Abstract

First-order perturbation theory is used to evaluate diffuse scattering and grating diffraction from surfaces covered with dielectric multilayers. The scattering is caused by the grating profile or micro-roughness present at the multilayer interfaces. Particular emphasis is given to anomalous scattering effects which occur at so-called polarizing angles that are associated with the multilayer structures. Several numerical examples are given.

© 1979 Optical Society of America

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