Abstract

Small nonlinearity (~2%) of the light-flux detection system is shown to have appreciable effects on the accuracy of calibration and data analysis in rotating-analyzer ellipsometers. Procedures for detecting and correcting these effects are presented.

© 1976 Optical Society of America

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  1. B. D. Cahan and R. F. Spanier, Surf. Sci. 16, 166 (1969).
  2. R. Greef, Rev. Sci. Instrum. 41, 532 (1970).
  3. P. S. Hauge and F. H. Dill, IBM J. Res. Dev. 17, 472 (1973).
  4. D. E. Aspnes, Opt. Commun. 8, 222 (1973).
  5. Y. J. van der Meulen and N. C. Hien, J. Opt. Soc. Am. 64, 804 (1974).
  6. D. E. Aspnes, J. Opt. Soc. Am. 64, 812 (1974).
  7. R. M. A. Azzam and N. M. Bashara, J. Opt. Soc. Am. 64, 1459 (1974).
  8. R. H. Muller, Surf, Sci. 16, 14 (1969).
  9. Actually, the first, third, and fourth coefficients, which indicate errors, are also calculated.
  10. Previous measurements indicated that A0=0 was appropriate for this particular instrument, However, small changes of A0 (even with A2=0) can appreciably affect F.
  11. D. E. Aspnes, J. Opt. Soc. Am. 64, 639 (1974).
  12. W. G. Oldham, J. Opt. Soc. Am. 57, 57 (1967).

Aspnes, D. E.

D. E. Aspnes, Opt. Commun. 8, 222 (1973).

D. E. Aspnes, J. Opt. Soc. Am. 64, 812 (1974).

D. E. Aspnes, J. Opt. Soc. Am. 64, 639 (1974).

Azzam, R. M. A.

R. M. A. Azzam and N. M. Bashara, J. Opt. Soc. Am. 64, 1459 (1974).

Bashara, N. M.

R. M. A. Azzam and N. M. Bashara, J. Opt. Soc. Am. 64, 1459 (1974).

Cahan, B. D.

B. D. Cahan and R. F. Spanier, Surf. Sci. 16, 166 (1969).

Dill, F. H.

P. S. Hauge and F. H. Dill, IBM J. Res. Dev. 17, 472 (1973).

Greef, R.

R. Greef, Rev. Sci. Instrum. 41, 532 (1970).

Hauge, P. S.

P. S. Hauge and F. H. Dill, IBM J. Res. Dev. 17, 472 (1973).

Hien, N. C.

Y. J. van der Meulen and N. C. Hien, J. Opt. Soc. Am. 64, 804 (1974).

Muller, R. H.

R. H. Muller, Surf, Sci. 16, 14 (1969).

Oldham, W. G.

W. G. Oldham, J. Opt. Soc. Am. 57, 57 (1967).

Spanier, R. F.

B. D. Cahan and R. F. Spanier, Surf. Sci. 16, 166 (1969).

van der Meulen, Y. J.

Y. J. van der Meulen and N. C. Hien, J. Opt. Soc. Am. 64, 804 (1974).

Other

B. D. Cahan and R. F. Spanier, Surf. Sci. 16, 166 (1969).

R. Greef, Rev. Sci. Instrum. 41, 532 (1970).

P. S. Hauge and F. H. Dill, IBM J. Res. Dev. 17, 472 (1973).

D. E. Aspnes, Opt. Commun. 8, 222 (1973).

Y. J. van der Meulen and N. C. Hien, J. Opt. Soc. Am. 64, 804 (1974).

D. E. Aspnes, J. Opt. Soc. Am. 64, 812 (1974).

R. M. A. Azzam and N. M. Bashara, J. Opt. Soc. Am. 64, 1459 (1974).

R. H. Muller, Surf, Sci. 16, 14 (1969).

Actually, the first, third, and fourth coefficients, which indicate errors, are also calculated.

Previous measurements indicated that A0=0 was appropriate for this particular instrument, However, small changes of A0 (even with A2=0) can appreciably affect F.

D. E. Aspnes, J. Opt. Soc. Am. 64, 639 (1974).

W. G. Oldham, J. Opt. Soc. Am. 57, 57 (1967).

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