Abstract

In rotating-analyzer ellipsometry, an improved measurement method that does not need the accurate adjustment of the optical components before measurement is described. By carrying out the measurements at two 90°-different azimuths of the polarizer, we can determine the orientation of the optical components to the plane of incidence and the ellipsometric parameters of the specimen at the same time. The method is also applicable to a new adjustment procedure that is simpler and more convenient than the usual methods. The versatility of this improved measurement method has been confirmed experimentally.

© 1984 Optical Society of America

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