## Abstract

A method of postprocessing the data from a phase-shifting interferometer is proposed that reduces the influence of vibration or other environmental disturbances occurring during the data-acquisition time. The method is based on spectral analysis of the time-varying intensity data from each of the camera pixels. A correction term is obtained at a frequency three times that of the phase-shifting device. No additional hardware is required, although the phase-shifting algorithm used must have phase steps of $\u2a7d\pi /3.$ Numerical studies have demonstrated reductions in the rms phase error of more than one and two orders of magnitude for vibration amplitudes of 0.1 and 0.01 rad, respectively, with a commonly used seven-frame algorithm. The influence of factors affecting the technique’s performance—in particular, miscalibration of the phase-shifting device, nonlinearity of the photodetector, and finite integration time—is also investigated.

© 1998 Optical Society of America

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