wave. We present explanations based on the vector distribution of the energy flow density. These studies on the polarization dependence of the quasi-Talbot imaging of the high-density grating are helpful for the application of the grating to near-field photolithography.

© 2010 Optical Society of America

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