M. Schubert, A. Kasic, T. Hofmann, V. Gottschalch, J. Off, F. Scholz, E. Schubert, H. Neumann, I. Hodgkinson, M. Arnold, W. Dollase, and C. M. Herzinger, "Generalized ellipsometry of complex mediums in layered systems," Proc. SPIE 4806, 264-276 (2002).

[CrossRef]

P. Yeh and M. Paukshto, "Molecular crystaline thin film E-polarizer," Mol. Mater. 14, 1-19 (2001).

P. L. Lazarev and M. V. Paukshto, "Low-leakage off-angle in E-polarizers," J. Soc. Inf. Disp. 9, 101-105 (2001).

[CrossRef]

M. Schubert, T. E. Tiwald, and J. A. Woollam, "Explicit solutions for the optical properties of arbitrary magneto-optic materials in generalized ellipsometry," Appl. Opt. 38, 177-187 (1999).

[CrossRef]

A. En-Naciri, L. Johann, and R. Kleim, "Spectroscopic generalized ellipsometry based on Fourier analysis," Appl. Opt. 38, 4802-4811 (1999).

[CrossRef]

J.-D. Hecht, A. Eifler, V. Riede, M. Schubert, G. Kraub, and V. Kramer, "Birefringence and reflectivity of single-crystal CdAl_{2}Se_{4} by generalized ellipsometry," Phys. Rev. B 57, 7037-7042 (1998).

[CrossRef]

G. E. Jellison, "Spectroscopic ellipsometry data analysis: measured versus calculated quantities," Thin Solid Films 313-314, 33-39 (1998).

[CrossRef]

M. E. Haller, J. Sullivan, and G. Collins, "Multidomain ellipsometry for thin film process control," Semicond. Int. 21, 269-272 (1998).

J. F. Elman, U. J. Greener, C. M. Herzinger, and B. Johs, "Characterization of biaxially-stretched plastic films by generalized ellipsometry," Thin Solid Films 313-314, 814-818 (1998).

[CrossRef]

A. En-Naciri, L. Johann, R. Kleim, M. Sieskind, and M. Amann, "Spectroscopic ellipsometry of anisotropic materials: application to the optical constants of HgI_{2}," Appl. Opt. 38, 647-654 (1998).

[CrossRef]

G. E. J. Jellison, F. A. Modine, and L. A. Boatner, "Measurement of the optical functions of uniaxial materials by two-modulator generalized ellipsometry: rutile (TiO2)," Opt. Lett. 22, 1808-1810 (1997).

[CrossRef]

G. E. Jellison and F. A. Modine, "Two-modulator generalized ellipsometry: theory," Appl. Opt. 36, 8190-8198 (1997).

[CrossRef]

G. E. Jellison and F. A. Modine, "Two-modulator generalized ellipsometry: experiment and calibration," Appl. Opt. 36, 8184-8189 (1997).

[CrossRef]

M. Schubert, B. Rheinlander, E. Franke, H. Neumann, J. Hahn, M. Roder, and F. Richter, "Anisotropy of boron nitride thin-film reflectivity spectra by generalized ellipsometry," Appl. Phys. Lett. 70, 1819-1821 (1997).

[CrossRef]

M. Schubert, B. Rheinlander, C. Cramer, H. Schmiedel, J. A. Woollam, C. M. Herzinger, and B. Johs, "Generalized transmission ellipsometry for twisted biaxial dielectric media: application to chiral liquid crystals," J. Opt. Soc. Am. A 13, 1930-1940 (1996).

[CrossRef]

M. Schubert, B. Rheinlander, J. A. Woollam, B. Johs, and C. M. Herzinger, "Extension of rotating-analyzer ellipsometry to generalized ellipsometry: determination of the dielectric function tensor from uniaxial TiO_{2}," J. Opt. Soc. Am. A 13, 875-883 (1996).

