Abstract

Small nonlinearity (~2%) of the light-flux detection system is shown to have appreciable effects on the accuracy of calibration and data analysis in rotating-analyzer ellipsometers. Procedures for detecting and correcting these effects are presented.

© 1976 Optical Society of America

PDF Article

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription