Abstract

Angles of incidence for <i>s</i>- and <i>p</i>-polarized light have been computed and confirmed experimentally for which monochromatic interference in transparent thin films on absorbing substrates results in optimum interference fringe contrast (visibility = 1). Under these angles of incidence and with polarized light, film thickness determinations which are not possible at normal incidence or with unpolarized light can be carried out by use of thin-film interference.

© 1980 Optical Society of America

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  1. R. H. Muller, "Thickness measurement of transparent thin films on metal surfaces by light interference," J. Opt. Soc. Am. 54, 419–420 (1964).
  2. A. Vasicek, Optics of Thin Films (North-Holland, Amsterdam, 1960), p. 312.
  3. R. H. Muller, "Definitions and conventions in ellipsometry," Surf. Sci. 16, 14–33 (1969).
  4. W. Koenig, "Elektromagnetische Lichttheorie," in Handbuch der Physik, edited by H. Geiger and K. Scheel (Springer, Berlin, 1928), Vol. XX, p. 242.
  5. R. H. Muller, "Principles of Ellipsometry," in Optical Techniques in Electrochemistry, edited by R. H. Muller, Vol. 9 of Advances in Electrochemistry and Electrochemical Engineering, edited by P. Delahay and C. W. Tobias (Wiley-Interscience, New York, 1973), p. 179.

1973 (1)

R. H. Muller, "Principles of Ellipsometry," in Optical Techniques in Electrochemistry, edited by R. H. Muller, Vol. 9 of Advances in Electrochemistry and Electrochemical Engineering, edited by P. Delahay and C. W. Tobias (Wiley-Interscience, New York, 1973), p. 179.

1969 (1)

R. H. Muller, "Definitions and conventions in ellipsometry," Surf. Sci. 16, 14–33 (1969).

1964 (1)

1928 (1)

W. Koenig, "Elektromagnetische Lichttheorie," in Handbuch der Physik, edited by H. Geiger and K. Scheel (Springer, Berlin, 1928), Vol. XX, p. 242.

Koenig, W.

W. Koenig, "Elektromagnetische Lichttheorie," in Handbuch der Physik, edited by H. Geiger and K. Scheel (Springer, Berlin, 1928), Vol. XX, p. 242.

Muller, R. H.

R. H. Muller, "Principles of Ellipsometry," in Optical Techniques in Electrochemistry, edited by R. H. Muller, Vol. 9 of Advances in Electrochemistry and Electrochemical Engineering, edited by P. Delahay and C. W. Tobias (Wiley-Interscience, New York, 1973), p. 179.

R. H. Muller, "Definitions and conventions in ellipsometry," Surf. Sci. 16, 14–33 (1969).

R. H. Muller, "Thickness measurement of transparent thin films on metal surfaces by light interference," J. Opt. Soc. Am. 54, 419–420 (1964).

Vasicek, A.

A. Vasicek, Optics of Thin Films (North-Holland, Amsterdam, 1960), p. 312.

J. Opt. Soc. Am. (1)

Surf. Sci. (1)

R. H. Muller, "Definitions and conventions in ellipsometry," Surf. Sci. 16, 14–33 (1969).

Other (3)

W. Koenig, "Elektromagnetische Lichttheorie," in Handbuch der Physik, edited by H. Geiger and K. Scheel (Springer, Berlin, 1928), Vol. XX, p. 242.

R. H. Muller, "Principles of Ellipsometry," in Optical Techniques in Electrochemistry, edited by R. H. Muller, Vol. 9 of Advances in Electrochemistry and Electrochemical Engineering, edited by P. Delahay and C. W. Tobias (Wiley-Interscience, New York, 1973), p. 179.

A. Vasicek, Optics of Thin Films (North-Holland, Amsterdam, 1960), p. 312.

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