[CrossRef]

M. Schubert, "Polarization-dependent optical parameters of arbitrarily anisotropic homogeneous layered systems," Phys. Rev. B 53, 4265-4274 (1996).

[CrossRef]

M. Mansuripur, "Analysis of multilayer thin-film structures containing magneto-optic and anisotropic media at oblique incidence using 2×2 matrices," J. Appl. Phys. 67, 6466-6475 (1990).

[CrossRef]

P. Yeh, "Optics of anisotropic layered media: a new 4×4 matrix algebra," Surf. Sci. 96, 41-53 (1980).

[CrossRef]

K. K. Svitashev, A. I. Semenenko, L. V. Semenenko, and V. K. Sokolov, "Ellipsometery based on a convergent light beam," Opt. Spektrosk. 34, 542-544 (1973).

M. Schubert, A. Kasic, T. Hofmann, V. Gottschalch, J. Off, F. Scholz, E. Schubert, H. Neumann, I. Hodgkinson, M. Arnold, W. Dollase, and C. M. Herzinger, "Generalized ellipsometry of complex mediums in layered systems," Proc. SPIE 4806, 264-276 (2002).

[CrossRef]

R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light, 2nd ed. (Elsevier, 1987).

M. Born and E. Wolf, Principles of Optics, 6th ed. (Cambridge U. Press, 1980).

R. A. Chipman, "Depolarization index and the average degree of polarization," Appl. Opt. 44, 2490-2495 (2005).

[CrossRef]
[PubMed]

R. A. Chipman, "Polarization aberrations," Ph.D. dissertation (University of Arizona, Tucson, Arizona, 1987).

R. A. Chipman, "Polarimetry," in OSA Handbook of Optics (McGraw-Hill, 1995), pp. 22.21-22.35.

M. E. Haller, J. Sullivan, and G. Collins, "Multidomain ellipsometry for thin film process control," Semicond. Int. 21, 269-272 (1998).

M. Schubert, A. Kasic, T. Hofmann, V. Gottschalch, J. Off, F. Scholz, E. Schubert, H. Neumann, I. Hodgkinson, M. Arnold, W. Dollase, and C. M. Herzinger, "Generalized ellipsometry of complex mediums in layered systems," Proc. SPIE 4806, 264-276 (2002).

[CrossRef]

J.-D. Hecht, A. Eifler, V. Riede, M. Schubert, G. Kraub, and V. Kramer, "Birefringence and reflectivity of single-crystal CdAl_{2}Se_{4} by generalized ellipsometry," Phys. Rev. B 57, 7037-7042 (1998).

[CrossRef]

J. F. Elman, U. J. Greener, C. M. Herzinger, and B. Johs, "Characterization of biaxially-stretched plastic films by generalized ellipsometry," Thin Solid Films 313-314, 814-818 (1998).

[CrossRef]

A. En-Naciri, L. Johann, and R. Kleim, "Spectroscopic generalized ellipsometry based on Fourier analysis," Appl. Opt. 38, 4802-4811 (1999).

[CrossRef]

A. En-Naciri, L. Johann, R. Kleim, M. Sieskind, and M. Amann, "Spectroscopic ellipsometry of anisotropic materials: application to the optical constants of HgI_{2}," Appl. Opt. 38, 647-654 (1998).

[CrossRef]

W. H. Press, S. A. Teukolsky, W. T. Vetterling, and B. P. Flannery, Numerical Recipes in C, 2nd ed. (Cambridge U. Press, 1988).

M. Schubert, B. Rheinlander, E. Franke, H. Neumann, J. Hahn, M. Roder, and F. Richter, "Anisotropy of boron nitride thin-film reflectivity spectra by generalized ellipsometry," Appl. Phys. Lett. 70, 1819-1821 (1997).

