Abstract

A general mathematical formulation for solving the ellipsometric equation of a substrate covered by an arbitrary number of transparent or absorbing layers is presented. For single-wavelength and single-angle-of-incidence ellipsometry, from a single measurement (Δ, Ψ), the procedure allows the finding of any two-parameter combination, provided that one of the unknowns is a thickness.

© 1995 Optical Society of America

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