Abstract

Sensitivity calculations are given for a novel ellipsometric technique that involves a rotating polarizer or analyzer and the measurement of signal phase angles. It is superior to optical null techniques under signal-limited conditions, and avoids the difficulties that attend precise signal-amplitude measurements. Noise coefficients as functions of optical-component settings and surface properties are presented for the technique and compared with those for the conventional ellipsometer.

© 1975 Optical Society of America

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