## Abstract

A method of postprocessing the data from a phase-shifting interferometer is proposed that reduces the influence of vibration or other environmental disturbances occurring during the data-acquisition time. The method is based on spectral analysis of the time-varying intensity data from each of the camera pixels. A correction term is obtained at a frequency three times that of the phase-shifting device. No additional hardware is required, although the phase-shifting algorithm used must have phase steps of $\u2a7d\pi /3.$ Numerical studies have demonstrated reductions in the rms phase error of more than one and two orders of magnitude for vibration amplitudes of 0.1 and 0.01 rad, respectively, with a commonly used seven-frame algorithm. The influence of factors affecting the technique’s performance—in particular, miscalibration of the phase-shifting device, nonlinearity of the photodetector, and finite integration time—is also investigated.

© 1998 Optical Society of America

Full Article | PDF Article**OSA Recommended Articles**

Leslie L. Deck

Appl. Opt. **48**(20) 3948-3960 (2009)

Pablo D. Ruiz, Jonathan M. Huntley, Yuji Shen, C. Russell Coggrave, and Guillermo H. Kaufmann

Appl. Opt. **40**(13) 2117-2125 (2001)

Peter J. de Groot

J. Opt. Soc. Am. A **12**(2) 354-365 (1995)