Abstract

A previously presented method of measuring simultaneously both the complex refractive index and thickness of a thin film is shown to work successfully on a variety of thin films. The reliability of the optical constants is shown both by comparing their repeatability with several different methods and by comparison of the calculated and measured reflectance from the film as a function of angle of incidence. The computer-inversion method is used to show that a thin inhomogeneous film can usually be approximated by one homogeneous film. A method of determining the anisotropy of a thin film is presented that compares the complex index determined from perpendicular polarization measurements to that determined from parallel polarization measurements.

© 1977 Optical Society of America

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References

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  1. Handbook of Thin Film Technology, edited by L. I. Maissel and R. Glang (McGraw-Hill, New York, 1970).
  2. H. E. Bennett and J. M. Bennett, in Physics of Thin Films, edited by Georg Hass and Rudolf E. Thun (Academic, New York, 1967), Vol. 4, pp. 1–96.
  3. O. S. Heavens, in Physics of Thin Films, edited by Georg Hass and Rudolf E. Thun (Academic, New York, 1964), Vol. 2, p. 193.
  4. J. M. Bennett, J. L. Stanford, and E. J. Ashley, J. Opt. Soc. Am. 60, 224 (1970).
  5. W. E. Hunter, J. Opt. Soc. Am. 55, 1197 (1965).
  6. P. Rouard and P. Bousquet, in Progress in Optics, edited by E. Wolf (North-Holland, Amsterdam, 1965), Vol. 5, pp. 161ff.
  7. W. N. Hansen, J. Opt. Soc. Am. 63, 793 (1973).
  8. W. J. Anderson and W. N. Hansen, Appl. Opt. 12, 1038 (1973).
  9. H. E. Bennett and J. O. Porteus, J. Opt. Soc. Am. 51, 123 (1961).
  10. P. B. Johnson and E. W. Christy, Phys. Rev. B 6, 4370 (1972).
  11. J. E. Davey and T. Pankey, J. Appl. Phys. 9, 359 (1965).
  12. E. David, Z. Phys. 114, 389 (1939).
  13. F. Abelès, in Physics of Thin Films, edited by Georg Hass and Rudolf E. Thun (Academic, New York, 1971), Vol. 6, pp. 170 ff.
  14. G. Rasigni and P. Rouard, J. Opt. Soc. Am. 53, 604 (1963).
  15. N. Emeric and A. Emeric, Thin Solid Films 1, 13 (1967).
  16. W. N. Hansen, J. Opt. Soc. Am. 58, 380 (1968).
  17. R. H. Doremus, J. Appl. Phys. 37, 2775 (1966).
  18. T. M. Donovan, W. E. Spicer, J. M. Bennett, and E. J. Ashley, Phys. Rev. B 2, 397 (1970).
  19. D. K. Burge and H. E. Bennett, J. Opt. Soc. Am. 54, 1428 (1964).
  20. T. Yamaguchi, S. Yoshida, and A. Kinbara, J. Opt. Soc. Am. 62, 634 (1972).
  21. P. Bousquet, Ann. Phys. (Paris) 2, 163 (1957).

Abelès, F.

F. Abelès, in Physics of Thin Films, edited by Georg Hass and Rudolf E. Thun (Academic, New York, 1971), Vol. 6, pp. 170 ff.

Anderson, W. J.

W. J. Anderson and W. N. Hansen, Appl. Opt. 12, 1038 (1973).

Ashley, E. J.

J. M. Bennett, J. L. Stanford, and E. J. Ashley, J. Opt. Soc. Am. 60, 224 (1970).

T. M. Donovan, W. E. Spicer, J. M. Bennett, and E. J. Ashley, Phys. Rev. B 2, 397 (1970).

Bennett, H. E.

D. K. Burge and H. E. Bennett, J. Opt. Soc. Am. 54, 1428 (1964).

H. E. Bennett and J. M. Bennett, in Physics of Thin Films, edited by Georg Hass and Rudolf E. Thun (Academic, New York, 1967), Vol. 4, pp. 1–96.

H. E. Bennett and J. O. Porteus, J. Opt. Soc. Am. 51, 123 (1961).

Bennett, J. M.

H. E. Bennett and J. M. Bennett, in Physics of Thin Films, edited by Georg Hass and Rudolf E. Thun (Academic, New York, 1967), Vol. 4, pp. 1–96.

J. M. Bennett, J. L. Stanford, and E. J. Ashley, J. Opt. Soc. Am. 60, 224 (1970).

T. M. Donovan, W. E. Spicer, J. M. Bennett, and E. J. Ashley, Phys. Rev. B 2, 397 (1970).

Bousquet, P.

P. Bousquet, Ann. Phys. (Paris) 2, 163 (1957).

P. Rouard and P. Bousquet, in Progress in Optics, edited by E. Wolf (North-Holland, Amsterdam, 1965), Vol. 5, pp. 161ff.

Burge, D. K.

D. K. Burge and H. E. Bennett, J. Opt. Soc. Am. 54, 1428 (1964).

Christy, E. W.

P. B. Johnson and E. W. Christy, Phys. Rev. B 6, 4370 (1972).

Davey, J. E.

