Abstract

Local optimization of surface-relief profiles of diffractive high-numerical-aperture imaging lenses is considered in the 1:1 imaging geometry for both linearly polarized illumination and unpolarized illumination by using the transition points of a four-level grating as design parameters. In the imaging geometry the optimized surface profiles differ considerably from those optimized previously for focusing or collimation geometries. Binary surface-relief grating structures are shown to provide high local diffraction efficiencies (up to 95%) in the outer regions of a high-numerical-aperture diffractive imaging lens because of the near-Littrow configuration.

© 2001 Optical Society of America

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