Abstract

We report a study of the feasibility of dielectric function measurements on ion-implanted metallic systems as a possible means to characterize such systems. Ellipsometric measurements were performed from 1.8 to 5.5 eV on Au films implanted with Cl, Ar, K, and Li impurities. The results demonstrate that measurable changes in ε(ω) do occur and indicate that effects arising from both radiation damage and the chemical nature of the impurity are present.

© 1977 Optical Society of America

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  1. See, for example, F. Wooten, Optical Properties of Solids (Academic, New York, 1972).
  2. R. A. Tilton, D. J. Phelps, and C. P. Flynn, Phys. Rev. Lett. 32, 1006 (1974).
  3. S. T. Picraux, in Applications of Ion Beams to Materials 1975, edited by G. Carter, J. S. Colligon, and W. A. Grant, Conference Ser. No. 28 (The Institute of Physics, London, 1976), p. 183.
  4. C. A. Fenstermacher and F. L. McCracken, Surf. Sci. 16, 85 (1969); R. M. A. Azzam and N. M. Bashara, Phys. Rev. B 5, 4721 (1972); I. Ohlidal, F. Lukes, and K. Navratil, Surf. Sci. 45, 91 (1974); E. C. Chan and J. P. Marton, J. Appl. Phys. 45, 5004 (1974).
  5. J. B. Schroeder and H. D. Dieselman, J. Appl. Phys. 40, 2559 (1969).
  6. A. R. Bayly and P. D. Townsend, J. Phys. D 6, 1115 (1973).
  7. M. M. Ibrahim and N. M. Bashara, Surf. Sci. 30, 632 (1972).
  8. J. R. Adams and N. M. Bashara, Surf. Sci. 49, 441 (1975).
  9. (a) P. Winsemius, H. P. Lengkeek, and F. F. van Kampen, Physica (Utr.) 79B, 529 (1975); (b) G. B. Irani, T. Huen and F. Wooten, Phys. Rev. B 6, 2904 (1972); (c) M. L. Thèye, ibid. 2, 3060 (1970); (d) and C. G. Olson, M. Piacentini, and D. W. Lynch, Phys. Rev. Lett. 33, 644 (1974).
  10. K. Rödelsperger and A. Scharmann, Nucl. Instrum. Meth. 132, 355 (1976); G. Carter and J. S. Colligon, Ion Bombardment of Solids (American Elsevier, New York, 1968), p. 310ff.
  11. H. E. Schiott, in Ion Implantation, edited by F. H. Eisen and L. T. Chadderton (Gordon and Breach, London, 1971), p. 197.
  12. R. P. Elliott, Constitution of Binary Alloys, First Suppl. (McGraw-Hill, New York, 1965), p. 92.
  13. D. E. Aspnes and A. A. Studna, Appl. Opt. 14, 220 (1975); D. E. Aspnes, in Optical Properties of Solids: New Developments, edited by B. O. Seraphin (North-Holland, Amsterdam, 1976), p. 800 and references therein.
  14. R. E. Hummel and J. B. Andrews, Phys. Rev. B 8, 2449 (1973).

Adams, J. R.

J. R. Adams and N. M. Bashara, Surf. Sci. 49, 441 (1975).

Andrews, J. B.

R. E. Hummel and J. B. Andrews, Phys. Rev. B 8, 2449 (1973).

Aspnes, D. E.

D. E. Aspnes and A. A. Studna, Appl. Opt. 14, 220 (1975); D. E. Aspnes, in Optical Properties of Solids: New Developments, edited by B. O. Seraphin (North-Holland, Amsterdam, 1976), p. 800 and references therein.

Bashara, N. M.

J. R. Adams and N. M. Bashara, Surf. Sci. 49, 441 (1975).

M. M. Ibrahim and N. M. Bashara, Surf. Sci. 30, 632 (1972).

Bayly, A. R.

A. R. Bayly and P. D. Townsend, J. Phys. D 6, 1115 (1973).

Dieselman, H. D.

J. B. Schroeder and H. D. Dieselman, J. Appl. Phys. 40, 2559 (1969).

Elliott, R. P.

R. P. Elliott, Constitution of Binary Alloys, First Suppl. (McGraw-Hill, New York, 1965), p. 92.

Fenstermacher, C. A.

C. A. Fenstermacher and F. L. McCracken, Surf. Sci. 16, 85 (1969); R. M. A. Azzam and N. M. Bashara, Phys. Rev. B 5, 4721 (1972); I. Ohlidal, F. Lukes, and K. Navratil, Surf. Sci. 45, 91 (1974); E. C. Chan and J. P. Marton, J. Appl. Phys. 45, 5004 (1974).

Flynn, C. P.

R. A. Tilton, D. J. Phelps, and C. P. Flynn, Phys. Rev. Lett. 32, 1006 (1974).

Hummel, R. E.

R. E. Hummel and J. B. Andrews, Phys. Rev. B 8, 2449 (1973).

Ibrahim, M. M.

M. M. Ibrahim and N. M. Bashara, Surf. Sci. 30, 632 (1972).

Kampen, F. F. van

(a) P. Winsemius, H. P. Lengkeek, and F. F. van Kampen, Physica (Utr.) 79B, 529 (1975); (b) G. B. Irani, T. Huen and F. Wooten, Phys. Rev. B 6, 2904 (1972); (c) M. L. Thèye, ibid. 2, 3060 (1970); (d) and C. G. Olson, M. Piacentini, and D. W. Lynch, Phys. Rev. Lett. 33, 644 (1974).

Lengkeek, H. P.

