Abstract

The equations governing ellipsometry measurements made with a photoelastic modulator are presented in a simple but general form. These equations are used to study the propagation of both systematic and random errors, and an assessment of the accuracy of the ellipsometer is made. A basis is provided for choosing among various ellipsometer configurations, measurement procedures, and methods of data analysis. Several new insights into the performance of this type of ellipsometer are supplied.

© 1983 Optical Society of America

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Equations (31)

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