TABLE I
The internal reflectance (Rc) calculated from the measured optical constants compared to the internal reflectance (Rm) measured as a function of angle of incidence. The points of inversion were (T)0°, (R⊥)45°, and (R∥)45°. The optical constants for the calculated reflectance were n1 = 1. 517, n2 = 4.72, k2 = 1.86, h = 28.85nm, n3 = 1.0, and λ = 550 nm.
Angle (deg) | Parallel polarization | Perpendicular polarization |
---|
Rc | Rm | Rc | Rm |
---|
26 | 0.426 | 0.424 | 0.530 | 0.530 |
30 | not measureable | 0.545 | 0.540 |
35 | not measurable | 0.569 | 0.571 |
45 | 0.556 | 0.556 | 0.612 | 0.612 |
50 | 0.481 | 0.479 | 0.627 | 0.624 |
55 | 0.418 | 0.414 | 0.650 | 0.647 |
60 | 0.353 | 0.349 | 0.679 | 0.678 |
65 | 0.283 | 0.280 | 0.716 | 0.713 |
TABLE II
The internal reflectance (Rc) calculated from the measured optical constants compared to the reflectance (Rm) measured as a function of angle of incidence. The optical constants for the calculated reflectance were n1 = 1. 523, n2 = 1. 40, k2 = 1.82, h = 37. 03 nm, n3 = 1.0, and λ = 460 nm.
Angle (deg) | Parallel polarization | Perpendicular polarization |
---|
Rc | Rm | Rc | Rm |
---|
26 | 0.197 | 0.201 | 0.239 | 0.247 |
30 | not measurable | 0.247 | 0.256 |
35 | not measurable | 0.256 | 0.263 |
45 | not measurable | 0.308 | 0.308 |
50 | 0.075 | 0.111 | 0.365 | 0.361 |
55 | 0.036 | 0.049 | 0.424 | 0.424 |
60 | 0.040 | 0.037 | 0.484 | 0.479 |
65 | 0.069 | 0.055 | 0.552 | 0.548 |
TABLE III
A comparison of two different methods for calculating the thickness of a thin film. The method using water as the third phase was done with three internal-reflection measurements, (R⊥)45°, (R⊥)70°, (R∥)70°. The method using air as the third phase was done with a transmittance measurement, (T)0°, and two internal-reflectance measurements, (R⊥)45°, (R⊥)45°.
(a) Gold film with a resistance of 5. 8 Ω/square |
| Wavelength (nm) |
| 400 | 450 | 460 | 480 | 500 |
Thickness (nm) determined with |
Third phase water | 14.63 | 14.61 | 14.55 | 14.52 | 14.33 |
Third phase air | 14.55 | 14.55 | 14.71 | 14.50 | 14.43 |
(b) Gold film with a resistance of 15. 7 Ω/square |
| Wavelength (nm) |
| 400 | 450 | 480 | 500 |
Thickness (nm) determined with |
Third phase water | 8.15 | 8.29 | 8.20 | 8.19 |
Third phase air | 8.05 | 8.41 | 8.18 | 8.36 |
(c) Tin oxide film with a resistance of 68 Ω/square |
| Wavelength (nm) |
| 400 | 500 | 600 | 750 |
Thickness (μm) determined with |
Third phase water | 1.038 | 1.023 | 1.057 | 1.058 |
Third phase air | 1.050 | 1.023 | 1.049 | 1.074 |
TABLE IV
The optical constants of a discontinuous gold film determined with water and air as the third phase.
Wavelength (nm) | 400 | 450 | 480 | 500 |
---|
(a) Water third phase | | | | |
n | 1.76 | 1.68 | 1.50 | 1.32 |
k | 1.57 | 1.59 | 1.60 | 1.74 |
h(nm) | 6.93 | 6.98 | 6.92 | 6.83 |
(b) Air third phase | | | | |
n | 2.12 | 2.07 | 1.83 | 1.69 |
k | 1.63 | 1.76 | 1.73 | 1.83 |
h(nm) | 4.96 | 4.59 | 4.93 | 5.04 |
TABLE V
The complex index of refraction for a 28. 9-nm-thick Ge film as determined by perpendicular/parallel-polarization measurements.
Wavelength (nm) | n (⊥/∥) | Relative difference in n (%) | n (⊥/∥) | Relative difference in k(%) |
---|
450 | 4.38/4.41 | 0.7 | 2.45/2.48 | 1.2 |
500 | 4.56/4.58 | 0.4 | 2.14/2.14 | 0.0 |
530 | 4.67/4.70 | 0.6 | 1.98/1.97 | 0.5 |
550 | 4.72/4.27 | 0.0 | 1.86/1.86 | 0.0 |
570 | 4.77/4.75 | 0.4 | 1.75/1.77 | 1.1 |
600 | 4.83/4.81 | 0.4 | 1.58/1.58 | 0.0 |
650 | 4.89/4.84 | 1.0 | 1.36/1.34 | 1. 5 |
TABLE VI
The complex index of refraction for a 36.5-nm-thick Au film as determined by perpendicular/parallel-polarization measurements.
Wavelength (nm) | n n (⊥/∥) | Relative difference in n(%) | k (⊥/∥) | Relative difference in k (%) |
---|
400 | 1.57/1.73 | 10.2 | 1.96/1.97 | 0.5 |
440 | 1.50/1.63 | 8.7 | 1.91/1.94 | 1.6 |
460 | 1.40/1.51 | 7.9 | 1.82/1.84 | 1.1 |
480 | 1.22/1.31 | 7.4 | 1.74/1.74 | 0.0 |
550 | 0.351/0.379 | 8.0 | 2.50/2.46 | 1.6 |
600 | 0.221/0.210 | 5.0 | 3.12/3.00 | 4.0 |
650 | 0.144/no convergence | | 3. 66/no convergence | |