Abstract

General formulas for optical reflectance, transmittance, and ellipsometry for an inhomogeneous thin layer on a thick transparent substrate are derived. In the formulas, substrate interference effects that negatively affect information concerning the optical properties of the thin layer are removed. These formulas have already been applied in the analysis of infrared transmittance of a heavily doped semiconductor.

© 1981 Optical Society of America

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Equations (20)

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