Abstract

We present measurements of the far-field scattered intensity for gratings consisting of uniform, regularly spaced, wavelength-scale grooves that have randomly fluctuating depths. The complete polarization dependence of the scattering is determined, and particular attention is given to measurements that isolate multiple scattering. For both perturbed and unperturbed gratings, effects similar to backscattering enhancement seen for randomly rough surfaces are observed, and these effects are linked to the coherent interference of reciprocal pairs of waves multiply scattered within the grooves.

© 1994 Optical Society of America

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