(a) P. Winsemius, H. P. Lengkeek, and F. F. van Kampen, Physica (Utr.) 79B, 529 (1975); (b) G. B. Irani, T. Huen and F. Wooten, Phys. Rev. B 6, 2904 (1972); (c) M. L. Thèye, ibid. 2, 3060 (1970); (d) and C. G. Olson, M. Piacentini, and D. W. Lynch, Phys. Rev. Lett. 33, 644 (1974).

McCracken, F. L.

C. A. Fenstermacher and F. L. McCracken, Surf. Sci. 16, 85 (1969); R. M. A. Azzam and N. M. Bashara, Phys. Rev. B 5, 4721 (1972); I. Ohlidal, F. Lukes, and K. Navratil, Surf. Sci. 45, 91 (1974); E. C. Chan and J. P. Marton, J. Appl. Phys. 45, 5004 (1974).

Phelps, D. J.

R. A. Tilton, D. J. Phelps, and C. P. Flynn, Phys. Rev. Lett. 32, 1006 (1974).

Picraux, S. T.

S. T. Picraux, in Applications of Ion Beams to Materials 1975, edited by G. Carter, J. S. Colligon, and W. A. Grant, Conference Ser. No. 28 (The Institute of Physics, London, 1976), p. 183.

Rödelsperger, K.

K. Rödelsperger and A. Scharmann, Nucl. Instrum. Meth. 132, 355 (1976); G. Carter and J. S. Colligon, Ion Bombardment of Solids (American Elsevier, New York, 1968), p. 310ff.

Scharmann, A.

K. Rödelsperger and A. Scharmann, Nucl. Instrum. Meth. 132, 355 (1976); G. Carter and J. S. Colligon, Ion Bombardment of Solids (American Elsevier, New York, 1968), p. 310ff.

Schiott, H. E.

H. E. Schiott, in Ion Implantation, edited by F. H. Eisen and L. T. Chadderton (Gordon and Breach, London, 1971), p. 197.

Schroeder, J. B.

J. B. Schroeder and H. D. Dieselman, J. Appl. Phys. 40, 2559 (1969).

Studna, A. A.

D. E. Aspnes and A. A. Studna, Appl. Opt. 14, 220 (1975); D. E. Aspnes, in Optical Properties of Solids: New Developments, edited by B. O. Seraphin (North-Holland, Amsterdam, 1976), p. 800 and references therein.

Tilton, R. A.

R. A. Tilton, D. J. Phelps, and C. P. Flynn, Phys. Rev. Lett. 32, 1006 (1974).

Townsend, P. D.

A. R. Bayly and P. D. Townsend, J. Phys. D 6, 1115 (1973).

Winsemius, P.

(a) P. Winsemius, H. P. Lengkeek, and F. F. van Kampen, Physica (Utr.) 79B, 529 (1975); (b) G. B. Irani, T. Huen and F. Wooten, Phys. Rev. B 6, 2904 (1972); (c) M. L. Thèye, ibid. 2, 3060 (1970); (d) and C. G. Olson, M. Piacentini, and D. W. Lynch, Phys. Rev. Lett. 33, 644 (1974).

Wooten, F.

See, for example, F. Wooten, Optical Properties of Solids (Academic, New York, 1972).

Other (14)

See, for example, F. Wooten, Optical Properties of Solids (Academic, New York, 1972).

R. A. Tilton, D. J. Phelps, and C. P. Flynn, Phys. Rev. Lett. 32, 1006 (1974).

S. T. Picraux, in Applications of Ion Beams to Materials 1975, edited by G. Carter, J. S. Colligon, and W. A. Grant, Conference Ser. No. 28 (The Institute of Physics, London, 1976), p. 183.

C. A. Fenstermacher and F. L. McCracken, Surf. Sci. 16, 85 (1969); R. M. A. Azzam and N. M. Bashara, Phys. Rev. B 5, 4721 (1972); I. Ohlidal, F. Lukes, and K. Navratil, Surf. Sci. 45, 91 (1974); E. C. Chan and J. P. Marton, J. Appl. Phys. 45, 5004 (1974).

J. B. Schroeder and H. D. Dieselman, J. Appl. Phys. 40, 2559 (1969).

A. R. Bayly and P. D. Townsend, J. Phys. D 6, 1115 (1973).

M. M. Ibrahim and N. M. Bashara, Surf. Sci. 30, 632 (1972).

J. R. Adams and N. M. Bashara, Surf. Sci. 49, 441 (1975).

(a) P. Winsemius, H. P. Lengkeek, and F. F. van Kampen, Physica (Utr.) 79B, 529 (1975); (b) G. B. Irani, T. Huen and F. Wooten, Phys. Rev. B 6, 2904 (1972); (c) M. L. Thèye, ibid. 2, 3060 (1970); (d) and C. G. Olson, M. Piacentini, and D. W. Lynch, Phys. Rev. Lett. 33, 644 (1974).

K. Rödelsperger and A. Scharmann, Nucl. Instrum. Meth. 132, 355 (1976); G. Carter and J. S. Colligon, Ion Bombardment of Solids (American Elsevier, New York, 1968), p. 310ff.

H. E. Schiott, in Ion Implantation, edited by F. H. Eisen and L. T. Chadderton (Gordon and Breach, London, 1971), p. 197.

R. P. Elliott, Constitution of Binary Alloys, First Suppl. (McGraw-Hill, New York, 1965), p. 92.

D. E. Aspnes and A. A. Studna, Appl. Opt. 14, 220 (1975); D. E. Aspnes, in Optical Properties of Solids: New Developments, edited by B. O. Seraphin (North-Holland, Amsterdam, 1976), p. 800 and references therein.

R. E. Hummel and J. B. Andrews, Phys. Rev. B 8, 2449 (1973).

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