Abstract

A two-dimensional-corrugated-slab-waveguide add/drop filter providing 100% resonant reflection at 1.55μm wavelength for both TE and TM polarizations with identical FWHM is designed. The fabricated device exhibits a reflectivity spectrum of more than 95% peak reflection for both polarizations at 1.537μm. The coupling scheme involves the TE0 guided mode only; it is made relatively tolerant by means of a double-sided crossed grating.

© 2005 Optical Society of America

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  1. G. A. Golubenko, A. S. Svakhin, V. A. Sychugov, A. V. Tishchenko, “Total reflection of light from a corrugated surface of a dielectric waveguide,” Sov. J. Quantum Electron. 15, 886–887 (1985).
    [CrossRef]
  2. A. Avrutsky, G. A. Golubenko, V. A. Sychugov, A. V. Tishchenko, “Light reflection from the surface of a corrugated waveguide,” Sov. Tech. Phys. Lett. 11, 401–402 (1985).
  3. G. A. Golubenko, V. A. Sychugov, A. V. Tishchenko, “The phenomenon of full ‘external’ reflection of light from the surface of a corrugated dielectric waveguide and its use in narrow band filters,” Sov. Phys. Lebedev. Inst. Rep. 11, 36–40 (1985).
  4. R. Magnusson, S. Wang, “New principle for optical filters,” Appl. Phys. Lett. 61, 1022–1024 (1992).
    [CrossRef]
  5. J. W. S. Rayleigh, “Note on the remarkable case of diffraction spectra described by Prof. Wood,” Philos. Mag. 14, 60–65 (1907).
    [CrossRef]
  6. E. Popov, L. Mashev, D. Maystre, “Theoretical study of anomalies of coated dielectric gratings,” Opt. Acta 33, 607–619 (1986).
    [CrossRef]
  7. I. A. Avrutsky, G. A. Golubenko, V. A. Sychugov, A. V. Tishchenko, “Spectral and laser characteristics of a mirror with a corrugated waveguide on its surface,” Sov. J. Quantum Electron. 16, 1063–1065 (1986).
    [CrossRef]
  8. V. A. Kondratyuk, V. A. Mikhailov, N. M. Lyndin, V. A. Sychugov, O. Parriaux, “Multilayer waveguide-grating mirror in the Fabry–Perot cavity of an alexandrite solid-state laser,” Quantum Electron. 29, 175–178 (1999).
    [CrossRef]
  9. S. M. Norton, G. M. Morris, T. Erdogan, “Experimental investigation of resonant-grating filter line shapes in comparison with theoretical models,” J. Opt. Soc. Am. A 15, 464–472 (1998).
    [CrossRef]
  10. M. Abdou Ahmed, F. Pigeon, A. V. Tishchenko, O. Parriaux, Y. Ouerdane, S. Reynaud, J.-C. Pommier, H.-J. Fuchs, “Polarizing grating coupler for high Q laser cavities,” IEEE J. Quantum Electron. 39, 614–619 (2003).
    [CrossRef]
  11. D. Lacour, G. Granet, J. P. Plumey, A. Mure-Ravaud, “Resonant waveguide grating: analysis of polarization independent filtering,” Opt. Quantum Electron. 33, 451–470 (2001).
    [CrossRef]
  12. A. Mizutani, H. Kikuta, K. Nakajima, K. Iwata, “Nonpolarizing guided-mode resonant grating filter for oblique incidence,” J. Opt. Soc. Am. A 18, 1261–1266 (2001).
    [CrossRef]
  13. S. Peng, G. M. Morris, “Resonant scattering from two-dimensional grating,” J. Opt. Soc. Am. A 13, 993–1005 (1996).
    [CrossRef]
  14. S. Peng, G. M. Morris, “Experimental demonstration of resonant anomalies in diffraction from two-dimensional gratings,” Opt. Lett. 21, 549–551 (1996).
    [CrossRef] [PubMed]
  15. A.-L. Fehrembach, D. Maystre, A. Sentenac, “Phenomenological theory of filtering by resonant dielectric gratings,” J. Opt. Soc. Am. A 19, 1136–1144 (2002).
    [CrossRef]
  16. A. V. Tishchenko, “Generalized source method: new possibilities for waveguide and grating problems,” Opt. Quantum Electron. 32, 971–980 (2000).
    [CrossRef]
  17. U. Kroll, A. Shah, H. Keppner, J. Meier, P. Torres, D. Fischer, “Potential of VHF-plasmas for low-cost production of a-Si:H solar cells,” Sol. Energy Mater. Sol. Cells 48, 343–350 (1997).
    [CrossRef]

