Abstract

Corrections for component optical activity in rotating-analyzer ellipsometers are extended to include the relative reflectivities R_R used in three-parameter (3P) ellipsometry. Both the polarizer-compensator-surface-analyzer (PCSA) and polarizer-surface-analyzer (PSA) configurations are discussed. Errors in R_R of the order of 0.1% to 1.0% are predicted when optical activity corrections are neglected.

© 1981 Optical Society of America

Errors in “Effects of component optical activity in data reduction and calibration of rotating-analyzer ellipsometers”

D. M. Radman and B. D. Cahan
J. Opt. Soc. Am. 71(12) 1546-1546 (1981)

Effects of component optical activity in data reduction and calibration of rotating-analyzer ellipsometers

D. E. Aspnes
J. Opt. Soc. Am. 64(6) 812-819 (1974)

Ellipsometry with Imperfect Components Including Incoherent Effects*

R. M. A. Azzam and N. M. Bashara
J. Opt. Soc. Am. 61(10) 1380-1391 (1971)

Modulated generalized ellipsometry

R. M. A. Azzam
J. Opt. Soc. Am. 66(6) 520-524 (1976)

Unified Analysis of Ellipsometry Errors Due to Imperfect Components, Cell-Window Birefringence, and Incorrect Azimuth Angles*

R. M. A. Azzam and N. M. Bashara
J. Opt. Soc. Am. 61(5) 600-607 (1971)