[CrossRef]

D. Goldstein, Polarized Light, 2nd ed. (Marcel Dekker, 2003).

[CrossRef]

M. Schubert, A. Kasic, T. Hofmann, V. Gottschalch, J. Off, F. Scholz, E. Schubert, H. Neumann, I. Hodgkinson, M. Arnold, W. Dollase, and C. M. Herzinger, "Generalized ellipsometry of complex mediums in layered systems," Proc. SPIE 4806, 264-276 (2002).

[CrossRef]

J. F. Elman, U. J. Greener, C. M. Herzinger, and B. Johs, "Characterization of biaxially-stretched plastic films by generalized ellipsometry," Thin Solid Films 313-314, 814-818 (1998).

[CrossRef]

M. Schubert, B. Rheinlander, E. Franke, H. Neumann, J. Hahn, M. Roder, and F. Richter, "Anisotropy of boron nitride thin-film reflectivity spectra by generalized ellipsometry," Appl. Phys. Lett. 70, 1819-1821 (1997).

[CrossRef]

M. E. Haller, J. Sullivan, and G. Collins, "Multidomain ellipsometry for thin film process control," Semicond. Int. 21, 269-272 (1998).

R. F. Spanier, R. G. Wolf, R. M. Loiterman, and M. E. Haller, "Simultaneous multiple angle/multiple wavelength ellipsometer and method," U.S. patent 5,166,752 (24 November 1992).

J.-D. Hecht, A. Eifler, V. Riede, M. Schubert, G. Kraub, and V. Kramer, "Birefringence and reflectivity of single-crystal CdAl_{2}Se_{4} by generalized ellipsometry," Phys. Rev. B 57, 7037-7042 (1998).

[CrossRef]

M. Schubert, A. Kasic, T. Hofmann, V. Gottschalch, J. Off, F. Scholz, E. Schubert, H. Neumann, I. Hodgkinson, M. Arnold, W. Dollase, and C. M. Herzinger, "Generalized ellipsometry of complex mediums in layered systems," Proc. SPIE 4806, 264-276 (2002).

[CrossRef]

J. F. Elman, U. J. Greener, C. M. Herzinger, and B. Johs, "Characterization of biaxially-stretched plastic films by generalized ellipsometry," Thin Solid Films 313-314, 814-818 (1998).

[CrossRef]

M. Schubert, B. Rheinlander, J. A. Woollam, B. Johs, and C. M. Herzinger, "Extension of rotating-analyzer ellipsometry to generalized ellipsometry: determination of the dielectric function tensor from uniaxial TiO_{2}," J. Opt. Soc. Am. A 13, 875-883 (1996).

[CrossRef]

M. Schubert, B. Rheinlander, C. Cramer, H. Schmiedel, J. A. Woollam, C. M. Herzinger, and B. Johs, "Generalized transmission ellipsometry for twisted biaxial dielectric media: application to chiral liquid crystals," J. Opt. Soc. Am. A 13, 1930-1940 (1996).

[CrossRef]

M. Schubert, A. Kasic, T. Hofmann, V. Gottschalch, J. Off, F. Scholz, E. Schubert, H. Neumann, I. Hodgkinson, M. Arnold, W. Dollase, and C. M. Herzinger, "Generalized ellipsometry of complex mediums in layered systems," Proc. SPIE 4806, 264-276 (2002).

[CrossRef]

M. Schubert, A. Kasic, T. Hofmann, V. Gottschalch, J. Off, F. Scholz, E. Schubert, H. Neumann, I. Hodgkinson, M. Arnold, W. Dollase, and C. M. Herzinger, "Generalized ellipsometry of complex mediums in layered systems," Proc. SPIE 4806, 264-276 (2002).

[CrossRef]

A. En-Naciri, L. Johann, and R. Kleim, "Spectroscopic generalized ellipsometry based on Fourier analysis," Appl. Opt. 38, 4802-4811 (1999).