2003 (1)

M. Abdou Ahmed, F. Pigeon, A. V. Tishchenko, O. Parriaux, Y. Ouerdane, S. Reynaud, J.-C. Pommier, H.-J. Fuchs, “Polarizing grating coupler for high Q laser cavities,” IEEE J. Quantum Electron. 39, 614–619 (2003).
[CrossRef]

2002 (1)

2001 (2)

A. Mizutani, H. Kikuta, K. Nakajima, K. Iwata, “Nonpolarizing guided-mode resonant grating filter for oblique incidence,” J. Opt. Soc. Am. A 18, 1261–1266 (2001).
[CrossRef]

D. Lacour, G. Granet, J. P. Plumey, A. Mure-Ravaud, “Resonant waveguide grating: analysis of polarization independent filtering,” Opt. Quantum Electron. 33, 451–470 (2001).
[CrossRef]

2000 (1)

A. V. Tishchenko, “Generalized source method: new possibilities for waveguide and grating problems,” Opt. Quantum Electron. 32, 971–980 (2000).
[CrossRef]

1999 (1)

V. A. Kondratyuk, V. A. Mikhailov, N. M. Lyndin, V. A. Sychugov, O. Parriaux, “Multilayer waveguide-grating mirror in the Fabry–Perot cavity of an alexandrite solid-state laser,” Quantum Electron. 29, 175–178 (1999).
[CrossRef]

1998 (1)

1997 (1)

U. Kroll, A. Shah, H. Keppner, J. Meier, P. Torres, D. Fischer, “Potential of VHF-plasmas for low-cost production of a-Si:H solar cells,” Sol. Energy Mater. Sol. Cells 48, 343–350 (1997).
[CrossRef]

1996 (2)

1992 (1)

R. Magnusson, S. Wang, “New principle for optical filters,” Appl. Phys. Lett. 61, 1022–1024 (1992).
[CrossRef]

1986 (2)

E. Popov, L. Mashev, D. Maystre, “Theoretical study of anomalies of coated dielectric gratings,” Opt. Acta 33, 607–619 (1986).
[CrossRef]

I. A. Avrutsky, G. A. Golubenko, V. A. Sychugov, A. V. Tishchenko, “Spectral and laser characteristics of a mirror with a corrugated waveguide on its surface,” Sov. J. Quantum Electron. 16, 1063–1065 (1986).
[CrossRef]

1985 (3)

G. A. Golubenko, A. S. Svakhin, V. A. Sychugov, A. V. Tishchenko, “Total reflection of light from a corrugated surface of a dielectric waveguide,” Sov. J. Quantum Electron. 15, 886–887 (1985).
[CrossRef]

A. Avrutsky, G. A. Golubenko, V. A. Sychugov, A. V. Tishchenko, “Light reflection from the surface of a corrugated waveguide,” Sov. Tech. Phys. Lett. 11, 401–402 (1985).

G. A. Golubenko, V. A. Sychugov, A. V. Tishchenko, “The phenomenon of full ‘external’ reflection of light from the surface of a corrugated dielectric waveguide and its use in narrow band filters,” Sov. Phys. Lebedev. Inst. Rep. 11, 36–40 (1985).

1907 (1)

J. W. S. Rayleigh, “Note on the remarkable case of diffraction spectra described by Prof. Wood,” Philos. Mag. 14, 60–65 (1907).
[CrossRef]

Ahmed, M. Abdou

M. Abdou Ahmed, F. Pigeon, A. V. Tishchenko, O. Parriaux, Y. Ouerdane, S. Reynaud, J.-C. Pommier, H.-J. Fuchs, “Polarizing grating coupler for high Q laser cavities,” IEEE J. Quantum Electron. 39, 614–619 (2003).
[CrossRef]

Avrutsky, A.

A. Avrutsky, G. A. Golubenko, V. A. Sychugov, A. V. Tishchenko, “Light reflection from the surface of a corrugated waveguide,” Sov. Tech. Phys. Lett. 11, 401–402 (1985).

