Abstract

A membrane mirror assembly is described that has a membrane deflected by a region of electrostatic actuators, consisting of conducting pads. The procedure for fabrication of typical membranes is described and involves evaporation of the material onto a substrate in a vacuum chamber. Parametric equations, developed from basic vibration theory, are given for establishing transient and steady-state performance criteria. Experimental data, using both titanium and nickel test membranes, shows that the performance satisfies the predicted requirements.

© 1977 Optical Society of America

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References

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  1. M. Yellin, "Using membrane mirrors in adaptive optics," SPIE Proc. 75, 97 (1976).
  2. P. M. Morse, Vibration and Sound, 2nd ed. (McGraw-Hill, New York, 1948).
  3. R. J. Noll, "Dynamic Atmospheric Turbulence Corrections," SPIE Proc. 75, 39 (1976).
  4. P. M. Morse and K. U. Ingard, Theoretical Acoustics (McGraw-Hill, New York, 1968), p. 194.
  5. M. J. E. Golay (private correspondence).

1976 (2)

M. Yellin, "Using membrane mirrors in adaptive optics," SPIE Proc. 75, 97 (1976).

R. J. Noll, "Dynamic Atmospheric Turbulence Corrections," SPIE Proc. 75, 39 (1976).

Golay, M. J. E.

M. J. E. Golay (private correspondence).

Ingard, K. U.

P. M. Morse and K. U. Ingard, Theoretical Acoustics (McGraw-Hill, New York, 1968), p. 194.

Morse, P. M.

P. M. Morse, Vibration and Sound, 2nd ed. (McGraw-Hill, New York, 1948).

P. M. Morse and K. U. Ingard, Theoretical Acoustics (McGraw-Hill, New York, 1968), p. 194.

Noll, R. J.

R. J. Noll, "Dynamic Atmospheric Turbulence Corrections," SPIE Proc. 75, 39 (1976).

Yellin, M.

M. Yellin, "Using membrane mirrors in adaptive optics," SPIE Proc. 75, 97 (1976).

SPIE Proc. (2)

M. Yellin, "Using membrane mirrors in adaptive optics," SPIE Proc. 75, 97 (1976).

R. J. Noll, "Dynamic Atmospheric Turbulence Corrections," SPIE Proc. 75, 39 (1976).

Other (3)

P. M. Morse and K. U. Ingard, Theoretical Acoustics (McGraw-Hill, New York, 1968), p. 194.

M. J. E. Golay (private correspondence).

P. M. Morse, Vibration and Sound, 2nd ed. (McGraw-Hill, New York, 1948).

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