Abstract

The coordinate transformation method (C method) with adaptive spatial resolution and the Fourier modal method (FMM) are compared in the case of conducting discontinuous multilevel gratings in TM polarization. A procedure permitting analysis of such gratings more efficiently with the C method than with the FMM is presented. The C method is observed to converge more rapidly than the FMM, whose instabilities are shown to harm the convergence in the aforementioned case.

© 2002 Optical Society of America

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