Avrutsky, I. A.

I. A. Avrutsky, G. A. Golubenko, V. A. Sychugov, A. V. Tishchenko, “Spectral and laser characteristics of a mirror with a corrugated waveguide on its surface,” Sov. J. Quantum Electron. 16, 1063–1065 (1986).
[CrossRef]

Erdogan, T.

Fehrembach, A.-L.

Fischer, D.

U. Kroll, A. Shah, H. Keppner, J. Meier, P. Torres, D. Fischer, “Potential of VHF-plasmas for low-cost production of a-Si:H solar cells,” Sol. Energy Mater. Sol. Cells 48, 343–350 (1997).
[CrossRef]

Fuchs, H.-J.

M. Abdou Ahmed, F. Pigeon, A. V. Tishchenko, O. Parriaux, Y. Ouerdane, S. Reynaud, J.-C. Pommier, H.-J. Fuchs, “Polarizing grating coupler for high Q laser cavities,” IEEE J. Quantum Electron. 39, 614–619 (2003).
[CrossRef]

Golubenko, G. A.

I. A. Avrutsky, G. A. Golubenko, V. A. Sychugov, A. V. Tishchenko, “Spectral and laser characteristics of a mirror with a corrugated waveguide on its surface,” Sov. J. Quantum Electron. 16, 1063–1065 (1986).
[CrossRef]

A. Avrutsky, G. A. Golubenko, V. A. Sychugov, A. V. Tishchenko, “Light reflection from the surface of a corrugated waveguide,” Sov. Tech. Phys. Lett. 11, 401–402 (1985).

G. A. Golubenko, A. S. Svakhin, V. A. Sychugov, A. V. Tishchenko, “Total reflection of light from a corrugated surface of a dielectric waveguide,” Sov. J. Quantum Electron. 15, 886–887 (1985).
[CrossRef]

G. A. Golubenko, V. A. Sychugov, A. V. Tishchenko, “The phenomenon of full ‘external’ reflection of light from the surface of a corrugated dielectric waveguide and its use in narrow band filters,” Sov. Phys. Lebedev. Inst. Rep. 11, 36–40 (1985).

Granet, G.

D. Lacour, G. Granet, J. P. Plumey, A. Mure-Ravaud, “Resonant waveguide grating: analysis of polarization independent filtering,” Opt. Quantum Electron. 33, 451–470 (2001).
[CrossRef]

Iwata, K.

Keppner, H.

U. Kroll, A. Shah, H. Keppner, J. Meier, P. Torres, D. Fischer, “Potential of VHF-plasmas for low-cost production of a-Si:H solar cells,” Sol. Energy Mater. Sol. Cells 48, 343–350 (1997).
[CrossRef]

Kikuta, H.

Kondratyuk, V. A.

V. A. Kondratyuk, V. A. Mikhailov, N. M. Lyndin, V. A. Sychugov, O. Parriaux, “Multilayer waveguide-grating mirror in the Fabry–Perot cavity of an alexandrite solid-state laser,” Quantum Electron. 29, 175–178 (1999).
[CrossRef]

Kroll, U.

U. Kroll, A. Shah, H. Keppner, J. Meier, P. Torres, D. Fischer, “Potential of VHF-plasmas for low-cost production of a-Si:H solar cells,” Sol. Energy Mater. Sol. Cells 48, 343–350 (1997).
[CrossRef]

Lacour, D.

D. Lacour, G. Granet, J. P. Plumey, A. Mure-Ravaud, “Resonant waveguide grating: analysis of polarization independent filtering,” Opt. Quantum Electron. 33, 451–470 (2001).
[CrossRef]

Lyndin, N. M.

V. A. Kondratyuk, V. A. Mikhailov, N. M. Lyndin, V. A. Sychugov, O. Parriaux, “Multilayer waveguide-grating mirror in the Fabry–Perot cavity of an alexandrite solid-state laser,” Quantum Electron. 29, 175–178 (1999).
[CrossRef]

Magnusson, R.

R. Magnusson, S. Wang, “New principle for optical filters,” Appl. Phys. Lett. 61, 1022–1024 (1992).
[CrossRef]

Mashev, L.

