Abstract
A method of postprocessing the data from a phase-shifting interferometer is proposed that reduces the influence of vibration or other environmental disturbances occurring during the data-acquisition time. The method is based on spectral analysis of the time-varying intensity data from each of the camera pixels. A correction term is obtained at a frequency three times that of the phase-shifting device. No additional hardware is required, although the phase-shifting algorithm used must have phase steps of Numerical studies have demonstrated reductions in the rms phase error of more than one and two orders of magnitude for vibration amplitudes of 0.1 and 0.01 rad, respectively, with a commonly used seven-frame algorithm. The influence of factors affecting the technique’s performance—in particular, miscalibration of the phase-shifting device, nonlinearity of the photodetector, and finite integration time—is also investigated.
© 1998 Optical Society of America
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