Abstract

The equation of state of a flexible piezoelectric mirror of rectangular cross section has been solved for arbitrary electrode voltages V(x, y) at a point x, y on the mirror. The corresponding displacement W(x, y) has been plotted in three dimensions for four forms of the voltage distribution. These surfaces give the actual shape of the distorted mirror. Contours of equal displacement W(x, y) = constant have also been plotted. It is found that these contours reproduce quite well the interferograms measured by Steinhaus and Lipson [ J. Opt. Soc. Am. 69, 478 ( 1979)] for comparable forms of the voltage distribution. The dynamic problem for a time-dependent voltage V(x, y; t) has also been solved. At certain frequencies resonant behavior is exhibited.

© 1983 Optical Society of America

Bimorph piezoelectric flexible mirror

Ehud Steinhaus and S. G. Lipson
J. Opt. Soc. Am. 69(3) 478-481 (1979)

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