Abstract

The spectroscopic ellipsometry of lamellar gratings made of lossless dielectric materials is studied numerically by using the rigorous coupled-wave method with the use of Li’s Fourier factorization rules [ J. Opt. Soc. Am. A 13, 1870 ( 1996)], which are known to improve the convergence on the analyses of metallic gratings. Numerical results show that the calculation method also provides fast convergence on lossless gratings, and accurate values of the ellipsometric angles are obtained in very short computation times. Moreover, estimation of grating parameters is investigated by using a cost function defined by the average distance on the Poincaré sphere, and it is shown that the computation required for accurate estimation is possible in reasonable computation time.

© 2005 Optical Society of America

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