We describe a new structure of guided-mode resonant grating (GMRG) filters with low sideband reflectance. This GMRG filter consists of a high-index thin film on an antireflective structured surface called “moth-eye structure.” Since the high-index film undulates along the surface structure, the film acts as a modulated optical waveguide. An incident light wave satisfying a resonant condition is reflected by the GMRG filter, and nonresonant light waves pass through the filter. This GMRG filter is valid for reducing reflection of nonresonant light waves in a wide spectral range. The resonant reflection of this new filter was investigated by numerical calculation based on an electromagnetic grating analysis. In the case of a triangular antireflective surface structure whose thickness is 2× greater than its period, the sideband reflectance for nonresonant light waves was lower than 0.5% for TM-polarized light in a wide range of wavelengths.
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