A membrane mirror assembly is described that has a membrane deflected by a region of electrostatic actuators, consisting of conducting pads. The procedure for fabrication of typical membranes is described and involves evaporation of the material onto a substrate in a vacuum chamber. Parametric equations, developed from basic vibration theory, are given for establishing transient and steady-state performance criteria. Experimental data, using both titanium and nickel test membranes, shows that the performance satisfies the predicted requirements.
© 1977 Optical Society of AmericaPDF Article