[CrossRef]

A. En-Naciri, L. Johann, R. Kleim, M. Sieskind, and M. Amann, "Spectroscopic ellipsometry of anisotropic materials: application to the optical constants of HgI_{2}," Appl. Opt. 38, 647-654 (1998).

[CrossRef]

J. F. Elman, U. J. Greener, C. M. Herzinger, and B. Johs, "Characterization of biaxially-stretched plastic films by generalized ellipsometry," Thin Solid Films 313-314, 814-818 (1998).

[CrossRef]

M. Schubert, B. Rheinlander, J. A. Woollam, B. Johs, and C. M. Herzinger, "Extension of rotating-analyzer ellipsometry to generalized ellipsometry: determination of the dielectric function tensor from uniaxial TiO_{2}," J. Opt. Soc. Am. A 13, 875-883 (1996).

[CrossRef]

M. Schubert, B. Rheinlander, C. Cramer, H. Schmiedel, J. A. Woollam, C. M. Herzinger, and B. Johs, "Generalized transmission ellipsometry for twisted biaxial dielectric media: application to chiral liquid crystals," J. Opt. Soc. Am. A 13, 1930-1940 (1996).

[CrossRef]

M. Schubert, A. Kasic, T. Hofmann, V. Gottschalch, J. Off, F. Scholz, E. Schubert, H. Neumann, I. Hodgkinson, M. Arnold, W. Dollase, and C. M. Herzinger, "Generalized ellipsometry of complex mediums in layered systems," Proc. SPIE 4806, 264-276 (2002).

[CrossRef]

A. En-Naciri, L. Johann, and R. Kleim, "Spectroscopic generalized ellipsometry based on Fourier analysis," Appl. Opt. 38, 4802-4811 (1999).

[CrossRef]

A. En-Naciri, L. Johann, R. Kleim, M. Sieskind, and M. Amann, "Spectroscopic ellipsometry of anisotropic materials: application to the optical constants of HgI_{2}," Appl. Opt. 38, 647-654 (1998).

[CrossRef]

J.-D. Hecht, A. Eifler, V. Riede, M. Schubert, G. Kraub, and V. Kramer, "Birefringence and reflectivity of single-crystal CdAl_{2}Se_{4} by generalized ellipsometry," Phys. Rev. B 57, 7037-7042 (1998).

[CrossRef]

J.-D. Hecht, A. Eifler, V. Riede, M. Schubert, G. Kraub, and V. Kramer, "Birefringence and reflectivity of single-crystal CdAl_{2}Se_{4} by generalized ellipsometry," Phys. Rev. B 57, 7037-7042 (1998).

[CrossRef]

P. L. Lazarev and M. V. Paukshto, "Low-leakage off-angle in E-polarizers," J. Soc. Inf. Disp. 9, 101-105 (2001).

[CrossRef]

R. F. Spanier, R. G. Wolf, R. M. Loiterman, and M. E. Haller, "Simultaneous multiple angle/multiple wavelength ellipsometer and method," U.S. patent 5,166,752 (24 November 1992).

M. Mansuripur, "Analysis of multilayer thin-film structures containing magneto-optic and anisotropic media at oblique incidence using 2×2 matrices," J. Appl. Phys. 67, 6466-6475 (1990).

[CrossRef]

G. E. Jellison and F. A. Modine, "Two-modulator generalized ellipsometry: theory," Appl. Opt. 36, 8190-8198 (1997).

[CrossRef]

G. E. J. Jellison, F. A. Modine, and L. A. Boatner, "Measurement of the optical functions of uniaxial materials by two-modulator generalized ellipsometry: rutile (TiO2)," Opt. Lett. 22, 1808-1810 (1997).

[CrossRef]

G. E. Jellison and F. A. Modine, "Two-modulator generalized ellipsometry: experiment and calibration," Appl. Opt. 36, 8184-8189 (1997).

