This paper describes an experimental study of the diffraction properties of high-spatial-frequency gratings recorded in relatively thin photoresist layers. Angular selectivity, wavelength selectivity, and peak efficiencies are investigated. Details on grating fabrication are given. The study shows that optical elements with efficiencies greater than 88% can be recorded in media less than one wavelength thick (~0.5 µm for our visible-light experiments). The results are important in that such diffractive structures could be replicated by embossing, chemical-vapor deposition, or other means.
© 1983 Optical Society of AmericaPDF Article