Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Characteristics of ion-beam-sputtered high-refractive-index TiO2-SiO2 mixed films

Not Accessible

Your library or personal account may give you access

Abstract

The ion-beam-sputtering method was used to deposit TiO2-SiO2 mixed films on silica substrates. The SiO2 concentration ranged from 0 to 17%, and the refractive index ranged from ∼2.7 to ∼2.3 in visible wavelength. All the structures of the as-deposited films were amorphous. The refractive index and the extinction coefficient decreased with increased SiO2 concentration. High temperature annealing reduced the optical absorption for all films. There was a phase transition from amorphous to polycrystalline anatase at high temperature. Surface roughness, and thus optical scattering, increased drastically with the appearance of the phase transition. The phase transition temperature was higher for films with higher SiO2 concentration. The ion-beam-sputtered TiO2-SiO2 mixed film could sustain higher temperature annealing, resulting in lower extinction coefficient, than that of the ion-beam-sputtered pure TiO2 film. The phase diagram of the mixed film system was given.

© 1999 Optical Society of America

Full Article  |  PDF Article
More Like This
Low-loss dielectric mirror with ion-beam-sputtered TiO2–SiO2 mixed films

Shiuh Chao, Wen-Hsiang Wang, and Cheng-Chung Lee
Appl. Opt. 40(13) 2177-2182 (2001)

Annealing effect on ion-beam-sputtered titanium dioxide film

Wen-Hsiang Wang and Shiuh Chao
Opt. Lett. 23(18) 1417-1419 (1998)

TiO2-Ta2O5 composite thin films deposited by radio frequency ion-beam sputtering

Cheng-Chung Lee and Chien-Jen Tang
Appl. Opt. 45(36) 9125-9131 (2006)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (7)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved