Abstract

An extended and refined scattering-matrix method is proposed for the efficient full parallel implementation of rigorous coupled-wave analysis of multilayer structures. The total electromagnetic field distribution in the rigorous coupled-wave analysis is represented by the linear combination of the eigenmodes with their own coupling coefficients. In the proposed scheme, a refined recursion relation of the coupling coefficients of the eigenmodes is defined for complete parallel computation of the electromagnetic field distributions within multilayer structures.

© 2007 Optical Society of America

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