Abstract

We introduce a coupled system of nonlinear partial differential equations (PDEs) to model a particular microelectromechanical systems (MEMS) deformable mirror consisting of a continuous facesheet coupled with electrostatic plate-driven actuators. To make the problem computationally tractable, we reduced the system to a single linear PDE for the facesheet coupled with nonlinear algebraic constraints for each of the actuators. We also introduce a nonlinearly constrained quadratic optimization problem for open-loop control of the MEMS mirror. Numerical simulation and control results are presented, and shortcomings of the model are discussed.

© 2006 Optical Society of America

Full Article  |  PDF Article
Related Articles
Demonstrating sub-nm closed loop MEMS flattening

Julia W. Evans, Bruce Macintosh, Lisa Poyneer, Katie Morzinski, Scott Severson, Daren Dillon, Donald Gavel, and Layra Reza
Opt. Express 14(12) 5558-5570 (2006)

Open-loop control of a MEMS deformable mirror for large-amplitude wavefront control

Jason B. Stewart, Alioune Diouf, Yaopeng Zhou, and Thomas G. Bifano
J. Opt. Soc. Am. A 24(12) 3827-3833 (2007)

High-accuracy wavefront control for retinal imaging with Adaptive-Influence-Matrix Adaptive Optics

Weiyao Zou and Stephen A. Burns
Opt. Express 17(22) 20167-20177 (2009)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (7)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (38)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription