Efficient finite-element, Green’s function approach for critical-dimension metrology of three-dimensional gratings on multilayer films

Abstract

We present an efficient method for calculating the reflectivity of three-dimensional gratings on multilayer films based on a finite-element, Green’s function approach. Our method scales as $N\log N$, where N is the number of plane waves used in the expansion. Therefore, it is much more efficient than the commonly adopted rigorous-coupled-wave analysis (RCWA), which scales as $N^3$. We demonstrate the effectiveness of this method by applying it to a two-dimensional periodic array of contact holes on a multilayer film. We find that our Green’s function approach is about one order of magnitude faster than the RCWA approach when applied to typical contact holes considered in industry. For most cases, this method is efficient enough for application as a real-time, critical-dimension metrology tool.

© 2006 Optical Society of America

Hybrid finite-element/rigorous coupled wave analysis for scattering from three-dimensional doubly periodic structures

Mustafa Kuloglu and Robert Lee
J. Opt. Soc. Am. A 29(7) 1399-1406 (2012)

Study on spontaneous emission in complex multilayered plasmonic system via surface integral equation approach with layered medium Green’s function

Yongpin P. Chen, Wei E. I. Sha, Wallace C. H. Choy, Lijun Jiang, and Weng Cho Chew
Opt. Express 20(18) 20210-20221 (2012)

Analytical modeling and three-dimensional finite element simulation of line edge roughness in scatterometry

Akiko Kato, Sven Burger, and Frank Scholze
Appl. Opt. 51(27) 6457-6464 (2012)

Grating design for interlayer optical interconnection of in-plane waveguides

Congshan Wan, Thomas K. Gaylord, and Muhannad S. Bakir
Appl. Opt. 55(10) 2601-2610 (2016)

Fast convergence with spectral volume integral equation for crossed block-shaped gratings with improved material interface conditions

Martijn C. van Beurden
J. Opt. Soc. Am. A 28(11) 2269-2278 (2011)