Abstract

The rotating-compensator/analyzer fixed-analyzer ellipsometer configuration proposed and discussed here combines the advantages of unambiguous polarization-state determination and insensitivity to detector polarization response shown by rotating-compensator (rotating-analyzer) fixed-analyzer instruments, with the self-calibration features of rotating-compensator rotating-analyzer configurations. Because such generality is not necessary for all ellipsometric applications, we compare this system to other automatic ellipsometers and suggest preferred configurations for several representative uses.

© 1976 Optical Society of America

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