## Abstract

A new numerical approach to efficiently reconstruct the profile of a grating from measurements of reflection coefficients is demonstrated. The problem is posed in the mathematical framework of an inverse scattering problem and solved using gradient-based algorithms. The gradient is computed efficiently using adjoint equations, which amounts to an extra scattering computation per iteration. For symmetric profiles it is shown that only knowledge of the scattered field is sufficient to compute the gradient. As a result, complex profiles can be reconstructed rapidly, and the method can be potentially used in metrology applications in semiconductors. The technique is demonstrated for the case of TE polarization.

© 2008 Optical Society of America

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