[CrossRef]

M. Schubert, A. Kasic, T. Hofmann, V. Gottschalch, J. Off, F. Scholz, E. Schubert, H. Neumann, I. Hodgkinson, M. Arnold, W. Dollase, and C. M. Herzinger, "Generalized ellipsometry of complex mediums in layered systems," Proc. SPIE 4806, 264-276 (2002).

[CrossRef]

M. Schubert, B. Rheinlander, E. Franke, H. Neumann, J. Hahn, M. Roder, and F. Richter, "Anisotropy of boron nitride thin-film reflectivity spectra by generalized ellipsometry," Appl. Phys. Lett. 70, 1819-1821 (1997).

[CrossRef]

M. Schubert, A. Kasic, T. Hofmann, V. Gottschalch, J. Off, F. Scholz, E. Schubert, H. Neumann, I. Hodgkinson, M. Arnold, W. Dollase, and C. M. Herzinger, "Generalized ellipsometry of complex mediums in layered systems," Proc. SPIE 4806, 264-276 (2002).

[CrossRef]

P. Yeh and M. Paukshto, "Molecular crystaline thin film E-polarizer," Mol. Mater. 14, 1-19 (2001).

P. L. Lazarev and M. V. Paukshto, "Low-leakage off-angle in E-polarizers," J. Soc. Inf. Disp. 9, 101-105 (2001).

[CrossRef]

W. H. Press, S. A. Teukolsky, W. T. Vetterling, and B. P. Flannery, Numerical Recipes in C, 2nd ed. (Cambridge U. Press, 1988).

M. Schubert, B. Rheinlander, E. Franke, H. Neumann, J. Hahn, M. Roder, and F. Richter, "Anisotropy of boron nitride thin-film reflectivity spectra by generalized ellipsometry," Appl. Phys. Lett. 70, 1819-1821 (1997).

[CrossRef]

M. Schubert, B. Rheinlander, J. A. Woollam, B. Johs, and C. M. Herzinger, "Extension of rotating-analyzer ellipsometry to generalized ellipsometry: determination of the dielectric function tensor from uniaxial TiO_{2}," J. Opt. Soc. Am. A 13, 875-883 (1996).

[CrossRef]

M. Schubert, B. Rheinlander, C. Cramer, H. Schmiedel, J. A. Woollam, C. M. Herzinger, and B. Johs, "Generalized transmission ellipsometry for twisted biaxial dielectric media: application to chiral liquid crystals," J. Opt. Soc. Am. A 13, 1930-1940 (1996).

[CrossRef]

M. Schubert, B. Rheinlander, E. Franke, H. Neumann, J. Hahn, M. Roder, and F. Richter, "Anisotropy of boron nitride thin-film reflectivity spectra by generalized ellipsometry," Appl. Phys. Lett. 70, 1819-1821 (1997).

[CrossRef]

J.-D. Hecht, A. Eifler, V. Riede, M. Schubert, G. Kraub, and V. Kramer, "Birefringence and reflectivity of single-crystal CdAl_{2}Se_{4} by generalized ellipsometry," Phys. Rev. B 57, 7037-7042 (1998).

[CrossRef]

M. Schubert, B. Rheinlander, E. Franke, H. Neumann, J. Hahn, M. Roder, and F. Richter, "Anisotropy of boron nitride thin-film reflectivity spectra by generalized ellipsometry," Appl. Phys. Lett. 70, 1819-1821 (1997).

[CrossRef]

M. Schubert, A. Kasic, T. Hofmann, V. Gottschalch, J. Off, F. Scholz, E. Schubert, H. Neumann, I. Hodgkinson, M. Arnold, W. Dollase, and C. M. Herzinger, "Generalized ellipsometry of complex mediums in layered systems," Proc. SPIE 4806, 264-276 (2002).

[CrossRef]

M. Schubert, A. Kasic, T. Hofmann, V. Gottschalch, J. Off, F. Scholz, E. Schubert, H. Neumann, I. Hodgkinson, M. Arnold, W. Dollase, and C. M. Herzinger, "Generalized ellipsometry of complex mediums in layered systems," Proc. SPIE 4806, 264-276 (2002).

