Abstract

We present a differential theory to describe the optical response of multilayer bigrating structures. The formalism is based on an extension of the coordinate transformation method used by Chandezon et al. [ J. Opt. Soc. Am. A 72, 839 ( 1982)] and is a rigorous differential theory capable of modeling highly modulated multilayer bigratings. The method is used to model experimental reflectivity data taken from bigratings and shows good agreement.

© 1996 Optical Society of America

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