J. E. Davey and T. Pankey, J. Appl. Phys. 9, 359 (1965).

David, E.

E. David, Z. Phys. 114, 389 (1939).

Donovan, T. M.

T. M. Donovan, W. E. Spicer, J. M. Bennett, and E. J. Ashley, Phys. Rev. B 2, 397 (1970).

Doremus, R. H.

R. H. Doremus, J. Appl. Phys. 37, 2775 (1966).

Emeric, A.

N. Emeric and A. Emeric, Thin Solid Films 1, 13 (1967).

Emeric, N.

N. Emeric and A. Emeric, Thin Solid Films 1, 13 (1967).

Hansen, W. N.

W. N. Hansen, J. Opt. Soc. Am. 58, 380 (1968).

W. J. Anderson and W. N. Hansen, Appl. Opt. 12, 1038 (1973).

W. N. Hansen, J. Opt. Soc. Am. 63, 793 (1973).

Heavens, O. S.

O. S. Heavens, in Physics of Thin Films, edited by Georg Hass and Rudolf E. Thun (Academic, New York, 1964), Vol. 2, p. 193.

Hunter, W. E.

W. E. Hunter, J. Opt. Soc. Am. 55, 1197 (1965).

Johnson, P. B.

P. B. Johnson and E. W. Christy, Phys. Rev. B 6, 4370 (1972).

Kinbara, A.

T. Yamaguchi, S. Yoshida, and A. Kinbara, J. Opt. Soc. Am. 62, 634 (1972).

Pankey, T.

J. E. Davey and T. Pankey, J. Appl. Phys. 9, 359 (1965).

Porteus, J. O.

H. E. Bennett and J. O. Porteus, J. Opt. Soc. Am. 51, 123 (1961).

Rasigni, G.

G. Rasigni and P. Rouard, J. Opt. Soc. Am. 53, 604 (1963).

Rouard, P.

G. Rasigni and P. Rouard, J. Opt. Soc. Am. 53, 604 (1963).

P. Rouard and P. Bousquet, in Progress in Optics, edited by E. Wolf (North-Holland, Amsterdam, 1965), Vol. 5, pp. 161ff.

Spicer, W. E.

T. M. Donovan, W. E. Spicer, J. M. Bennett, and E. J. Ashley, Phys. Rev. B 2, 397 (1970).

Stanford, J. L.

J. M. Bennett, J. L. Stanford, and E. J. Ashley, J. Opt. Soc. Am. 60, 224 (1970).

Yamaguchi, T.

T. Yamaguchi, S. Yoshida, and A. Kinbara, J. Opt. Soc. Am. 62, 634 (1972).

Yoshida, S.

T. Yamaguchi, S. Yoshida, and A. Kinbara, J. Opt. Soc. Am. 62, 634 (1972).

Other

Handbook of Thin Film Technology, edited by L. I. Maissel and R. Glang (McGraw-Hill, New York, 1970).

H. E. Bennett and J. M. Bennett, in Physics of Thin Films, edited by Georg Hass and Rudolf E. Thun (Academic, New York, 1967), Vol. 4, pp. 1–96.

O. S. Heavens, in Physics of Thin Films, edited by Georg Hass and Rudolf E. Thun (Academic, New York, 1964), Vol. 2, p. 193.

J. M. Bennett, J. L. Stanford, and E. J. Ashley, J. Opt. Soc. Am. 60, 224 (1970).

W. E. Hunter, J. Opt. Soc. Am. 55, 1197 (1965).

P. Rouard and P. Bousquet, in Progress in Optics, edited by E. Wolf (North-Holland, Amsterdam, 1965), Vol. 5, pp. 161ff.

W. N. Hansen, J. Opt. Soc. Am. 63, 793 (1973).

W. J. Anderson and W. N. Hansen, Appl. Opt. 12, 1038 (1973).

H. E. Bennett and J. O. Porteus, J. Opt. Soc. Am. 51, 123 (1961).

P. B. Johnson and E. W. Christy, Phys. Rev. B 6, 4370 (1972).

J. E. Davey and T. Pankey, J. Appl. Phys. 9, 359 (1965).

E. David, Z. Phys. 114, 389 (1939).

F. Abelès, in Physics of Thin Films, edited by Georg Hass and Rudolf E. Thun (Academic, New York, 1971), Vol. 6, pp. 170 ff.

G. Rasigni and P. Rouard, J. Opt. Soc. Am. 53, 604 (1963).

N. Emeric and A. Emeric, Thin Solid Films 1, 13 (1967).

W. N. Hansen, J. Opt. Soc. Am. 58, 380 (1968).

R. H. Doremus, J. Appl. Phys. 37, 2775 (1966).

T. M. Donovan, W. E. Spicer, J. M. Bennett, and E. J. Ashley, Phys. Rev. B 2, 397 (1970).

D. K. Burge and H. E. Bennett, J. Opt. Soc. Am. 54, 1428 (1964).

T. Yamaguchi, S. Yoshida, and A. Kinbara, J. Opt. Soc. Am. 62, 634 (1972).

P. Bousquet, Ann. Phys. (Paris) 2, 163 (1957).

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