[CrossRef]

M. Schubert, A. Kasic, T. Hofmann, V. Gottschalch, J. Off, F. Scholz, E. Schubert, H. Neumann, I. Hodgkinson, M. Arnold, W. Dollase, and C. M. Herzinger, "Generalized ellipsometry of complex mediums in layered systems," Proc. SPIE 4806, 264-276 (2002).

[CrossRef]

M. Schubert, T. E. Tiwald, and J. A. Woollam, "Explicit solutions for the optical properties of arbitrary magneto-optic materials in generalized ellipsometry," Appl. Opt. 38, 177-187 (1999).

[CrossRef]

J.-D. Hecht, A. Eifler, V. Riede, M. Schubert, G. Kraub, and V. Kramer, "Birefringence and reflectivity of single-crystal CdAl_{2}Se_{4} by generalized ellipsometry," Phys. Rev. B 57, 7037-7042 (1998).

[CrossRef]

M. Schubert, B. Rheinlander, E. Franke, H. Neumann, J. Hahn, M. Roder, and F. Richter, "Anisotropy of boron nitride thin-film reflectivity spectra by generalized ellipsometry," Appl. Phys. Lett. 70, 1819-1821 (1997).

[CrossRef]

M. Schubert, B. Rheinlander, C. Cramer, H. Schmiedel, J. A. Woollam, C. M. Herzinger, and B. Johs, "Generalized transmission ellipsometry for twisted biaxial dielectric media: application to chiral liquid crystals," J. Opt. Soc. Am. A 13, 1930-1940 (1996).

[CrossRef]

M. Schubert, B. Rheinlander, J. A. Woollam, B. Johs, and C. M. Herzinger, "Extension of rotating-analyzer ellipsometry to generalized ellipsometry: determination of the dielectric function tensor from uniaxial TiO_{2}," J. Opt. Soc. Am. A 13, 875-883 (1996).

[CrossRef]

M. Schubert, "Polarization-dependent optical parameters of arbitrarily anisotropic homogeneous layered systems," Phys. Rev. B 53, 4265-4274 (1996).

[CrossRef]

K. K. Svitashev, A. I. Semenenko, L. V. Semenenko, and V. K. Sokolov, "Ellipsometery based on a convergent light beam," Opt. Spektrosk. 34, 542-544 (1973).

K. K. Svitashev, A. I. Semenenko, L. V. Semenenko, and V. K. Sokolov, "Ellipsometery based on a convergent light beam," Opt. Spektrosk. 34, 542-544 (1973).

K. K. Svitashev, A. I. Semenenko, L. V. Semenenko, and V. K. Sokolov, "Ellipsometery based on a convergent light beam," Opt. Spektrosk. 34, 542-544 (1973).

R. F. Spanier, R. G. Wolf, R. M. Loiterman, and M. E. Haller, "Simultaneous multiple angle/multiple wavelength ellipsometer and method," U.S. patent 5,166,752 (24 November 1992).

M. E. Haller, J. Sullivan, and G. Collins, "Multidomain ellipsometry for thin film process control," Semicond. Int. 21, 269-272 (1998).

K. K. Svitashev, A. I. Semenenko, L. V. Semenenko, and V. K. Sokolov, "Ellipsometery based on a convergent light beam," Opt. Spektrosk. 34, 542-544 (1973).

W. H. Press, S. A. Teukolsky, W. T. Vetterling, and B. P. Flannery, Numerical Recipes in C, 2nd ed. (Cambridge U. Press, 1988).

W. H. Press, S. A. Teukolsky, W. T. Vetterling, and B. P. Flannery, Numerical Recipes in C, 2nd ed. (Cambridge U. Press, 1988).

