Abstract
Ellipsometry is often used to determine the refractive index and/or the thickness of a polymer layer on a substrate. However, simultaneous determination of these parameters from a single-wavelength single-angle measurement is not always possible. The present study determines the sensitivity of the method to errors of measurement for the case of phase modulated ellipsometry and identifies conditions for decoupling film thickness and refractive index. For a specific range of film thickness, both the thickness and the refractive index can be determined from a single measurement with high precision. This optimal range of the film thickness is determined for organic thin films, and the analysis is tested on hydrogel-like polymer films in air and in water.
© 2006 Optical Society of America
Full Article | PDF ArticleMore Like This
Peter Nestler and Christiane A. Helm
Opt. Express 25(22) 27077-27085 (2017)
Jau Hwang Ho, Chung Len Lee, Tan Fu Lei, and Tien Sheng Chao
J. Opt. Soc. Am. A 7(2) 196-205 (1990)
K. Vedam, R. Rai, F. Lukes, and R. Srinivasan
J. Opt. Soc. Am. 58(4) 526-532 (1968)