Abstract

Sensitivity calculations are given for a novel ellipsometric technique that involves a rotating polarizer or analyzer and the measurement of signal phase angles. It is superior to optical null techniques under signal-limited conditions, and avoids the difficulties that attend precise signal-amplitude measurements. Noise coefficients as functions of optical-component settings and surface properties are presented for the technique and compared with those for the conventional ellipsometer.

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  1. Optical Studies of Adsorbed Layers at Interfaces, edited by F. C. Tompkins (Faraday Society, London, 1970).
  2. R. J. Archer, Manual on Ellipsometry (Gaertner, Chicago, 1963).
  3. J. L. Ord and B. L. Wills, Appl. Opt. 6, 1673 (1967).
  4. J. R. Beatties, Philos. Mag. 46, 235 (1955).
  5. S. Roberts, Phys. Rev. 114, 104 (1959).
  6. C. V. Kent and J. Lawson, J. Opt. Soc. Am. 27, 117 (1937).
  7. Y. J. van der Meulen and N. C. Hien, J. Opt. Soc. Am. 64, 804 (1974).
  8. J. Archard, P. L. Clegg, and A. M. Taylor, Proc. Phys. Soc. Lond. B 65, 758 (1952).
  9. T. E. Faber and N. V. Smith, J. Opt. Soc. Am. 58, 102 (1968).
  10. R. C. Jones, J. Opt. Soc. Am. 31, 488 (1941).
  11. R. C. Jones, J. Opt. Soc. Am. 37, 110 (1947).
  12. D. E. Aspnes, Opt. Commun. 8, 222 (1973).
  13. M. J. Dignam, B. Rao, M. Moskovits, and R. W. Stobie, Can. J. Chem. 49, 1115 (1971).
  14. M. J. D. Powell, Computer J. 7, 155 (1964).
  15. D. E. Aspnes, J. Opt. Soc. Am. 64, 639 (1974).
  16. M. J. Dignam, B. Rao, and R. W. Stobie, Surf. Sci. 46, 308 (1974).

Archard, J.

J. Archard, P. L. Clegg, and A. M. Taylor, Proc. Phys. Soc. Lond. B 65, 758 (1952).

Archer, R. J.

R. J. Archer, Manual on Ellipsometry (Gaertner, Chicago, 1963).

Aspnes, D. E.

D. E. Aspnes, J. Opt. Soc. Am. 64, 639 (1974).

D. E. Aspnes, Opt. Commun. 8, 222 (1973).

Beatties, J. R.

J. R. Beatties, Philos. Mag. 46, 235 (1955).

Clegg, P. L.

J. Archard, P. L. Clegg, and A. M. Taylor, Proc. Phys. Soc. Lond. B 65, 758 (1952).

Dignam, M. J.

M. J. Dignam, B. Rao, and R. W. Stobie, Surf. Sci. 46, 308 (1974).

M. J. Dignam, B. Rao, M. Moskovits, and R. W. Stobie, Can. J. Chem. 49, 1115 (1971).

Faber, T. E.

T. E. Faber and N. V. Smith, J. Opt. Soc. Am. 58, 102 (1968).

Hien, N. C.

Y. J. van der Meulen and N. C. Hien, J. Opt. Soc. Am. 64, 804 (1974).

Jones, R. C.

R. C. Jones, J. Opt. Soc. Am. 37, 110 (1947).

R. C. Jones, J. Opt. Soc. Am. 31, 488 (1941).

Kent, C. V.

C. V. Kent and J. Lawson, J. Opt. Soc. Am. 27, 117 (1937).

Lawson, J.

C. V. Kent and J. Lawson, J. Opt. Soc. Am. 27, 117 (1937).

Moskovits, M.

M. J. Dignam, B. Rao, M. Moskovits, and R. W. Stobie, Can. J. Chem. 49, 1115 (1971).

Ord, J. L.

J. L. Ord and B. L. Wills, Appl. Opt. 6, 1673 (1967).

Powell, M. J. D.

M. J. D. Powell, Computer J. 7, 155 (1964).

Rao, B.

M. J. Dignam, B. Rao, and R. W. Stobie, Surf. Sci. 46, 308 (1974).

M. J. Dignam, B. Rao, M. Moskovits, and R. W. Stobie, Can. J. Chem. 49, 1115 (1971).

Roberts, S.

S. Roberts, Phys. Rev. 114, 104 (1959).

Smith, N. V.

T. E. Faber and N. V. Smith, J. Opt. Soc. Am. 58, 102 (1968).

Stobie, R. W.

M. J. Dignam, B. Rao, M. Moskovits, and R. W. Stobie, Can. J. Chem. 49, 1115 (1971).

M. J. Dignam, B. Rao, and R. W. Stobie, Surf. Sci. 46, 308 (1974).

Taylor, A. M.

J. Archard, P. L. Clegg, and A. M. Taylor, Proc. Phys. Soc. Lond. B 65, 758 (1952).

van der Meulen, Y. J.

Y. J. van der Meulen and N. C. Hien, J. Opt. Soc. Am. 64, 804 (1974).

Wills, B. L.

J. L. Ord and B. L. Wills, Appl. Opt. 6, 1673 (1967).

Other (16)

Optical Studies of Adsorbed Layers at Interfaces, edited by F. C. Tompkins (Faraday Society, London, 1970).

R. J. Archer, Manual on Ellipsometry (Gaertner, Chicago, 1963).

J. L. Ord and B. L. Wills, Appl. Opt. 6, 1673 (1967).

J. R. Beatties, Philos. Mag. 46, 235 (1955).

S. Roberts, Phys. Rev. 114, 104 (1959).

C. V. Kent and J. Lawson, J. Opt. Soc. Am. 27, 117 (1937).

Y. J. van der Meulen and N. C. Hien, J. Opt. Soc. Am. 64, 804 (1974).

J. Archard, P. L. Clegg, and A. M. Taylor, Proc. Phys. Soc. Lond. B 65, 758 (1952).

T. E. Faber and N. V. Smith, J. Opt. Soc. Am. 58, 102 (1968).

R. C. Jones, J. Opt. Soc. Am. 31, 488 (1941).

R. C. Jones, J. Opt. Soc. Am. 37, 110 (1947).

D. E. Aspnes, Opt. Commun. 8, 222 (1973).

M. J. Dignam, B. Rao, M. Moskovits, and R. W. Stobie, Can. J. Chem. 49, 1115 (1971).

M. J. D. Powell, Computer J. 7, 155 (1964).

D. E. Aspnes, J. Opt. Soc. Am. 64, 639 (1974).

M. J. Dignam, B. Rao, and R. W. Stobie, Surf. Sci. 46, 308 (1974).

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