M. Born and E. Wolf, Principles of Optics, 6th ed. (Cambridge U. Press, 1980).

R. F. Spanier, R. G. Wolf, R. M. Loiterman, and M. E. Haller, "Simultaneous multiple angle/multiple wavelength ellipsometer and method," U.S. patent 5,166,752 (24 November 1992).

M. Schubert, T. E. Tiwald, and J. A. Woollam, "Explicit solutions for the optical properties of arbitrary magneto-optic materials in generalized ellipsometry," Appl. Opt. 38, 177-187 (1999).

[CrossRef]

M. Schubert, B. Rheinlander, C. Cramer, H. Schmiedel, J. A. Woollam, C. M. Herzinger, and B. Johs, "Generalized transmission ellipsometry for twisted biaxial dielectric media: application to chiral liquid crystals," J. Opt. Soc. Am. A 13, 1930-1940 (1996).

[CrossRef]

M. Schubert, B. Rheinlander, J. A. Woollam, B. Johs, and C. M. Herzinger, "Extension of rotating-analyzer ellipsometry to generalized ellipsometry: determination of the dielectric function tensor from uniaxial TiO_{2}," J. Opt. Soc. Am. A 13, 875-883 (1996).

[CrossRef]

P. Yeh and M. Paukshto, "Molecular crystaline thin film E-polarizer," Mol. Mater. 14, 1-19 (2001).

P. Yeh, "Optics of anisotropic layered media: a new 4×4 matrix algebra," Surf. Sci. 96, 41-53 (1980).

[CrossRef]

A. En-Naciri, L. Johann, R. Kleim, M. Sieskind, and M. Amann, "Spectroscopic ellipsometry of anisotropic materials: application to the optical constants of HgI_{2}," Appl. Opt. 38, 647-654 (1998).

[CrossRef]

G. E. Jellison and F. A. Modine, "Two-modulator generalized ellipsometry: theory," Appl. Opt. 36, 8190-8198 (1997).

[CrossRef]

G. E. Jellison and F. A. Modine, "Two-modulator generalized ellipsometry: experiment and calibration," Appl. Opt. 36, 8184-8189 (1997).

[CrossRef]

M. Schubert, T. E. Tiwald, and J. A. Woollam, "Explicit solutions for the optical properties of arbitrary magneto-optic materials in generalized ellipsometry," Appl. Opt. 38, 177-187 (1999).

[CrossRef]

A. En-Naciri, L. Johann, and R. Kleim, "Spectroscopic generalized ellipsometry based on Fourier analysis," Appl. Opt. 38, 4802-4811 (1999).

[CrossRef]

D. H. Goldstein, "Mueller matrix dual-rotating retarder polarimeter," Appl. Opt. 31, 6676-6683 (1992).

[CrossRef]
[PubMed]

P. Varga, "Use of confocal microscopes in conoscopy and ellipsometry. 1. Electromagnetic theory," Appl. Opt. 39, 6360-6365 (2000).

[CrossRef]

R. A. Chipman, "Depolarization index and the average degree of polarization," Appl. Opt. 44, 2490-2495 (2005).

[CrossRef]
[PubMed]

M. Schubert, B. Rheinlander, E. Franke, H. Neumann, J. Hahn, M. Roder, and F. Richter, "Anisotropy of boron nitride thin-film reflectivity spectra by generalized ellipsometry," Appl. Phys. Lett. 70, 1819-1821 (1997).

[CrossRef]

M. Mansuripur, "Analysis of multilayer thin-film structures containing magneto-optic and anisotropic media at oblique incidence using 2×2 matrices," J. Appl. Phys. 67, 6466-6475 (1990).

[CrossRef]

M. Schubert, B. Rheinlander, J. A. Woollam, B. Johs, and C. M. Herzinger, "Extension of rotating-analyzer ellipsometry to generalized ellipsometry: determination of the dielectric function tensor from uniaxial TiO_{2}," J. Opt. Soc. Am. A 13, 875-883 (1996).

