Table 1
Monte Carlo Results and Cramér–Rao Lower Bounds for the Initial PSI Configuration with Cone Incident at 0° Tilt
| Cramér–Rao Lower Bounds | Monte Carlo Results |
---|
| 0.47 | 0.4917 ± 0.00086 |
|
|
± 0.00261 |
(nm) | 0.0 |
± 0.02641 |
| 0.1068 | 0.1222 ± 0.00141 |
| 0.3495 | 0.3690 ± 0.00242 |
(nm) | 3.7434 | 3.7345 ± 0.01873 |
Table 2
Monte Carlo Results and Cramér–Rao Lower Bounds for the Modified PSI Configuration with Cone Incident at 0° Tilt with
| Cramér–Rao Lower Bounds | Monte Carlo Results
|
---|
| 0.47 | 0.5030 ± 0.00114
|
|
|
± 0.00325 |
(nm) | 0.0 |
± 0.03186 |
| 0.1285 | 0.1606 ± 0.00395 |
| 0.4224 | 0.4596 ± 0.00351 |
(nm) | 4.5179 | 4.507 ± 0.02241 |
Table 3
Monte Carlo Results and Cramér–Rao Lower Bounds for the Modified PSI Configuration with Cone Incident at 0° Tilt with
| Cramér–Rao Lower Bounds | Monte Carlo Results
|
---|
| 0.47 | 0.4761 ± 0.00043
|
|
|
± 0.00136 |
(nm) | 0.0 |
± 0.01444 |
| 0.0587 | 0.0607 ± 0.00036 |
| 0.1897 | 0.1922 ± 0.00103 |
(nm) | 2.0453 | 2.0420 ± 0.01016 |
Table 4
Monte Carlo Results and Cramér–Rao Lower Bounds for the Modified PSI Configuration with Cone Incident at 0° Tilt
| Cramér–Rao Lower Bounds | Monte Carlo Results |
---|
| 0.47 | 2.1373 ± 0.02906 |
|
|
± 0.02785 |
(nm) | 0.0 |
± 0.18075 |
| 0.7591 | 4.1092 ± 0.04436 |
| 2.5074 | 3.9380 ± 0.02657 |
(nm) | 26.762 | 25.561 ± 0.12057 |
Table 5
Monte Carlo Results and Cramér–Rao Lower Bounds for the Modified PSI Configuration with Cone Incident at 0° Tilt with
| Cramér–Rao Lower Bounds | Monte Carlo Results |
---|
| 0.47 | 1.3626 ± 0.02050 |
|
|
± 0.01635 |
(nm) | 0.0 |
± 0.09759 |
| 0.3967 | 2.8995 ± 0.04807 |
| 1.3104 | 2.3117 ± 0.02668 |
(nm) | 13.988 | 13.801 ± 0.06794 |
Table 6
Monte Carlo (MC) Results and Cramér–Rao (CR) Lower Bounds for the Modified PSI Configuration Incorporating Tilt and the System
Design |
|
|
(nm) |
|
|
(nm) |
---|
0° tilt |
CR lower bounds | 0.47 |
| 0.0 | 0.1068 | 0.3495 | 3.7434 |
MC results |
|
|
|
|
|
|
|
15° tilt |
CR lower bounds | 0.47 |
| 0.0 | 0.0683 | 0.2173 | 2.3457 |
MC Results |
|
|
|
|
|
|
|
30° tilt |
CR lower bounds | 0.47 |
| 0.0 | 0.0353 | 0.1019 | 1.1373 |
MC results |
|
|
|
|
|
|
|
45° tilt |
CR lower bounds | 0.47 |
| 0.0 | 0.0221 | 0.0559 | 0.6672 |
MC results |
|
|
|
|
|
|
|
60° tilt |
CR lower bounds | 0.47 |
| 0.0 | 0.0143 | 0.0422 | 0.4823 |
MC results |
|
|
|
|
|
|
Table 7
Monte Carlo (MC) Results and Cramér–Rao (CR) Lower Bounds for the
and Systems at 45° Tilt
Design |
|
|
(nm) |
|
|
(nm) |
---|
45° tilt |
CR lower bounds | 0.47 |
| 0.0 | 0.0221 | 0.0559 | 0.6672 |
MC results |
|
|
|
|
|
|
|
45° tilt |
CR lower bounds | 0.47 |
| 0.0 | 0.0220 | 0.0626 | 0.7279 |
MC results |
|
|
|
|
|
|
|
45° tilt |
CR lower bounds | 0.47 |
| 0.0 | 0.0221 | 0.0638 | 0.7379 |
MC results |
|
|
|
|
|
|
|
45° tilt |
CR lower bounds | 0.47 |
| 0.0 | 0.0221 | 0.0641 | 0.7406 |
MC results |
|
|
|
|
|
|