E. Popov, L. Mashev, D. Maystre, “Theoretical study of anomalies of coated dielectric gratings,” Opt. Acta 33, 607–619 (1986).
[CrossRef]

Maystre, D.

A.-L. Fehrembach, D. Maystre, A. Sentenac, “Phenomenological theory of filtering by resonant dielectric gratings,” J. Opt. Soc. Am. A 19, 1136–1144 (2002).
[CrossRef]

E. Popov, L. Mashev, D. Maystre, “Theoretical study of anomalies of coated dielectric gratings,” Opt. Acta 33, 607–619 (1986).
[CrossRef]

Meier, J.

U. Kroll, A. Shah, H. Keppner, J. Meier, P. Torres, D. Fischer, “Potential of VHF-plasmas for low-cost production of a-Si:H solar cells,” Sol. Energy Mater. Sol. Cells 48, 343–350 (1997).
[CrossRef]

Mikhailov, V. A.

V. A. Kondratyuk, V. A. Mikhailov, N. M. Lyndin, V. A. Sychugov, O. Parriaux, “Multilayer waveguide-grating mirror in the Fabry–Perot cavity of an alexandrite solid-state laser,” Quantum Electron. 29, 175–178 (1999).
[CrossRef]

Mizutani, A.

Morris, G. M.

Mure-Ravaud, A.

D. Lacour, G. Granet, J. P. Plumey, A. Mure-Ravaud, “Resonant waveguide grating: analysis of polarization independent filtering,” Opt. Quantum Electron. 33, 451–470 (2001).
[CrossRef]

Nakajima, K.

Norton, S. M.

Ouerdane, Y.

M. Abdou Ahmed, F. Pigeon, A. V. Tishchenko, O. Parriaux, Y. Ouerdane, S. Reynaud, J.-C. Pommier, H.-J. Fuchs, “Polarizing grating coupler for high Q laser cavities,” IEEE J. Quantum Electron. 39, 614–619 (2003).
[CrossRef]

Parriaux, O.

M. Abdou Ahmed, F. Pigeon, A. V. Tishchenko, O. Parriaux, Y. Ouerdane, S. Reynaud, J.-C. Pommier, H.-J. Fuchs, “Polarizing grating coupler for high Q laser cavities,” IEEE J. Quantum Electron. 39, 614–619 (2003).
[CrossRef]

V. A. Kondratyuk, V. A. Mikhailov, N. M. Lyndin, V. A. Sychugov, O. Parriaux, “Multilayer waveguide-grating mirror in the Fabry–Perot cavity of an alexandrite solid-state laser,” Quantum Electron. 29, 175–178 (1999).
[CrossRef]

Peng, S.

Pigeon, F.

M. Abdou Ahmed, F. Pigeon, A. V. Tishchenko, O. Parriaux, Y. Ouerdane, S. Reynaud, J.-C. Pommier, H.-J. Fuchs, “Polarizing grating coupler for high Q laser cavities,” IEEE J. Quantum Electron. 39, 614–619 (2003).
[CrossRef]

Plumey, J. P.

D. Lacour, G. Granet, J. P. Plumey, A. Mure-Ravaud, “Resonant waveguide grating: analysis of polarization independent filtering,” Opt. Quantum Electron. 33, 451–470 (2001).
[CrossRef]

Pommier, J.-C.

M. Abdou Ahmed, F. Pigeon, A. V. Tishchenko, O. Parriaux, Y. Ouerdane, S. Reynaud, J.-C. Pommier, H.-J. Fuchs, “Polarizing grating coupler for high Q laser cavities,” IEEE J. Quantum Electron. 39, 614–619 (2003).
[CrossRef]

Popov, E.

E. Popov, L. Mashev, D. Maystre, “Theoretical study of anomalies of coated dielectric gratings,” Opt. Acta 33, 607–619 (1986).
[CrossRef]

Rayleigh, J. W. S.

J. W. S. Rayleigh, “Note on the remarkable case of diffraction spectra described by Prof. Wood,” Philos. Mag. 14, 60–65 (1907).
[CrossRef]

Reynaud, S.

M. Abdou Ahmed, F. Pigeon, A. V. Tishchenko, O. Parriaux, Y. Ouerdane, S. Reynaud, J.-C. Pommier, H.-J. Fuchs, “Polarizing grating coupler for high Q laser cavities,” IEEE J. Quantum Electron. 39, 614–619 (2003).
[CrossRef]

Sentenac, A.

Shah, A.

U. Kroll, A. Shah, H. Keppner, J. Meier, P. Torres, D. Fischer, “Potential of VHF-plasmas for low-cost production of a-Si:H solar cells,” Sol. Energy Mater. Sol. Cells 48, 343–350 (1997).
[CrossRef]

Svakhin, A. S.

G. A. Golubenko, A. S. Svakhin, V. A. Sychugov, A. V. Tishchenko, “Total reflection of light from a corrugated surface of a dielectric waveguide,” Sov. J. Quantum Electron. 15, 886–887 (1985).
[CrossRef]

Sychugov, V. A.

V. A. Kondratyuk, V. A. Mikhailov, N. M. Lyndin, V. A. Sychugov, O. Parriaux, “Multilayer waveguide-grating mirror in the Fabry–Perot cavity of an alexandrite solid-state laser,” Quantum Electron. 29, 175–178 (1999).
[CrossRef]

I. A. Avrutsky, G. A. Golubenko, V. A. Sychugov, A. V. Tishchenko, “Spectral and laser characteristics of a mirror with a corrugated waveguide on its surface,” Sov. J. Quantum Electron. 16, 1063–1065 (1986).
[CrossRef]

A. Avrutsky, G. A. Golubenko, V. A. Sychugov, A. V. Tishchenko, “Light reflection from the surface of a corrugated waveguide,” Sov. Tech. Phys. Lett. 11, 401–402 (1985).

G. A. Golubenko, A. S. Svakhin, V. A. Sychugov, A. V. Tishchenko, “Total reflection of light from a corrugated surface of a dielectric waveguide,” Sov. J. Quantum Electron. 15, 886–887 (1985).
[CrossRef]

G. A. Golubenko, V. A. Sychugov, A. V. Tishchenko, “The phenomenon of full ‘external’ reflection of light from the surface of a corrugated dielectric waveguide and its use in narrow band filters,” Sov. Phys. Lebedev. Inst. Rep. 11, 36–40 (1985).

Tishchenko, A. V.

M. Abdou Ahmed, F. Pigeon, A. V. Tishchenko, O. Parriaux, Y. Ouerdane, S. Reynaud, J.-C. Pommier, H.-J. Fuchs, “Polarizing grating coupler for high Q laser cavities,” IEEE J. Quantum Electron. 39, 614–619 (2003).
[CrossRef]

A. V. Tishchenko, “Generalized source method: new possibilities for waveguide and grating problems,” Opt. Quantum Electron. 32, 971–980 (2000).
[CrossRef]

I. A. Avrutsky, G. A. Golubenko, V. A. Sychugov, A. V. Tishchenko, “Spectral and laser characteristics of a mirror with a corrugated waveguide on its surface,” Sov. J. Quantum Electron. 16, 1063–1065 (1986).
[CrossRef]

A. Avrutsky, G. A. Golubenko, V. A. Sychugov, A. V. Tishchenko, “Light reflection from the surface of a corrugated waveguide,” Sov. Tech. Phys. Lett. 11, 401–402 (1985).

G. A. Golubenko, V. A. Sychugov, A. V. Tishchenko, “The phenomenon of full ‘external’ reflection of light from the surface of a corrugated dielectric waveguide and its use in narrow band filters,” Sov. Phys. Lebedev. Inst. Rep. 11, 36–40 (1985).

G. A. Golubenko, A. S. Svakhin, V. A. Sychugov, A. V. Tishchenko, “Total reflection of light from a corrugated surface of a dielectric waveguide,” Sov. J. Quantum Electron. 15, 886–887 (1985).
[CrossRef]

Torres, P.

U. Kroll, A. Shah, H. Keppner, J. Meier, P. Torres, D. Fischer, “Potential of VHF-plasmas for low-cost production of a-Si:H solar cells,” Sol. Energy Mater. Sol. Cells 48, 343–350 (1997).
[CrossRef]

Wang, S.