[CrossRef]

M. Schubert, B. Rheinlander, C. Cramer, H. Schmiedel, J. A. Woollam, C. M. Herzinger, and B. Johs, "Generalized transmission ellipsometry for twisted biaxial dielectric media: application to chiral liquid crystals," J. Opt. Soc. Am. A 13, 1930-1940 (1996).

[CrossRef]

J. Lekner, "Ellipsometry of anisotropic media," J. Opt. Soc. Am. A 10, 1579-1581 (1993).

[CrossRef]

P. L. Lazarev and M. V. Paukshto, "Low-leakage off-angle in E-polarizers," J. Soc. Inf. Disp. 9, 101-105 (2001).

[CrossRef]

P. Yeh and M. Paukshto, "Molecular crystaline thin film E-polarizer," Mol. Mater. 14, 1-19 (2001).

R. M. A. Azzam, "A simple Fourier photo-polarimeter with rotating polarizer and analyzer for measuring Jones and Mueller matrices," Opt. Commun. 25, 137-140 (1978).

[CrossRef]

K. K. Svitashev, A. I. Semenenko, L. V. Semenenko, and V. K. Sokolov, "Ellipsometery based on a convergent light beam," Opt. Spektrosk. 34, 542-544 (1973).

M. Schubert, "Polarization-dependent optical parameters of arbitrarily anisotropic homogeneous layered systems," Phys. Rev. B 53, 4265-4274 (1996).

[CrossRef]

J.-D. Hecht, A. Eifler, V. Riede, M. Schubert, G. Kraub, and V. Kramer, "Birefringence and reflectivity of single-crystal CdAl_{2}Se_{4} by generalized ellipsometry," Phys. Rev. B 57, 7037-7042 (1998).

[CrossRef]

M. Schubert, A. Kasic, T. Hofmann, V. Gottschalch, J. Off, F. Scholz, E. Schubert, H. Neumann, I. Hodgkinson, M. Arnold, W. Dollase, and C. M. Herzinger, "Generalized ellipsometry of complex mediums in layered systems," Proc. SPIE 4806, 264-276 (2002).

[CrossRef]

M. E. Haller, J. Sullivan, and G. Collins, "Multidomain ellipsometry for thin film process control," Semicond. Int. 21, 269-272 (1998).

P. Yeh, "Optics of anisotropic layered media: a new 4×4 matrix algebra," Surf. Sci. 96, 41-53 (1980).

[CrossRef]

J. F. Elman, U. J. Greener, C. M. Herzinger, and B. Johs, "Characterization of biaxially-stretched plastic films by generalized ellipsometry," Thin Solid Films 313-314, 814-818 (1998).

[CrossRef]

G. E. Jellison, "Spectroscopic ellipsometry data analysis: measured versus calculated quantities," Thin Solid Films 313-314, 33-39 (1998).

[CrossRef]

M. Born and E. Wolf, Principles of Optics, 6th ed. (Cambridge U. Press, 1980).

R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light, 2nd ed. (Elsevier, 1987).

R. A. Chipman, "Polarimetry," in OSA Handbook of Optics (McGraw-Hill, 1995), pp. 22.21-22.35.

R. F. Spanier, R. G. Wolf, R. M. Loiterman, and M. E. Haller, "Simultaneous multiple angle/multiple wavelength ellipsometer and method," U.S. patent 5,166,752 (24 November 1992).

D. Goldstein, Polarized Light, 2nd ed. (Marcel Dekker, 2003).

[CrossRef]

W. H. Press, S. A. Teukolsky, W. T. Vetterling, and B. P. Flannery, Numerical Recipes in C, 2nd ed. (Cambridge U. Press, 1988).

R. A. Chipman, "Polarization aberrations," Ph.D. dissertation (University of Arizona, Tucson, Arizona, 1987).