Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Error analysis and compensation method of focus detection in exposure apparatus

Not Accessible

Your library or personal account may give you access

Abstract

An original approach to measurement accuracy of a typical focus sensor in conventional integrated circuit lithographic equipment is introduced. Causes of measurement error in the focus sensor are theoretically analyzed and found to be generated mainly from interactions between imperfections of the optical system and the actual surface of processed wafers. We derive mathematical formulations describing these errors, which are confirmed by the experimental results performed by using an optical setup composed of the focus sensor and samples on which the wafer surface condition is reproduced. Furthermore, several novel techniques that are intended to reduce those measurement errors are successfully demonstrated.

© 2008 Optical Society of America

Full Article  |  PDF Article
More Like This
Dynamic calibration of the relative pose and error analysis in a structured light system

Beiwei Zhang and Youfou Li
J. Opt. Soc. Am. A 25(3) 612-622 (2008)

Laser beam projection with adaptive array of fiber collimators. II. Analysis of atmospheric compensation efficiency

Svetlana L. Lachinova and Mikhail A. Vorontsov
J. Opt. Soc. Am. A 25(8) 1960-1973 (2008)

Phase-error correction in digital holography

Samuel T. Thurman and James R. Fienup
J. Opt. Soc. Am. A 25(4) 983-994 (2008)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (15)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (3)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (12)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved