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Several formulations of the differential theory for anisotropic gratings are investigated numerically. Conventional formulations and recent formulations based on Li’s Fourier factorization rules are applied to a sinusoidal-profiled grating made of an anisotropic and conducting material. For both types of formulation, the numerical results of the differential and the rigorous coupled-wave methods are presented, and only the differential method based on Li’s Fourier factorization rules provides a reliable convergence. Moreover, several numerical integration schemes used on the differential method are examined, and the advantage of the implicit integration schemes is shown.
© 2002 Optical Society of America
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