R. Magnusson, S. Wang, “New principle for optical filters,” Appl. Phys. Lett. 61, 1022–1024 (1992).
[CrossRef]

Appl. Phys. Lett. (1)

R. Magnusson, S. Wang, “New principle for optical filters,” Appl. Phys. Lett. 61, 1022–1024 (1992).
[CrossRef]

IEEE J. Quantum Electron. (1)

M. Abdou Ahmed, F. Pigeon, A. V. Tishchenko, O. Parriaux, Y. Ouerdane, S. Reynaud, J.-C. Pommier, H.-J. Fuchs, “Polarizing grating coupler for high Q laser cavities,” IEEE J. Quantum Electron. 39, 614–619 (2003).
[CrossRef]

J. Opt. Soc. Am. A (4)

Opt. Acta (1)

E. Popov, L. Mashev, D. Maystre, “Theoretical study of anomalies of coated dielectric gratings,” Opt. Acta 33, 607–619 (1986).
[CrossRef]

Opt. Lett. (1)

Opt. Quantum Electron. (2)

D. Lacour, G. Granet, J. P. Plumey, A. Mure-Ravaud, “Resonant waveguide grating: analysis of polarization independent filtering,” Opt. Quantum Electron. 33, 451–470 (2001).
[CrossRef]

A. V. Tishchenko, “Generalized source method: new possibilities for waveguide and grating problems,” Opt. Quantum Electron. 32, 971–980 (2000).
[CrossRef]

Philos. Mag. (1)

J. W. S. Rayleigh, “Note on the remarkable case of diffraction spectra described by Prof. Wood,” Philos. Mag. 14, 60–65 (1907).
[CrossRef]

Quantum Electron. (1)

V. A. Kondratyuk, V. A. Mikhailov, N. M. Lyndin, V. A. Sychugov, O. Parriaux, “Multilayer waveguide-grating mirror in the Fabry–Perot cavity of an alexandrite solid-state laser,” Quantum Electron. 29, 175–178 (1999).
[CrossRef]

Sol. Energy Mater. Sol. Cells (1)

U. Kroll, A. Shah, H. Keppner, J. Meier, P. Torres, D. Fischer, “Potential of VHF-plasmas for low-cost production of a-Si:H solar cells,” Sol. Energy Mater. Sol. Cells 48, 343–350 (1997).
[CrossRef]

Sov. J. Quantum Electron. (2)

I. A. Avrutsky, G. A. Golubenko, V. A. Sychugov, A. V. Tishchenko, “Spectral and laser characteristics of a mirror with a corrugated waveguide on its surface,” Sov. J. Quantum Electron. 16, 1063–1065 (1986).
[CrossRef]

G. A. Golubenko, A. S. Svakhin, V. A. Sychugov, A. V. Tishchenko, “Total reflection of light from a corrugated surface of a dielectric waveguide,” Sov. J. Quantum Electron. 15, 886–887 (1985).
[CrossRef]

Sov. Phys. Lebedev. Inst. Rep. (1)

G. A. Golubenko, V. A. Sychugov, A. V. Tishchenko, “The phenomenon of full ‘external’ reflection of light from the surface of a corrugated dielectric waveguide and its use in narrow band filters,” Sov. Phys. Lebedev. Inst. Rep. 11, 36–40 (1985).

Sov. Tech. Phys. Lett. (1)

A. Avrutsky, G. A. Golubenko, V. A. Sychugov, A. V. Tishchenko, “Light reflection from the surface of a corrugated waveguide,” Sov. Tech. Phys. Lett. 11, 401–402 (1985).

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Figures (6)

Fig. 1
Fig. 1

Symbolic diagram explaining resonant reflection from a slab waveguide with grating.

Fig. 2
Fig. 2

2D waveguide grating filter with double-sided conformal undulations.

Fig. 3
Fig. 3

Excitation of the TE 0 mode in different directions by TE and TM incident polarizations. The TE to TE 0 is purely collinear in the forward direction. The TM to TE 0 is purely conical.

Fig. 4
Fig. 4

Numerical modeling of the spectral reflection from the 2D grating structure at 40° incidence angle.

Fig. 5
Fig. 5

SEM image of the crossed grating in fused silica.

Fig. 6
Fig. 6

Measured spectral reflection.

Equations (3)

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w g = m λ 2 n g 2 sin θ i 2 ,
Λ x = λ n e 0 sin θ i ,
Λ y = λ n n 0 2 sin 2 θ i .

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